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室温下采用射频磁控溅射法,在硅衬底上制备了Y2O3-TiO2氧化物复合薄膜.利用XRD(X-ray diffraction)和AFM( atomic force microscopy)分析观察了退火前后样品的物相、形貌等变化,讨论了致密薄膜的生长机理.实验发现,溅射功率越大,薄膜的平整度和致密度越好.对热处理前后样品的结晶结构和表面形貌的分析结果显示,在本实验参数范围内,随着溅射功率的增大,更多的Y2O3
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关键词:
- Y2O3-TiO2薄膜 /
- 表面形貌 /
- 原子力显微镜 /
- 磁控溅射
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[24] Zhu C F, Wang C 2007 Scanning probe microscopy application progress(Binjing: chemical industry press)p5 (in Chinese) [朱传风、王琛著 2007扫描探针显微术应用进展(北京:化学工业出版社)第5页]
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[1] Mikhelashvili V, Eisenstein G 2001 Microelectronics Reliability 41 1057
[2] Suhail M H, Mohan Rao G, Mohan 1992 J. Appl. Phys. 71 1421
[3] Hu Z G, Li W W, Wu J D, Sun J, Shu Q W, Zhong X X, Zhu Z Q, Chu J H 2008 Appl. Phys. Lett. 93 181910-1
[4] Zhang M, Lin G Q, Dong C, Wen L S 2007 Acta Phys. Sin. 56 7300 (in Chinese)[张敏、林国强、董 闯、闻立时 2007 物理学报 56 7300]
[5] Gassim G, Alkhateeb N, Hussein H 2007 Desalination 209 342
[6] Meulen T, Mattson A, Osterlund L 2007 Journal of Catalysis 251 131
[7] Wang H, Wu Y, Xu B Q 2005 Applied Catalysis B: Environmental 59 139
[8] Weinberger B R, Garber R B 1994 Appl. Phys. Lett. 66 2409
[9] Wang S F, Hsu Y F, Lee Y S 2006 Ceramics International 32 121
[10] Okimura K, Maeda N, Shibata A 1996 Thin Solid Films 281 427
[11] Tang H, Parasad K, Sanjines R, Schmid P E, Levy F 1994 J. Appl. Phys. 75 2042
[12] Albertin K F, Pereyra I 2009 Thin Solid Films 517 4548
[13] Kadoshima M, Hiratani M, Shimamoto Y, Torii K, Miki H, Kimura S, Nabatame T 2003 Thin Solid Films 424 224
[14] Song G B, Liu F S, Peng T J, Liang J K, Rao G H 2002 Acta Phys. Sin. 51 2793 (in Chinese)[宋功保、刘福生、彭同江、梁敬魁、饶光辉 2002 物理学报 51 2793]
[15] Tang J Y 2001 Acta Phys. Sin. 50 2198 (in Chinese) [唐俊勇 2001 物理学报 50 2198]
[16] Cui Y F, Yuan Z H 2005 Acta Phys. Sin. 55 5172 (in Chinese) [崔永峰、袁志好 2005 物理学报 55 5172]
[17] Wang S F, Hsu Y F, Lee R L, Lee Y S 2004 Applied Surface Science 229 140
[18] Granta C D, Schwartzberga A M, Smestadb G P, Kowalik J, Tolbert L M, Zhang J Z 2003 Synthetic Metals 132 197
[19] Smestada G P, Spiekermannb S, Kowalik J, Granta C D, Schwartzberga A M, Zhang J, Tolbert L M, Moons E 2003 Solar Energy Materials & Solar Cells 76 85
[20] Saito Y, Kitamura T, Wada Y J, Yanagida S 2002 Synthetic Metals 131 185
[21] Li B, Wang L D, Zhang D Q, Qiu Y 2003 Chinese Science Bulletin 48 22 (in Chinese) [李 斌、王立铎、张德强、邱 勇 2003 科学通报 48 22]
[22] Zhang W J, Zhu S L, Li Y, Wang F H, He H B 2009 Plating & Finishing 31 3 (in Chinese)[张文杰、朱圣龙、李 瑛、王福会、何红波 2009 电镀与精饰 31 3]
[23] Raghavan D, Gu X, Nguyen T, VanLandingham M, Karim A 2000 Macromelecules 33 2573
[24] Zhu C F, Wang C 2007 Scanning probe microscopy application progress(Binjing: chemical industry press)p5 (in Chinese) [朱传风、王琛著 2007扫描探针显微术应用进展(北京:化学工业出版社)第5页]
[25] Zhang W J, Wang K L, Zhu S L, Li Y, Wang F H, He H B 2009 Chemicsl Engineering Journal 155 83
[26] Huo H B, Liu Z T, Yan F, 2008 Materials Review 22 123 (in Chinese) [霍会宾、刘正堂、阎 锋2008材料导报22 123]
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