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表面波等离子体源的发展现状

董太源 叶坤涛 刘维清

表面波等离子体源的发展现状

董太源, 叶坤涛, 刘维清
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  • 对微波放电产生的平板型表面波等离子体源进行了系统介绍,分析了表面波等离子体的工作原理, 探讨了维持表面波等离子体放电的能量吸收机制,介绍了由单模谐振腔阵列、 亚波长衍射光栅及开槽天线阵列组成的新型波模转换器.表面波等离子体的产生机理、实现途径、 参数特性和数值仿真等方面的研究进展及其所取得的成果,有利于促进新型表面波等离子体源走向产业化应用, 并促使微电子产业的功效取得新的突破.
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  • 收稿日期:  2011-11-15
  • 修回日期:  2011-12-26
  • 刊出日期:  2012-07-20

表面波等离子体源的发展现状

  • 1. 江西理工大学理学院, 赣州 341000

摘要: 对微波放电产生的平板型表面波等离子体源进行了系统介绍,分析了表面波等离子体的工作原理, 探讨了维持表面波等离子体放电的能量吸收机制,介绍了由单模谐振腔阵列、 亚波长衍射光栅及开槽天线阵列组成的新型波模转换器.表面波等离子体的产生机理、实现途径、 参数特性和数值仿真等方面的研究进展及其所取得的成果,有利于促进新型表面波等离子体源走向产业化应用, 并促使微电子产业的功效取得新的突破.

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