-
[1] Zhou Y, Ahyi C, Isaacs-Smith T, Bozack M, Tin C C, Williams J, Park M, Cheng A, Park J H, Kim D J, Wang D, Preble E A, Hanser A, Evans K 2008 Sol. St. Elec. 52 756
[2] Kong M Y, Zhang J P, Wang X L, Sun D Z 2001 J.Cryst.Growth 227—228 371
[3] Yang Y T, Zhang C H, Sun Y M, Yao C F, Zhao Z M 2007 Nucl.Technol. 30 318 (in Chinese) [杨义涛、张崇宏、孙友梅、姚存峰、赵志明 2007 核技术 30 318]
[4] Pearton S J, Abernathy C R, Wilson R G, Zavada J M, Song C Y, Weinstein M G, Stavola M, Han J, Shul R J 1999 Nucl. Instrum. Meth. B 147 171
[5] Kucheyev S O, Williams J S, Jagadish C, Zou J, Li G 2000 Phys. Rev.B 62 7510
[6] Meng K, Jiang S L, Hou L N, Li C, Wang K, Ding Z B, Yao S D 2006 Acta Phys. Sin. 55 2476 (in Chinese) [蒙 康、姜森林、侯利娜、李 婵、王 坤、丁志博、姚淑德 2006 物理学报 55 2476]
[7] Arnau A, Aumayr F, Echenique P M, Grether M, Heiland W, Limburg J, Morgenstern R, Roncin P, Schippers S, Schuch R, Stolterfoht N, Varga P, Zouros T J M, Winter H P 1997 Surf. Sci. Rep. 27 113
[8] Aumayr F, El-Said A S, Meissl W 2008 Nucl. Instrum. Meth. B 266 2729
[9] Burgdrfer J, Lerner P, Meyer F W 1991 Phys. Rev. A 44 5674
[10] Parks D C, Stckli M P, Bell E W, Ratliff L P, Schmieder R W, Serpa F G, Gillaspy J D 1998 Nucl. Instrum. Meth. B 134 46
[11] Schenkel T, Barnes A V, Hamza A V, Schneider D H, Banks J C, Doyle B L 1998 Phys. Rev. Lett. 80 4325
[12] Wang Y Y, Zhao Y T, Xiao G Q,Fang Y, Zhang X A, Wang T S, Wang S W, Peng H B 2006 Acta Phys.Sin. 55 673 (in Chinese) [王瑜玉、赵永涛、肖国青、房 燕、张小安、王铁山、王释伟、彭海波 2006物理学报 55 673]
[13] Zhang X A, Xiao G Q,Wang W S, Mao R S 2002 Nucl.Phys.Rev. 19 342 (in Chinese) [张小安、肖国青、王武生、毛瑞士 2002 原子核物理评论 19 342]
[14] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Li B S, Jin Y F, Sun Y M, Song S J 2008 Chin. Phys. Lett. 25 2670
[15] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Sun Y M, Li B S, Zhao Z M, Song S J 2009 Acta Phys. Sin. 58 5578 (in Chinese) [张丽卿、张崇宏、杨义涛、姚存峰、孙友梅、李炳生、赵志明、宋书健 2009物理学报 58 5578 ]
[16] Ould-Metidji Y, Bideux L, Baca D, Gruzza B, Matolin V 2003 Appl. Surf. Sci. 212 614
[17] Sidorenko A, Peisert H, Neumann H, Chassé T 2007 Surf. Sci. 601 4521
[18] Wolter S D, DeLucca J M, Mohney S E, Kern R S, Kuo C P 2000 Thin Solid Films 371 153
[19] Anantathanasarn S, Ootomo S, Hashizume T, Hasegawa H 2000 Appl. Surf. Sci.159 456
[20] Sidorenko A, Peisert H, Neumann H, Chassé T 2006 Surf. Sci. 252 7671
[21] Liu K T, Su Y K, Chuang R W, Chang S J, Horikoshi Y 2006 Microelectr. J. 37 417
[22] Bermudez V M, Koleske D D, Wickenden A E 1998 Appl. Surf. Sci. 126 69
[23] Ding W Y, Xu J, Lu W Q, Deng X L, Dong C 2009 Acta Phys. Sin. 58 4109 (in Chinese) [丁万昱、徐 军、陆文琪、邓新绿、董 闯 2009物理学报 58 4109 ]
[24] Ma G L, Zhang Y M, Zhang Y M, Ma Z F 2008 Acta Phys. Sin. 57 4119 (in Chinese) [马格林、张玉明、张义门、马仲发 2008物理学报 57 4119 ]
[25] Matolín V, Fabík S, Glosík J, Bideux L, Ould-Metidji Y, Gruzza B 2004 Vacuum 76 471
[26] Zhang C H, Song Y, Sun Y M, Chen H, Yang Y T, Zhou L H, Jin Y F 2007 Nucl. Instrum. Meth. B 256 199
[27] Neugebauer J, Zywietz T, Scheffler M, Northrup J 2000 Appl. Surf. Sci. 159—160 355
[28] Wang C, Hao Y, Feng Q, Guo L L 2006 Semiconductor Technology 31 409 (in Chinese) [王 冲、郝 跃、冯 倩、郭亮良 2006 半导体技术 31 409]
[29] Lee J M, Chang K M, Kim S W, Huh C, Lee I H, Park S J 2000 J. Appl. Phys. 87 7667
[30] Feenstra R M, Chen H J, Ramachandran V, Smith A R, Greve D W 2000 Appl. Surf. Sci. 166 165
[31] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Li B S, Sun Y M, Song S J 2009 Chin. Phys. Lett. 26 036101
[32] Oya Y, Miyauchi H, Suda T, Nishikawa Y, Yoshikawa A, Tanaka S, Okuno K 2007 Fusion Eng.Des. 82 2582
-
[1] Zhou Y, Ahyi C, Isaacs-Smith T, Bozack M, Tin C C, Williams J, Park M, Cheng A, Park J H, Kim D J, Wang D, Preble E A, Hanser A, Evans K 2008 Sol. St. Elec. 52 756
[2] Kong M Y, Zhang J P, Wang X L, Sun D Z 2001 J.Cryst.Growth 227—228 371
[3] Yang Y T, Zhang C H, Sun Y M, Yao C F, Zhao Z M 2007 Nucl.Technol. 30 318 (in Chinese) [杨义涛、张崇宏、孙友梅、姚存峰、赵志明 2007 核技术 30 318]
[4] Pearton S J, Abernathy C R, Wilson R G, Zavada J M, Song C Y, Weinstein M G, Stavola M, Han J, Shul R J 1999 Nucl. Instrum. Meth. B 147 171
[5] Kucheyev S O, Williams J S, Jagadish C, Zou J, Li G 2000 Phys. Rev.B 62 7510
[6] Meng K, Jiang S L, Hou L N, Li C, Wang K, Ding Z B, Yao S D 2006 Acta Phys. Sin. 55 2476 (in Chinese) [蒙 康、姜森林、侯利娜、李 婵、王 坤、丁志博、姚淑德 2006 物理学报 55 2476]
[7] Arnau A, Aumayr F, Echenique P M, Grether M, Heiland W, Limburg J, Morgenstern R, Roncin P, Schippers S, Schuch R, Stolterfoht N, Varga P, Zouros T J M, Winter H P 1997 Surf. Sci. Rep. 27 113
[8] Aumayr F, El-Said A S, Meissl W 2008 Nucl. Instrum. Meth. B 266 2729
[9] Burgdrfer J, Lerner P, Meyer F W 1991 Phys. Rev. A 44 5674
[10] Parks D C, Stckli M P, Bell E W, Ratliff L P, Schmieder R W, Serpa F G, Gillaspy J D 1998 Nucl. Instrum. Meth. B 134 46
[11] Schenkel T, Barnes A V, Hamza A V, Schneider D H, Banks J C, Doyle B L 1998 Phys. Rev. Lett. 80 4325
[12] Wang Y Y, Zhao Y T, Xiao G Q,Fang Y, Zhang X A, Wang T S, Wang S W, Peng H B 2006 Acta Phys.Sin. 55 673 (in Chinese) [王瑜玉、赵永涛、肖国青、房 燕、张小安、王铁山、王释伟、彭海波 2006物理学报 55 673]
[13] Zhang X A, Xiao G Q,Wang W S, Mao R S 2002 Nucl.Phys.Rev. 19 342 (in Chinese) [张小安、肖国青、王武生、毛瑞士 2002 原子核物理评论 19 342]
[14] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Li B S, Jin Y F, Sun Y M, Song S J 2008 Chin. Phys. Lett. 25 2670
[15] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Sun Y M, Li B S, Zhao Z M, Song S J 2009 Acta Phys. Sin. 58 5578 (in Chinese) [张丽卿、张崇宏、杨义涛、姚存峰、孙友梅、李炳生、赵志明、宋书健 2009物理学报 58 5578 ]
[16] Ould-Metidji Y, Bideux L, Baca D, Gruzza B, Matolin V 2003 Appl. Surf. Sci. 212 614
[17] Sidorenko A, Peisert H, Neumann H, Chassé T 2007 Surf. Sci. 601 4521
[18] Wolter S D, DeLucca J M, Mohney S E, Kern R S, Kuo C P 2000 Thin Solid Films 371 153
[19] Anantathanasarn S, Ootomo S, Hashizume T, Hasegawa H 2000 Appl. Surf. Sci.159 456
[20] Sidorenko A, Peisert H, Neumann H, Chassé T 2006 Surf. Sci. 252 7671
[21] Liu K T, Su Y K, Chuang R W, Chang S J, Horikoshi Y 2006 Microelectr. J. 37 417
[22] Bermudez V M, Koleske D D, Wickenden A E 1998 Appl. Surf. Sci. 126 69
[23] Ding W Y, Xu J, Lu W Q, Deng X L, Dong C 2009 Acta Phys. Sin. 58 4109 (in Chinese) [丁万昱、徐 军、陆文琪、邓新绿、董 闯 2009物理学报 58 4109 ]
[24] Ma G L, Zhang Y M, Zhang Y M, Ma Z F 2008 Acta Phys. Sin. 57 4119 (in Chinese) [马格林、张玉明、张义门、马仲发 2008物理学报 57 4119 ]
[25] Matolín V, Fabík S, Glosík J, Bideux L, Ould-Metidji Y, Gruzza B 2004 Vacuum 76 471
[26] Zhang C H, Song Y, Sun Y M, Chen H, Yang Y T, Zhou L H, Jin Y F 2007 Nucl. Instrum. Meth. B 256 199
[27] Neugebauer J, Zywietz T, Scheffler M, Northrup J 2000 Appl. Surf. Sci. 159—160 355
[28] Wang C, Hao Y, Feng Q, Guo L L 2006 Semiconductor Technology 31 409 (in Chinese) [王 冲、郝 跃、冯 倩、郭亮良 2006 半导体技术 31 409]
[29] Lee J M, Chang K M, Kim S W, Huh C, Lee I H, Park S J 2000 J. Appl. Phys. 87 7667
[30] Feenstra R M, Chen H J, Ramachandran V, Smith A R, Greve D W 2000 Appl. Surf. Sci. 166 165
[31] Zhang L Q, Zhang C H, Yang Y T, Yao C F, Li B S, Sun Y M, Song S J 2009 Chin. Phys. Lett. 26 036101
[32] Oya Y, Miyauchi H, Suda T, Nishikawa Y, Yoshikawa A, Tanaka S, Okuno K 2007 Fusion Eng.Des. 82 2582
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