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中国物理学会期刊

用Linfoot象质评价理论研究高分辨电子显微镜依赖失焦的象质

CSTR: 32037.14.aps.38.516

A STUDY ON IMAGE QUALITY DEPENDING ON DEFOCUSING HREM WITH IMAGE QUALIFICATION THEORY OF LINFOOT

CSTR: 32037.14.aps.38.516
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  • 本文用Linfoot象质评价函数对弱相位物体成象高分辨电子显微镜的失焦特性作了研究。测量厚度为10nm的无定形非晶碳膜的高分辨电子显微象功率谱,从而确定相对结构容量分布,并从理论计算上进行了证实,据此对保真度相关量及未知晶体成象和自动聚焦作了讨论。

     

    Using image qualification theory of Linfoot, we studied the deforcusing character of imaging of weak phase object in HREM. The power spectrum of electron micrographs of an amorphous carbon thin foil specimen of 10 μm thick is measured from which the distribution of the relative structral content is determined. It is further verified by numerical analysis. The correlation factor, the image fidelity, the choice of the defocus amount in the electron microscope for the unkown crystal objects and automatic focusing is discussed.

     

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