芯内双微孔复合腔结构的光纤法布里-珀罗传感器研究

张伟; 刘颖刚; 张庭; 刘鑫; 傅海威; 贾振安

doi:10.7498/aps.67.20180528

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摘要

提出了一种基于芯内双微孔复合结构的全光纤干涉传感器结构，建立了传感器反射光谱的理论模型，给出了反射光谱强度与微孔长度、孔内介质折射率、微孔端面反射与损耗系数以及光纤的特性参数间的关系，并模拟了传感器光谱对温度和折射率变化的响应特性.利用193 nm准分子激光器，在普通单模光纤上加工制作了具有复合腔结构的全光纤多参量传感器，进行了传感实验研究.结果表明，该传感器具有优于99%的温度、折射率线性响应度，对应两套温度和折射率灵敏度分别为-0.172 nm/℃，1050.700 nm/RIU和0.004 nm/℃，48.775 nm/RIU，不仅能够实现温度、折射率以及它们的区分测量，还能够应用于气体压力的测量，测量精度可达0.3 kPa.

关键词:

作者及机构信息

1.
西安建筑科技大学环境与市政工程学院, 西安 710055;

2.
西安石油大学, 光电油气测井与检测教育部重点实验室, 西安 710065

通信作者: 刘颖刚, ygliu@xsyu.edu.cn

基金项目: 国家自然科学基金（批准号：61240028）和陕西省自然科学基础研究计划（批准号：2013JM8032）资助的课题.

参考文献

[1]	Hideaki M, Daichi W, Hirotaka I 2013 Photonic Sens. 3 355
[2]	Huang Y, Tian Z, Sun L P, Sun D, Li J, Ran Y, Guan B O 2015 Opt. Express 23 26962
[3]	Pablo Z, Jesus M C, Carlos R Z, Ignacio R M, Francisco J A 2016 IEEE Sens. J. 16 4798
[4]	Liao C R, Hu T Y, Wang D N 2012 Opt. Express 20 22813
[5]	Li L, Xia Li, Xie Z H, Liu D M 2012 Opt. Express 20 11109
[6]	Xu L, Jiang L, Wang S, Li B, Lu Y 2013 Appl. Opt. 52 2038
[7]	Wang D, Cheng T H, Yeo Y K, Liu J G, Xu Z W, Wang Y X, Xiao G X 2010 Opt. Express 18 10343
[8]	Li Z L, Liao C R, Liu S, Wang Y P 2017 Acta Phys. Sin. 66 070708 (in Chinese)[李自亮, 廖常锐, 刘申, 王义平 2017 物理学报 66 070708]
[9]	Zhu Y Z, Cooper K L, Pickrell G R, Wang A 2006 J. Lightwave Technol. 24 861
[10]	Antunes P F C, Domingues M F F, Alberto N J, Andre P S 2014 IEEE Photonics Technol. Lett. 26 78
[11]	Jiang L, Zhao L J, Wang S M, Yang J P, Xiao H 2011 Opt. Express 19 17591
[12]	Nesson S, Yu M A, Zhang X M, Hsieh A H 2008 J. Biomed. Opt. 13 044040
[13]	Yang F, Tan Y Z, Jin W, Lin Y C, Qi Y, Ho H L 2016 Opt. Lett. 41 3025
[14]	Dominguesa M F, Antunesa P, Albertob N, Friasa R, Ferreirac R A S, Andrd P 2016 Measurement 77 265
[15]	Chen LX, Huang X G, Li J Y, Zhong Z B 2012 Rev. Sci. Instrum. 83 053113
[16]	Rao Y J, Deng M, Duan D W, Zhu T 2008 Sens. Actuators A 148 33
[17]	Xu B, Liu Y M, Wang D N, Li J Q 2016 J. Lightwave Technol. 34 4920
[18]	Gao S, Jin L, Ran Y, Sun L P, Li J, Guan B O 2012 Opt. Express 20 18281
[19]	Sun D, Ran Y, Wang G 2017 Sensors (Basel) 17 2559
[20]	Xu B, Liu Y M, Wang D N, Jia D G, Jiang C 2017 IEEE Photonics J. 9 7102309
[21]	Wang R H, Qiao X G 2015 IEEE Photonics Technol. Lett. 27 245
[22]	Zhang Y, Yuan L, Lan X, Kaur A, Huang J, Xiao H 2013 Opt. Lett. 38 4609
[23]	Quan M, Tian J, Yao Y 2015 Opt. Lett. 40 4891
[24]	Ma Q F, Ni K, Huang R 2017 J. OptoelectronicsLaser 28 123 (in Chinese)[马启飞, 倪凯, 黄然 2017 光电子激光 28 123]
[25]	Liu J B, Wang D N, Zhang L 2016 J. Lightwave Technol. 34 4872
[26]	Shi F F, Zhao C L, Xu B, Wang D N 2016 Acta Photonica Sin. 45 0306003 (in Chinese)[时菲菲, 赵春柳, 徐贲, 王东宁 2016 光子学报 45 0306003]

施引文献

[1]	Hideaki M, Daichi W, Hirotaka I 2013 Photonic Sens. 3 355
[2]	Huang Y, Tian Z, Sun L P, Sun D, Li J, Ran Y, Guan B O 2015 Opt. Express 23 26962
[3]	Pablo Z, Jesus M C, Carlos R Z, Ignacio R M, Francisco J A 2016 IEEE Sens. J. 16 4798
[4]	Liao C R, Hu T Y, Wang D N 2012 Opt. Express 20 22813
[5]	Li L, Xia Li, Xie Z H, Liu D M 2012 Opt. Express 20 11109
[6]	Xu L, Jiang L, Wang S, Li B, Lu Y 2013 Appl. Opt. 52 2038
[7]	Wang D, Cheng T H, Yeo Y K, Liu J G, Xu Z W, Wang Y X, Xiao G X 2010 Opt. Express 18 10343
[8]	Li Z L, Liao C R, Liu S, Wang Y P 2017 Acta Phys. Sin. 66 070708 (in Chinese)[李自亮, 廖常锐, 刘申, 王义平 2017 物理学报 66 070708]
[9]	Zhu Y Z, Cooper K L, Pickrell G R, Wang A 2006 J. Lightwave Technol. 24 861
[10]	Antunes P F C, Domingues M F F, Alberto N J, Andre P S 2014 IEEE Photonics Technol. Lett. 26 78
[11]	Jiang L, Zhao L J, Wang S M, Yang J P, Xiao H 2011 Opt. Express 19 17591
[12]	Nesson S, Yu M A, Zhang X M, Hsieh A H 2008 J. Biomed. Opt. 13 044040
[13]	Yang F, Tan Y Z, Jin W, Lin Y C, Qi Y, Ho H L 2016 Opt. Lett. 41 3025
[14]	Dominguesa M F, Antunesa P, Albertob N, Friasa R, Ferreirac R A S, Andrd P 2016 Measurement 77 265
[15]	Chen LX, Huang X G, Li J Y, Zhong Z B 2012 Rev. Sci. Instrum. 83 053113
[16]	Rao Y J, Deng M, Duan D W, Zhu T 2008 Sens. Actuators A 148 33
[17]	Xu B, Liu Y M, Wang D N, Li J Q 2016 J. Lightwave Technol. 34 4920
[18]	Gao S, Jin L, Ran Y, Sun L P, Li J, Guan B O 2012 Opt. Express 20 18281
[19]	Sun D, Ran Y, Wang G 2017 Sensors (Basel) 17 2559
[20]	Xu B, Liu Y M, Wang D N, Jia D G, Jiang C 2017 IEEE Photonics J. 9 7102309
[21]	Wang R H, Qiao X G 2015 IEEE Photonics Technol. Lett. 27 245
[22]	Zhang Y, Yuan L, Lan X, Kaur A, Huang J, Xiao H 2013 Opt. Lett. 38 4609
[23]	Quan M, Tian J, Yao Y 2015 Opt. Lett. 40 4891
[24]	Ma Q F, Ni K, Huang R 2017 J. OptoelectronicsLaser 28 123 (in Chinese)[马启飞, 倪凯, 黄然 2017 光电子激光 28 123]
[25]	Liu J B, Wang D N, Zhang L 2016 J. Lightwave Technol. 34 4872
[26]	Shi F F, Zhao C L, Xu B, Wang D N 2016 Acta Photonica Sin. 45 0306003 (in Chinese)[时菲菲, 赵春柳, 徐贲, 王东宁 2016 光子学报 45 0306003]

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芯内双微孔复合腔结构的光纤法布里-珀罗传感器研究

1. 西安建筑科技大学环境与市政工程学院, 西安 710055;

2. 西安石油大学, 光电油气测井与检测教育部重点实验室, 西安 710065

通信作者: 刘颖刚, ygliu@xsyu.edu.cn

基金项目:

国家自然科学基金（批准号：61240028）和陕西省自然科学基础研究计划（批准号：2013JM8032）资助的课题.

收稿日期: 2018-03-25

修回日期: 2018-06-24

刊出日期: 2019-10-20

摘要: 提出了一种基于芯内双微孔复合结构的全光纤干涉传感器结构，建立了传感器反射光谱的理论模型，给出了反射光谱强度与微孔长度、孔内介质折射率、微孔端面反射与损耗系数以及光纤的特性参数间的关系，并模拟了传感器光谱对温度和折射率变化的响应特性.利用193 nm准分子激光器，在普通单模光纤上加工制作了具有复合腔结构的全光纤多参量传感器，进行了传感实验研究.结果表明，该传感器具有优于99%的温度、折射率线性响应度，对应两套温度和折射率灵敏度分别为-0.172 nm/℃，1050.700 nm/RIU和0.004 nm/℃，48.775 nm/RIU，不仅能够实现温度、折射率以及它们的区分测量，还能够应用于气体压力的测量，测量精度可达0.3 kPa.

关键词:

Dual micro-holes-based in-fiber Fabry-Perot interferometer sensor

1.
School of Environmental and Municipal Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China;

2.
Key Laboratory of Photoelectric Oil and Gas Logging and Testing, Ministry of Education, Xi'an Shiyou University, Xi'an 710065, China

Fund Project:

Project supported by the National Natural Science Foundation of China (Grant No. 61240028) and the Natural Science Basic Research Plan of Shaanxi Province, China (Grant No. 2013JM8032).

Received Date: 25 March 2018

Accepted Date: 24 June 2018

Published Online: 20 October 2019

Abstract: A kind of dual micro-holes-based in-fiber Fabry-Perot interferometer sensor is proposed in this paper. The theoretical model of the reflection spectrum of proposed sensor is established based on the interference among four light beams, where both the relationships of the spectrum intensity with the length of micro-hole, refractive index (RI) of medium in cavity, transmission loss and reflection loss, and the characteristic parameters of fiber are demonstrated, and the temperature and RI responses of reflection spectra are also simulated. Through machining two micro-holes in single-mode fiber with 193 nm excimer laser, we fabricate the proposed fiber sensor which can be used for measuring the multi-physical quantities, and the corresponding experiments are demonstrated simultaneously. The results show that the sensor has better linear responses to temperature and RI change, and the corresponding linearity is superior to 99%. Due to having two sets of different temperature and RI sensitivities (i.e.-0.172 nm/℃ and 1050.700 nm/RIU; 0.004 nm/℃ and 48.775 nm/RIU) and better linearity, this kind of sensor can be used for measuring the temperature, the ambient RI and even the simultaneous discrimination of temperature and ambient RI. The RI and temperature resolutions are 1.010-5 RIU and 0.2℃, respectively. Furthermore, the sensor can also be used for sensing the gas pressure, and its measurement accuracy can reach to. 3 kPa. Owing to its high sensitivity, stability, small volume and easy fabrication, the sensor will be widely used in sensing technology.

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