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氧化物薄膜晶体管研究进展

兰林锋 张鹏 彭俊彪

氧化物薄膜晶体管研究进展

兰林锋, 张鹏, 彭俊彪
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  • 氧化物半导体材料因其载流子迁移率高、制备温度低、电学均匀性好、对可见光透明和成本低等优势, 被认为是最适合驱动有机发光二极管的薄膜晶体管(TFT)的半导体有源材料之一. 目前氧化物TFT已成功地应用在平板显示的驱动背板上. 本文从氧化物TFT的历史和发展状况出发, 先介绍了氧化物半导体材料及其载流子输运机理, 然后详细介绍了氧化物TFT的结构、制备方法以及电学稳定性, 接着介绍了近些年来氧化物TFT的应用情况, 最后总结了氧化物TFT存在的问题以及今后研究的方向.
      通信作者: 兰林锋, lanlinfeng@scut.edu.cn
    • 基金项目: 国家高技术研究发展计划 (批准号: 2014AA033002)、国家重点基础研究发展计划(批准号: 2015CB655000)和国家自然科学基金(批准号: 61204087, 51173049)资助的课题.
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  • 收稿日期:  2016-02-06
  • 修回日期:  2016-03-13
  • 刊出日期:  2016-06-20

氧化物薄膜晶体管研究进展

  • 1. 华南理工大学, 发光材料与器件国家重点实验室, 广州 510640
  • 通信作者: 兰林锋, lanlinfeng@scut.edu.cn
    基金项目: 

    国家高技术研究发展计划 (批准号: 2014AA033002)、国家重点基础研究发展计划(批准号: 2015CB655000)和国家自然科学基金(批准号: 61204087, 51173049)资助的课题.

摘要: 氧化物半导体材料因其载流子迁移率高、制备温度低、电学均匀性好、对可见光透明和成本低等优势, 被认为是最适合驱动有机发光二极管的薄膜晶体管(TFT)的半导体有源材料之一. 目前氧化物TFT已成功地应用在平板显示的驱动背板上. 本文从氧化物TFT的历史和发展状况出发, 先介绍了氧化物半导体材料及其载流子输运机理, 然后详细介绍了氧化物TFT的结构、制备方法以及电学稳定性, 接着介绍了近些年来氧化物TFT的应用情况, 最后总结了氧化物TFT存在的问题以及今后研究的方向.

English Abstract

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