The formation and quenching kinetics of ArF* and Ar2F* have been studied by ive-stigating their timeresolved spectra. Analysis shows that the decay process of ArF* depands on the time evolution of it's main precursor Ar*, but that of Ar2F* is determined by its own effective lifetime. Thereby the two-body quenching rate constant of Ar* by F2, three-body quenching rate constant of Ar* by Ar, as well as two-body quenching rate constant of Ar2F* by He, Ar and F2, and the radiative lifetime of Ar2F* are determined.