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利用中频非平衡磁控溅射技术在单晶硅基底上沉积了类石墨碳膜, 采用Raman光谱、高分辨透射电子显微镜、原子力显微镜分析了薄膜微观结构和表面形貌; 采用纳米压痕仪和CSM摩擦磨损试验机测试了碳膜力学性能和摩擦学性能. 结果表明: 利用中频非平衡磁控溅射技术沉积的碳膜是一种以sp2键合碳为主、结构非晶、硬度适中、应力较低、表面粗糙度较大、摩擦性能优异的薄膜. 脉冲占空比对薄膜微观结构和性能有显著影响, 随着脉冲占空比的增大, Raman光谱D峰和G峰的强度比ID/IG先减小后增大, 而硬度随脉冲占空比的增大却呈现出相反的变化趋势, 即先增大后减小; 大气氛围中的摩擦性能测试表明, 本实验制备的薄膜具有优异的抗磨性能(～10-11 cm3/N-1. m-1)和承载能力(～2.5 GPa). 随脉冲占空比的增大, 薄膜摩擦系数变化甚微而磨损率却呈现先显著减小后轻微增大的变化趋势. 类石墨碳膜优异的摩擦学性能主要归因于其独特的结构、较低的内应力及良好的结构稳定性.
[1] Robertson J 2002 Mater. Sci. Eng. R 37 129
[2] [3] Neuville S, Matthews A 2007 Thin Solid Films 515 6619
[4] [5] Ma G J, Liu X L, Zhang H F, Wu H C, Peng L P, Jiang Y L 2007Acta Phys. Sin. 56 2377 (in Chinese ) [马国佳,刘喜亮, 张华芳, 武洪臣, 彭丽平, 蒋艳莉 2007 物理学报 56 2377]
[6] Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2007 ActaPhys. Sin. 57 1935 (in Chinese) [赵栋才,任妮, 马占吉, 邱家稳, 肖更竭, 武生虎 2007 物理学报 57 1935]
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[14] [15] Dai M J, Fu Z Q, Lin S S,Wang C B, Xiao X L 2010 Vacuum 47 1(in Chinese) [代明江, 付志强, 林松盛,王成彪, 肖晓玲 2010 真空 47 1]
[16] [17] Ding Q, Wang L P, Hu L T, Hu T C, Wang Y F, Zhang Y N 2011J. Appl. Phys. 109 013501
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[20] [21] Konca E, Cheng Y T, Weiner A M, Dasch J M, Alpas A T 2006Surf. Coat. Technol. 200 3996
[22] Yan S P, Jiang B L, Su Y, Zhang Y H 2008 Tribology 28 491 (inChinese) [严少平, 蒋百灵,苏阳, 张永宏 2008 摩擦学报 28 491]
[23] [24] Ma J, Jiang B L, Zhang Y H 2007 Tribology 27 437 (in Chinese)[马婕, 蒋百灵, 张永宏 2007 摩擦学报 27 437]
[25] [26] Fu Y H, Zhu X D, He J W, Yang S C 2003 Tribology 23 463 (inChinese) [付永辉, 朱晓东, 何家文, Yang S C 2003textitTribology 23 463]
[27] [28] Ferrari A C, Robertson J 2001 Phys. Rev. B 64 075414 [16] Ferrari A C, Robertson J 2000 Phys. Rev. B 61 14095
[29] [30] [31] Baptista D L, Zawislak F C 2004 Diamond Relat. Mater. 13 1791
[32] [33] [34] Siegal M P, Tallant D R, Martinez-Miranda L J, Barbour J C,Simpson R L, Overmyer D L 2000 Phys. Rev. B 61 10451
[35] [36] Liu A P, Zhu J Q, Han J C, Wu H P, Jia Z C 2007 Appl. Surf. Sci.253 9124
[37] [38] Peng X L, Barber Z H, Clyne T W 2001 Surf. Coat. Technol. 13823
[39] [40] Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G D,Berthold J, Schultrich B, Jger H U 2007 Diamond Relat. Mater.16 1771
[41] [42] Kim T Y, Lee C S, Lee Y J, Lee K R, Chae K H, Oh K H 2007 J.Appl. Phys. 101 023504
[43] Voevodin A A, Donley M S, Zabinski J S, Bultman J E 1995 Surf.Coat. Technol. 76-77 534
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[1] Robertson J 2002 Mater. Sci. Eng. R 37 129
[2] [3] Neuville S, Matthews A 2007 Thin Solid Films 515 6619
[4] [5] Ma G J, Liu X L, Zhang H F, Wu H C, Peng L P, Jiang Y L 2007Acta Phys. Sin. 56 2377 (in Chinese ) [马国佳,刘喜亮, 张华芳, 武洪臣, 彭丽平, 蒋艳莉 2007 物理学报 56 2377]
[6] Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2007 ActaPhys. Sin. 57 1935 (in Chinese) [赵栋才,任妮, 马占吉, 邱家稳, 肖更竭, 武生虎 2007 物理学报 57 1935]
[7] [8] [9] Chouquet C, Gavillet J, Ducros C, Sanchette F 2010 Mater. Chem.Phys. 12 3367
[10] Ma G J, Liu X L, Zhang H F, Wu H C, Peng L P 2007 Chin. Phys.B 17 1105
[11] [12] [13] Chen X C, Peng Z J, Fu Z Q, Wang C B 2010 China Surf. Eng. 2336 (in Chinese) [陈新春,彭志坚, 付志强, 王成彪 2010 中国表面工程 23 36]
[14] [15] Dai M J, Fu Z Q, Lin S S,Wang C B, Xiao X L 2010 Vacuum 47 1(in Chinese) [代明江, 付志强, 林松盛,王成彪, 肖晓玲 2010 真空 47 1]
[16] [17] Ding Q, Wang L P, Hu L T, Hu T C, Wang Y F, Zhang Y N 2011J. Appl. Phys. 109 013501
[18] [19] Yang S, Jones A H S, Teer D 2000 Surf. Coat. Technol. 133-134369
[20] [21] Konca E, Cheng Y T, Weiner A M, Dasch J M, Alpas A T 2006Surf. Coat. Technol. 200 3996
[22] Yan S P, Jiang B L, Su Y, Zhang Y H 2008 Tribology 28 491 (inChinese) [严少平, 蒋百灵,苏阳, 张永宏 2008 摩擦学报 28 491]
[23] [24] Ma J, Jiang B L, Zhang Y H 2007 Tribology 27 437 (in Chinese)[马婕, 蒋百灵, 张永宏 2007 摩擦学报 27 437]
[25] [26] Fu Y H, Zhu X D, He J W, Yang S C 2003 Tribology 23 463 (inChinese) [付永辉, 朱晓东, 何家文, Yang S C 2003textitTribology 23 463]
[27] [28] Ferrari A C, Robertson J 2001 Phys. Rev. B 64 075414 [16] Ferrari A C, Robertson J 2000 Phys. Rev. B 61 14095
[29] [30] [31] Baptista D L, Zawislak F C 2004 Diamond Relat. Mater. 13 1791
[32] [33] [34] Siegal M P, Tallant D R, Martinez-Miranda L J, Barbour J C,Simpson R L, Overmyer D L 2000 Phys. Rev. B 61 10451
[35] [36] Liu A P, Zhu J Q, Han J C, Wu H P, Jia Z C 2007 Appl. Surf. Sci.253 9124
[37] [38] Peng X L, Barber Z H, Clyne T W 2001 Surf. Coat. Technol. 13823
[39] [40] Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G D,Berthold J, Schultrich B, Jger H U 2007 Diamond Relat. Mater.16 1771
[41] [42] Kim T Y, Lee C S, Lee Y J, Lee K R, Chae K H, Oh K H 2007 J.Appl. Phys. 101 023504
[43] Voevodin A A, Donley M S, Zabinski J S, Bultman J E 1995 Surf.Coat. Technol. 76-77 534
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