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高精细度超稳光学参考腔是获得超窄线宽激光的核心部件. 本文报道了面向空间应用的高精细度球形超稳光学参考腔自主化研制及其初步测试结果. 设计球形腔体直径为80 mm，腔长78 mm，采用平-凹腔镜结构，凹镜曲率半径为0.5 m. 使用有限元方法计算了该参考腔的震动敏感度，最佳支撑位置的震动敏感度小于110-10/g. 采用超光滑表面三级抛光技术实现光学表面粗糙度小于0.4 nm（rms）的超精密加工，采用双离子束溅射法实现工作波长反射率大于99.999%、损耗小于4 ppm 腔镜镀膜，干式光胶方法键合腔体和腔镜. 利用扫腔线宽法和腔衰荡法对参考腔的线宽和精细度进行了测量，结果表明该参考腔的精细度约为195000，线宽为9.8 kHz. 将698 nm半导体激光器锁定到该参考腔上测得其损耗5 ppm. 与实验室进口同类型参考腔相比较，主要性能指标与其相当.
[1] Leibrandt D R, Thorpe M J, Notcutt M, Drullinger R E, Rosenband T, Bergquist J C 2011 Opt. Express 19 3471
[2] Kessler T, Hagemann C, Grebing C, Legero T, Steer U, Riehle F, Martin M J, Chen L, Ye J 2012 Nat. Photonics 6 687
[3] Swallows M D, Martin M J, Bishof M, Benko C, Lin Y, Blatt S, Rey A M, Ye J 2012 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59 416
[4] Cole G D, Zhang W, Martin M J, Ye J, AspelmeyerM 2013 Nat. Photon. 7 644
[5] Hagemann C, Grebing C, Lisdat C, Falke S, Legero T, Sterr U, Riehle F, Martin M J, Ye J 2014 Opt. Lett. 39 5102
[6] Wu L, Jiang Y, Ma C, Qi W, Yu H, Bi Z, Ma L 2016 Sci. Rep. 6 24969
[7] Drever R W P, Hall J L, Kowalski F V, Hough J, Ford G M, Munley A J, Ward H 1983 Appl. Phys. B 31 97
[8] Chou C W, Hume D B, Koelemeij J C, Wineland D J, Rosenband T 2010 Phys. Rev. Lett. 104 070802
[9] Hinkley N, Sherman J A, Phillips N B, Schioppo M, Lemke N D, Beloy K, Pizzocaro M, Oates C W, Ludlow A D 2013 Science 341 1215
[10] Nicholson T L, Campbell S L, Hutson R B, Marti G E, Bloom B J, McNally R L, Zhang W, Barrett M D, Safronova M S, Strouse G F, Tew W L, Ye J 2015 Nat. Commun. 6 6896
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[12] Fortier T M, Kirchner M S, Quinlan F, Taylor J, Bergquist J C, Rosenband, Lemke T N, Ludlow A, Jiang Y, Oates C W, Diddams S A 2011 Nat. Photonics 5 425
[13] Hough J, Rowan S 2005 J. Opt. A: Pure Appl. Opt. 7 544
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[16] Kessler T, Hagemann C, Grebing G, Legero T, Sterr U, Riehle F, Martin M J, Chen L, Ye J 2012 Nat. Photonics 6 687
[17] Wu L, Jang Y, Ma C, Qi W, Yu H, Bi Z, Ma L 2016 Sci. Rep. 6 24969
[18] Levin Y 1998 Phys. Rev. D 57 659
[19] Numata K, Kemery A, Camp J 2004 Phys. Rev. Lett. 93 250602
[20] Nietzsche S, Nawrodt R, Zimmer A, Schnabel R, Vodel W, Seidel P 2006 Supercond. Sci. Technol. 19 293
[21] Notcutt M, Ma L S, Ye J, Hall J L 2005 Opt. Lett. 30 1815
[22] Ludlow A D, Huang X, Notcutt M, Zanon T, Foreman S M, Boyd M M, Blatt S, Ye J 2007 Opt. Lett. 32 641
[23] Nazarova T, Riehle F, Sterr U 2006 Appl. Phy. B 83 531
[24] Webster S A, Oxborrow M, Gill P 2007 Phy. Rev. A 75 10064
[25] Chen L S, Hall J L, Ye J, Yang T, Zang E, Li T C 2006 Phy. Rev. A 30 150
[26] Lyngnes O, Ode A, Ness D C 2009 Proceedings of SPIE-The International Society 7504
[27] Traggis N G, Claussen N R 2010 tetitSPIE LASE 7578
[28] Darrow M C2014 Macalester Jourmal of Physics Astronomy 2 3
[29] Zalicki P, Zare R N 1995 J. Chem. Phys. 102 2708
[30] Webster S, Gill P 2011 Opt. Lett. 36 3572
[31] Schiller S, Gorlitz A, Nevsky A, Alighanbari S 2012 Physics 48 412
[32] Kessler T, Legero T, Sterr U 2012 J. Opt. Soc. Am. B 29 178
[33] Legero T, Kessler T, Sterr U 2010 J. Opt. Soc. Am. B 27 776
[34] Ong J L, Lucas L C, Lacefield W R, Rigney E D 1992 Biomaterials 13 249
[35] Wu J J, Wu C T, Liao Y C, Lu T R, Chen L C, Chen K H, Hwa L G, Kuo C T, Ling K J 1999 Thin Solid Films s355 417
[36] Cormie P, Mcbride J M, Mccaulley G O 2009 J. Strength Cond. Res. 23 177
[37] Berg S, Katardjiev L 1999 J. Vac. Sci. Technol. A 17 1916
[38] Flaminio R, Franc J, Michel C, Morgado N, Pinard L, Sassolas B 2010 Classical Quantum Gravity 27 84030
[39] Buzea C, Robbie K 2005 Rep. Prog. Phys. 68 385
[40] Mitin V F, Lazarow V K, Lari L, Lytvyn P M, Kholevchuk V V, Matveeva L A, Mitin V V, Venger E F 2014 Thin Solid Films 550 715
[41] Alexandrovski A 2009 Proceedings of SPIE-The International Society 7193 71930D-13
[42] Lawrence M J, Willke B, Husman M E, Gustafson E K, Byer R L 1999 J. Opt. Soc. Am. B 16 523
[43] Foltynowicz A 2009 Ph. D. Dissertation (Ume: Ume University)
[44] Hofstetter D, Thornton R L 1998 IEEE J. Quantum Electron. 34 1914
[45] Hood C J, Kimble H J, Ye J 2001 Phy. Rev. A 64 33804
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[1] Leibrandt D R, Thorpe M J, Notcutt M, Drullinger R E, Rosenband T, Bergquist J C 2011 Opt. Express 19 3471
[2] Kessler T, Hagemann C, Grebing C, Legero T, Steer U, Riehle F, Martin M J, Chen L, Ye J 2012 Nat. Photonics 6 687
[3] Swallows M D, Martin M J, Bishof M, Benko C, Lin Y, Blatt S, Rey A M, Ye J 2012 IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59 416
[4] Cole G D, Zhang W, Martin M J, Ye J, AspelmeyerM 2013 Nat. Photon. 7 644
[5] Hagemann C, Grebing C, Lisdat C, Falke S, Legero T, Sterr U, Riehle F, Martin M J, Ye J 2014 Opt. Lett. 39 5102
[6] Wu L, Jiang Y, Ma C, Qi W, Yu H, Bi Z, Ma L 2016 Sci. Rep. 6 24969
[7] Drever R W P, Hall J L, Kowalski F V, Hough J, Ford G M, Munley A J, Ward H 1983 Appl. Phys. B 31 97
[8] Chou C W, Hume D B, Koelemeij J C, Wineland D J, Rosenband T 2010 Phys. Rev. Lett. 104 070802
[9] Hinkley N, Sherman J A, Phillips N B, Schioppo M, Lemke N D, Beloy K, Pizzocaro M, Oates C W, Ludlow A D 2013 Science 341 1215
[10] Nicholson T L, Campbell S L, Hutson R B, Marti G E, Bloom B J, McNally R L, Zhang W, Barrett M D, Safronova M S, Strouse G F, Tew W L, Ye J 2015 Nat. Commun. 6 6896
[11] Heinecke D C, Bartels A, Diddams S A 2011 Opt. Express 19 18440
[12] Fortier T M, Kirchner M S, Quinlan F, Taylor J, Bergquist J C, Rosenband, Lemke T N, Ludlow A, Jiang Y, Oates C W, Diddams S A 2011 Nat. Photonics 5 425
[13] Hough J, Rowan S 2005 J. Opt. A: Pure Appl. Opt. 7 544
[14] Willke B, Danzmann K, Frede M, King P, Kracht D, Kwee P, Puncken O, Savage R L, Schulz B, Seifert F, Veltkamp C, Wagner S, Weels P, Winkelmann L 2008 Classical Quantum Gravity 25 114040
[15] Williams P A, Swann W C, Newbury N R 2008 J. Opt. Soc. Am. B 25 1284
[16] Kessler T, Hagemann C, Grebing G, Legero T, Sterr U, Riehle F, Martin M J, Chen L, Ye J 2012 Nat. Photonics 6 687
[17] Wu L, Jang Y, Ma C, Qi W, Yu H, Bi Z, Ma L 2016 Sci. Rep. 6 24969
[18] Levin Y 1998 Phys. Rev. D 57 659
[19] Numata K, Kemery A, Camp J 2004 Phys. Rev. Lett. 93 250602
[20] Nietzsche S, Nawrodt R, Zimmer A, Schnabel R, Vodel W, Seidel P 2006 Supercond. Sci. Technol. 19 293
[21] Notcutt M, Ma L S, Ye J, Hall J L 2005 Opt. Lett. 30 1815
[22] Ludlow A D, Huang X, Notcutt M, Zanon T, Foreman S M, Boyd M M, Blatt S, Ye J 2007 Opt. Lett. 32 641
[23] Nazarova T, Riehle F, Sterr U 2006 Appl. Phy. B 83 531
[24] Webster S A, Oxborrow M, Gill P 2007 Phy. Rev. A 75 10064
[25] Chen L S, Hall J L, Ye J, Yang T, Zang E, Li T C 2006 Phy. Rev. A 30 150
[26] Lyngnes O, Ode A, Ness D C 2009 Proceedings of SPIE-The International Society 7504
[27] Traggis N G, Claussen N R 2010 tetitSPIE LASE 7578
[28] Darrow M C2014 Macalester Jourmal of Physics Astronomy 2 3
[29] Zalicki P, Zare R N 1995 J. Chem. Phys. 102 2708
[30] Webster S, Gill P 2011 Opt. Lett. 36 3572
[31] Schiller S, Gorlitz A, Nevsky A, Alighanbari S 2012 Physics 48 412
[32] Kessler T, Legero T, Sterr U 2012 J. Opt. Soc. Am. B 29 178
[33] Legero T, Kessler T, Sterr U 2010 J. Opt. Soc. Am. B 27 776
[34] Ong J L, Lucas L C, Lacefield W R, Rigney E D 1992 Biomaterials 13 249
[35] Wu J J, Wu C T, Liao Y C, Lu T R, Chen L C, Chen K H, Hwa L G, Kuo C T, Ling K J 1999 Thin Solid Films s355 417
[36] Cormie P, Mcbride J M, Mccaulley G O 2009 J. Strength Cond. Res. 23 177
[37] Berg S, Katardjiev L 1999 J. Vac. Sci. Technol. A 17 1916
[38] Flaminio R, Franc J, Michel C, Morgado N, Pinard L, Sassolas B 2010 Classical Quantum Gravity 27 84030
[39] Buzea C, Robbie K 2005 Rep. Prog. Phys. 68 385
[40] Mitin V F, Lazarow V K, Lari L, Lytvyn P M, Kholevchuk V V, Matveeva L A, Mitin V V, Venger E F 2014 Thin Solid Films 550 715
[41] Alexandrovski A 2009 Proceedings of SPIE-The International Society 7193 71930D-13
[42] Lawrence M J, Willke B, Husman M E, Gustafson E K, Byer R L 1999 J. Opt. Soc. Am. B 16 523
[43] Foltynowicz A 2009 Ph. D. Dissertation (Ume: Ume University)
[44] Hofstetter D, Thornton R L 1998 IEEE J. Quantum Electron. 34 1914
[45] Hood C J, Kimble H J, Ye J 2001 Phy. Rev. A 64 33804
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