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为研究合金薄膜非晶化后力学性能持续提高的原因，通过双靶磁控共溅射方法制备了一系列不同Zr含量的Al-Zr合金薄膜，采用EDS，XRD，TEM 和纳米力学探针表征了薄膜的微结构和力学性能. 结果表明：在溅射粒子高分散性和薄膜生长非平衡性的共同作用下，较低Zr 含量的薄膜形成超过饱和固溶体，剧烈的晶格畸变使薄膜的晶粒纳米化，其硬度相应迅速提高. 随Zr含量的进一步增加薄膜形成非晶结构，非晶薄膜的硬度因Al-Zr键数量的增加持续提高，并在含33.3 at.%Zr达到9.8 GPa后增幅减缓. 研究结果揭示了非晶薄膜中Al-Zr键对薄膜力学性能的显著作用.
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[2] Yang D, Zhong N, Shang H L, Sun S Y, Li G Y 2013 Acta Phys. Sin. 62 036801 (in Chinese)[杨铎, 钟宁, 尚海龙, 孙士阳, 李戈扬 2013 物理学报 62 036801]
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[7] Sanchette F, Tran Huu Loi, Billard A, Frantz C 1995 Surf Coat. Technol 74-75 903
[8] Lee Z, Ophus C, Fischer L M, Nelson-Fitzpatrick N, Westra K L, Evoy S, Radmilovic V, Dahmen U, Mitlin D 2006 Nanotechnology 17 3063
[9] Stubicar M, Tonejc A, Radic N 2001 Vacuum 61 309
[10] Debili M Y, Loï T H, Frantz C 1998 La revue de Metallurgie-CIT Science et Géenie des Matériaux 1501
[11] Boukhris N, Lallouche S, Debilia M Y, Draissia M 2009 Eur Phys J App Phys. 45 30501
[12] Draissia M Debill M Y 2005 Philosophical Magazine Letters 85 439
[13] Draissia M, Boudemagh H and Debili M Y 2004 Physica Scripta 69 348
[14] Naka M, Shibayanagi T, Maeda M, Zhao S, Mori H 2000 Vacuum. 59 252
[15] Almtoft P K, Ejsing M A, Bøttiger J, Chevallier J 2007 J. Mater. Res. 22 1018
[16] Silva M, Wille C, Klement U, Choi P, Al-Kassab T 2007 Mater Sci Eng A. 445 31
[17] Liu F 2005 Appl. Phys. A. 81 1095
[18] Yamakov V, Wolf D, Phillpot S R, Mukherjee A K, Gleiter H 2002 Nature Materials 1 45
[19] Leyson G P M, Curtin W A, Hector Jr L G, Woodward C F 2010 Nature Materials 9 750
[20] Legros M, Gianola D S, Hemker K J 2008 Acta Materialia 56 3380
[21] Rupert T J, Gianola D S, Gan Y, Hemker K J 2009 Science 326 1686
[22] Dao M, Lu L, Asaro R J, De Hosson J T M, Ma E 2007 Acta Materialia 55 4041
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[1] Rupert T J, Trenkle J C, Schuh C A 2011 Acta Materialia 59 1619
[2] Yang D, Zhong N, Shang H L, Sun S Y, Li G Y 2013 Acta Phys. Sin. 62 036801 (in Chinese)[杨铎, 钟宁, 尚海龙, 孙士阳, 李戈扬 2013 物理学报 62 036801]
[3] Botcharova E, Heilmaier M, Freudenberger J, Drew G, Kudashow D, Martin U, Schultz L 2003 Journal of Alloys and Compounds 351 119
[4] Tsuda T, Hussey C L, Stafford G R, Kongstein O 2004 Journal of The Electrochemical Society 151 C447
[5] Sanchette F, Billard A 2001 Surf Coat Technol. 142 218
[6] Perez A, Sanchette F, Billard A, Rébéré, Berziou C, Touzain S, Creus J 2012 Mater Chem Phys 132 154
[7] Sanchette F, Tran Huu Loi, Billard A, Frantz C 1995 Surf Coat. Technol 74-75 903
[8] Lee Z, Ophus C, Fischer L M, Nelson-Fitzpatrick N, Westra K L, Evoy S, Radmilovic V, Dahmen U, Mitlin D 2006 Nanotechnology 17 3063
[9] Stubicar M, Tonejc A, Radic N 2001 Vacuum 61 309
[10] Debili M Y, Loï T H, Frantz C 1998 La revue de Metallurgie-CIT Science et Géenie des Matériaux 1501
[11] Boukhris N, Lallouche S, Debilia M Y, Draissia M 2009 Eur Phys J App Phys. 45 30501
[12] Draissia M Debill M Y 2005 Philosophical Magazine Letters 85 439
[13] Draissia M, Boudemagh H and Debili M Y 2004 Physica Scripta 69 348
[14] Naka M, Shibayanagi T, Maeda M, Zhao S, Mori H 2000 Vacuum. 59 252
[15] Almtoft P K, Ejsing M A, Bøttiger J, Chevallier J 2007 J. Mater. Res. 22 1018
[16] Silva M, Wille C, Klement U, Choi P, Al-Kassab T 2007 Mater Sci Eng A. 445 31
[17] Liu F 2005 Appl. Phys. A. 81 1095
[18] Yamakov V, Wolf D, Phillpot S R, Mukherjee A K, Gleiter H 2002 Nature Materials 1 45
[19] Leyson G P M, Curtin W A, Hector Jr L G, Woodward C F 2010 Nature Materials 9 750
[20] Legros M, Gianola D S, Hemker K J 2008 Acta Materialia 56 3380
[21] Rupert T J, Gianola D S, Gan Y, Hemker K J 2009 Science 326 1686
[22] Dao M, Lu L, Asaro R J, De Hosson J T M, Ma E 2007 Acta Materialia 55 4041
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