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采用液相电化学沉积技术制备了ZnO纳米颗粒掺杂的类金刚石(DLC)薄膜, 研究了ZnO纳米颗粒掺杂对DLC薄膜场发射性能的影响. 利用X射线光电子能谱、透射电子显微镜、Raman光谱以及原子力显微镜分别对薄膜的化学组成、微观结构和表面形貌进行了表征. 结果表明: 薄膜中的ZnO纳米颗粒具有纤锌矿结构, 其含量随着电解液中Zn源的增加而增加. ZnO纳米颗粒掺杂增强了DLC薄膜的石墨化和表面粗糙度. 场发射测试表明, ZnO纳米颗粒掺杂能提高DLC薄膜的场发射性能, 其中Zn与Zn+C的原子比为10.3%的样品在外加电场强度为20.7 V/m时电流密度达到了1 mA/cm2. 薄膜场发射性能的提高归因于ZnO掺杂引起的表面粗糙度和DLC薄膜石墨化程度的增加.
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[1] Ilie A, Ferrari A C, Yagi T, Robertson J 2000 Appl. Phys. Lett. 76 2627
[2] [3] [4] Ma H Z, Zhang L, Yao N, Zhang B L, Hu H L, Wen G L 2000 Diam. Relat. Mater. 9 1608
[5] [6] Silva S R P, Carey J D, Guo X, Tsang W M, Poa C H P 2005 Thin Solid Films 79 482
[7] [8] Wu Y H, Hsu C M, Chia C T, Lin L N, Cheng C L 2002 Diam. Relat. Mater. 11 804
[9] [10] Ahmed S F, Mitra M K, Chattopadhyay K K 2007 Appl. Surf. Sci. 253 5480
[11] Liang H F, Liang Z H, Liu C L, Meng L G 2010 Appl. Surf. Sci. 256 1951
[12] [13] Paul R, Dalui S, Pal A K 2010 Surf. Coat. Technol. 204 4025
[14] [15] Wang L, Giles N C 2003 J. Appl. Phys. 94 973
[16] [17] [18] Yang P, Yan H, Mao S 2002 Adv. Funct. Mater. 12 323
[19] [20] Lan W, Tang G M, Cao W L, Liu X Q, Wang Y Y 2009 Acta Phys. Sin. 58 8501 (in Chinese) [兰伟, 唐国梅, 曹文磊, 刘雪芹, 王印月 2009 物理学报 58 8501]
[21] [22] Lee C J, Lee T J, Lyu S C, Zhang Y, Ruh H, Lee H J 2002 Appl. Phys. Lett. 81 3648
[23] Tseng Y K, Huang C J, Cheng H M, Lin I N, Liu K S, Chen I C 2003 Adv. Funct. Mater. 13 811
[24] [25] [26] Hsieh J, Chua D H C, Tay B K, Teo E H T, Tanemura M 2008 Diam. Relat. Mater. 17 167
[27] [28] Namba Y 1992 J. Vac. Technol. A 10 3368
[29] [30] Li R S, Xie E Q, Zhou M, Zhang Z X, Wang T, Lu B A 2008 Appl. Surf. Sci. 255 2787
[31] Wan S H, Wang L P, Xun Q J 2010 Electrochem. Commun. 12 61
[32] [33] Kundoo S, Saha P, Chattopadhyay K K 2004 Mater. Lett. 58 3920
[34] [35] [36] Xia Y N 2010 Ph. D. Dissertation (Beijing: Graduate University of Chinese Academy of Sciences) (in Chinese) [夏娅娜 2010 博士学位论文 (北京:中国科学院研究生院)]
[37] [38] Jung D R, Son D, Kim J, Kim C, Park B 2008 Appl. Phys. Lett. 93 163118
[39] Irmer G, Dorner-Reisel A 2005 Adv. Eng. Mater. 7 694
[40] [41] [42] Rajalakshmi M, Arora A K, Bendre B S, Mahamuni S 2000 J. Appl. Phys. 87 2445
[43] Cusc R, Alarcn-Llad E, Ibez J, Arts L, Jimnez J, Wang B G, Callahan M J 2007 Phys. Rev. B 75 165202
[44] [45] Fowler R H, Nordheim L W 1928 Proc. Roy. Soc. A 119 173
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