搜索

文章查询

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

激光超衍射加工机理与研究进展

张心正 夏峰 许京军

激光超衍射加工机理与研究进展

张心正, 夏峰, 许京军
PDF
导出引用
导出核心图
  • 随着纳米科技和微纳电子器件的发展,制造业对微纳加工技术的要求越来越高.激光加工技术是一种绿色先进制造技术,具有巨大的发展潜力,已广泛应用于不同的制造领域.为实现低成本、高效率、大面积尤其是高精度的激光微纳加工制造,研究和发展激光超衍射加工技术具有十分重要的科学意义和应用价值.本文首先阐述了基于非线性效应的远场激光直写超衍射加工技术的原理与国内外发展状况,包括激光烧蚀加工技术、激光诱导改性加工技术和多光子光聚合加工技术等;然后介绍了几种基于倏逝波的近场激光超衍射加工技术,包括扫描近场光刻技术、表面等离子激元光刻技术等新型超衍射激光近场光刻技术的机理与研究进展;最后对激光超衍射加工中存在的问题及未来发展方向进行了讨论.
      通信作者: 许京军, jjxu@nankai.edu.cn
    • 基金项目: 国家重点基础研究发展计划(批准号:2013CB328702)、国家自然科学基金(批准号:11674182)、天津市自然科学基金(批准号:17JCYBJC16700)、111计划(批准号:B07013)、教育部长江学者和创新团队发展计划(批准号:IRT_13R29)和山西大学极端光学协同创新中心资助的课题.
    [1]

    Wagner C, Harned N 2010 Nat. Photon. 4 24

    [2]

    Gale M T, Knop K 1983 Proc. SPIE 0398 347

    [3]

    Roth W, Schumacher H, Beneking H 1983 Electron. Lett. 19 142

    [4]

    Rensch C, Hell S, Schickfus M V, Hunklinger S 1989 Appl. Opt. 28 3754

    [5]

    Goltsos W C, Liu S A 1990 Proc. SPIE 1211 137

    [6]

    Haruna M, Takahashi M, Wakahayashi K, Nishihara H 1990 Appl. Opt. 29 5120

    [7]

    Cui Z 2005 Micro-Nanofabrication Technologies and Applications (Beijing: Higher Education Press) p51

    [8]

    Wang Y, Guo C, Cao S, Miao J, Ren T, Liu Q 2010 J. Nanosci. Nanotechnol. 10 7134

    [9]

    Liu Q, Duan X, Peng C 2014 Novel Optical Technologies for Nanofabrication (Berlin Heidelberg: Springer-Verlag) p8

    [10]

    Kurihara K, Nakano T, Ikeya H, Ujiie M, Tominaga J 2008 Microelectron. Eng. 85 1197

    [11]

    Hao Y F, Sun M Y, Shi S, Pan X, Zhu J Q 2017 Chin. J. Lasers 44 0102015 (in Chinese) [郝艳飞, 孙明营, 时双, 潘雪, 朱健强 2017 中国激光 44 0102015]

    [12]

    Yun Z Q, Wei R S, Li W, Luo W W, Wu Q, Xu X G, Zhang X Z 2013 Acta Phys. Sin. 62 068101 (in Chinese) [云志强, 魏汝省, 李威, 罗维维, 吴强, 徐现刚, 张心正 2013 物理学报 62 068101]

    [13]

    He F, Xu H, Cheng Y, Ni J, Xiong H, Xu Z, Sugioka K, Midorikawa K 2010 Opt. Lett. 35 1106

    [14]

    Block E, Greco M, Vitek D, Masihzadeh O, Ammar D A, Kahook M Y, Mandava N, Durfee C, Squier J 2013 Biomed. Opt. Exp. 4 831

    [15]

    Guo C F, Cao S, Jiang P, Fang Y, Zhang J, Fan Y, Wang Y, Xu W, Zhao Z, Liu Q 2009 Opt. Express 17 19981

    [16]

    Guo C F, Zhang J, Miao J, Fan Y, Liu Q 2010 Opt. Express 18 2621

    [17]

    Guo C F, Zhang Z, Cao S, Liu Q 2009 Opt. Lett. 34 2820

    [18]

    Wang M, Wang C, Tian Y, Zhang J, Guo C, Zhang X, Liu Q 2014 Appl. Surf. Sci. 296 209

    [19]

    Wang Y, Miao J, Tian Y, Guo C, Zhang J, Ren T, Liu Q 2011 Opt. Express 19 17390

    [20]

    Xia F, Zhang X Z, Wang M, Yi S, Liu Q, Xu J J 2014 Opt. Express 22 16889

    [21]

    Xia F, Zhang X Z, Wang M, Liu Q, Xu J J 2015 Opt. Express 23 29193

    [22]

    Kaiser W, Garrett C G B 1961 Phys. Rev. Lett. 7 229

    [23]

    Maruo S, Nakamura O, Kawata S 1997 Opt. Lett. 22 132

    [24]

    Kawata S, Sun H B, Tanaka T, Takada K 2001 Nature 412 697

    [25]

    Sun H B, Kawakami T, Xu Y, Ye J Y, Matuso S, Misawa H, Miwa M, Kaneko R 2000 Opt. Lett. 25 1110

    [26]

    Sun H B, Suwa T, Takada K, Zaccaria R P, Kim M S, Lee K S, Kawata S 2004 Appl. Phys. Lett. 85 3708

    [27]

    Boyd R W 2003 Nonlinear Optics-Handbook of Laser Technology and Applications (Philadelphia: Taylor Francis) p161

    [28]

    Takada K, Sun H B, Kawata S 2005 Appl. Phys. Lett. 86 071122

    [29]

    Wu D, Chen Q D, Niu L G, Jiao J, Xia H, Song J F, Sun H B 2009 IEEE Photon. Tech. L. 21 1535

    [30]

    Wu D, Niu L G, Chen Q D, Wang R, Sun H B 2008 Opt. Lett. 33 2913

    [31]

    Xia H, Wang J, Tian Y, Chen Q D, Du X B, Zhang Y L, He Y, Sun H B 2010 Adv. Mater. 22 3204

    [32]

    Sun Y L, Dong W F, Yang R Z, Meng X, Zhang L, Chen Q D, Sun H B 2012 Angew. Chem. Int. Ed. 51 1558

    [33]

    Sun Y L, Dong W F, Niu L G, Jiang T, Liu D X, Zhang L, Wang Y S, Chen Q D, Kim D P, Sun H B 2014 Light: Sci. Appl. 3 e129

    [34]

    Xing J F, Dong X Z, Chen W Q, Duan X M, Takeyasu N, Tanaka T, Kawata S 2007 Appl. Phys. Lett. 90 131106

    [35]

    Dong X Z, Zhao Z S, Duan X M 2008 Appl. Phys. Lett. 92 091113

    [36]

    Song Y, Dong X Z, Zhao Z S, Duan X M 2011 High Power Laser Part Beams 23 1780 (in Chinese) [宋旸, 董贤子, 赵震声, 段宣明 2011 强激光与粒子束 23 1780]

    [37]

    Gan Z, Cao Y, Evans R A, Gu M 2013 Nat. Commun. 4 2061

    [38]

    Li W, Cao T X, Zhai Z, Yu X, Zhang X Z, Xu J J 2013 Nanotechnology 24 215301

    [39]

    Long J, Xiong W, Liu Y, Jiang L J, Zhou Y S, Li D W, Jiang L, Lu Y F 2017 Chin. J. Lasers 44 0102003 (in Chinese) [龙婧, 熊伟, 刘莹, 蒋立佳, 周云申, 李大卫, 姜澜, 陆永枫 2017 中国激光 44 0102003]

    [40]

    Liu L P, Zhan S J, Yang H, Gong Q H, Li Y 2017 Chin. J. Lasers 44 0102006 (in Chinese) [刘力谱, 张世杰, 杨宏, 龚旗煌, 李焱 2017 中国激光 44 0102006]

    [41]

    Sugioka K 2017 Nanophotonics 6 393

    [42]

    Wu Y E, Ren M X, Wang Z H, Li W, Wu Q, Yi S, Zhang X Z, Xu J J 2014 AIP Adv. 4 057107

    [43]

    Hell S W, Wichmann J 1994 Opt. Lett. 19 780

    [44]

    Klar T A, Jakobs S, Dyba M, Egner A, Hell S W 2000 Proc. Natl. Acad. Sci. USA 97 8206

    [45]

    Hell S W, Dyba M, Jakobs S 2004 Curr. Opin. Neurobiol. 14 599

    [46]

    Li L, Gattass R R, Gershgoren E, Hwang H, Fourkas J T 2009 Science 324 910

    [47]

    Scott T F, Kowalski B A, Sullivan A C, Bowman C N, Mcleod R R 2009 Science 324 913

    [48]

    Andrew T L, Tsai H Y, Menon R 2009 Science 324 917

    [49]

    Fischer J, von Freymann G, Wegener M 2010 Adv. Mater. 22 3578

    [50]

    Wollhofen R, Katzmann J, Hrelescu C, Jacak J, Klar T A 2013 Opt. Express 21 10831

    [51]

    Kilby J S 1976 IEEE Trans. Electron Devices 23 648

    [52]

    Chong T C, Hong M H, Shi L P 2010 Laser Photon. Rev. 4 123

    [53]

    Zhou W, Bridges D, Li R, Bai S, Ma Y, Hou T, Hu A 2016 Sci. Lett. J. 5 228

    [54]

    Krausch G, Wegscheider S, Kirsch A, Bielefeldt H, Meiners J, Mlynek J 1995 Opt. Commun. 119 283

    [55]

    Sun S, Leggett G J 2002 Nano Lett. 2 1223

    [56]

    Sun S, Leggett G J 2004 Nano Lett. 4 1381

    [57]

    Grigoropoulos C P, Hwang D J 2007 MRS bull. 32 16

    [58]

    Wang L, Uppuluri S M, Jin E X, Xu X 2006 Nano Lett. 6 361

    [59]

    Kim S, Jung H, Kim Y, Jang J, Hahn J W 2012 Adv. Mater. 24 OP337

    [60]

    Terris B, Mamin H, Rugar D, Studenmund W, Kino G 1994 Appl. Phys. Lett. 65 388

    [61]

    Terris B, Mamin H, Rugar D 1996 Appl. Phys. Lett. 68 141

    [62]

    Tominaga J, Nakano T, Atoda N 1988 Appl. Phys. Lett. 73 2078

    [63]

    Kuwahara M, Nakano T, Tominaga J, Lee M B, Atoda N 1999 Jpn. J. Appl. Phys. 38 L1079

    [64]

    Kuwahara M, Nakano T, Mihalcea C, Shima T, Kim J H, Tominaga J, Atoda N 2001 Microelectron. Eng. 57-58 883

    [65]

    Barnes W L, Dereux A, Ebbesen T W 2003 Nature 424 824

    [66]

    Wang C, Zhang W, Zhao Z, Wang Y, Gao P, Luo Y, Luo X 2016 Micromachines 7 118

    [67]

    Luo X, Ishihara T 2004 Appl. Phys. Lett. 84 4780

    [68]

    Liu Z W, Wei Q H, Zhang X 2005 Nano Lett. 5 957

    [69]

    Liu Z, Wang Y, Yao J, Lee H, Srituravanich W, Zhang X 2009 Nano Lett. 9 462

    [70]

    Xu T, Fang L, Ma J, Zeng B, Liu Y, Cui J, Wang C, Feng Q, Luo X 2009 Appl. Phys. B: Lasers O. 97 175

    [71]

    Dong J, Liu J, Kang G, Xie J, Wang Y 2014 Sci. Rep. 4 5618

    [72]

    Chen X, Yang F, Zhang C, Zhou J, Guo L J 2016 ACS Nano 10 4039

    [73]

    Liang G, Wang C, Zhao Z, Wang Y, Yao N, Gao P, Luo Y, Gao G, Zhao Q, Luo X 2015 Adv. Opt. Mater. 3 1248

    [74]

    Li Y, Liu F, Xiao L, Cui K, Feng X, Zhang W, Huang Y 2013 Appl. Phys. Lett. 102 063113

    [75]

    Li Y, Liu F, Ye Y, Meng W, Cui K, Feng X, Zhang W, Huang Y 2014 Appl. Phys. Lett. 104 081115

    [76]

    Birnbaum M 1965 J. Appl. Phys. 36 3688

    [77]

    Borowiec A, Haugen H 2003 Appl. Phys. Lett. 82 4462

    [78]

    Jia T, Chen H, Huang M, Zhao F, Qiu J, Li R, Xu Z, He X, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429

    [79]

    Vorobyev A, Guo C 2005 Phys. Rev. B 72 195422

    [80]

    Qi L T, Nishii K, Namba Y 2009 Opt. Lett. 34 1846

    [81]

    Oktem B, Pavlov I, Ilday S, Kalaycioglu H, Rybak A, Yavas S, Erdogan M, Ilday F O 2013 Nat. Photon. 7 897

    [82]

    Bonse J, Hhm S, Rosenfeld A, Krger J 2013 Appl. Phys. A 110 547

    [83]

    He X, Datta A, Nam W, Traverso L M, Xu X 2016 Sci. Rep. 6 35035

    [84]

    Huang M, Zhao F, Cheng Y, Xu N, Xu Z 2009 ACS Nano 3 4062

    [85]

    Yuan Y, Jiang L, Li X, Wang C, Lu Y 2012 J. Appl. Phys. 112 103103

    [86]

    Yang M, Wu Q, Chen Z, Zhang B, Tang B, Yao J, Drevensek Olenik I, Xu J J 2014 Opt. Lett. 39 343

    [87]

    Shimotsuma Y, Kazansky P G, Qiu J, Hirao K 2003 Phys. Rev. Lett. 91 247405

    [88]

    Wang Y C, Zhang F T, Qiu J R 2017 Chin. J. Lasers 44 0102001 (in Chinese) [王珏晨, 张芳腾, 邱建荣 2017 中国激光 44 0102001]

    [89]

    Dai Y, Wu G, Lin X, Ma G, Qiu J R 2012 Opt. Express 20 18072

    [90]

    Liao Y, Ni J, Qiao L, Huang M, Bellouard Y, Sugioka K, Cheng Y 2015 Optica 2 329

    [91]

    Pendry J B 2000 Phys. Rev. Lett. 85 3966

    [92]

    Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534

    [93]

    Chaturvedi P, Wu W, Logeeswaran V, Yu Z, Islam M S, Wang S Y, Williams R S, Fang N X 2010 Appl. Phys. Lett. 96 043102

    [94]

    Liu H, Wang B, Ke L, Deng J, Chum C C, Teo S L, Shen L, Maier S A, Teng J 2012 Nano Lett. 12 1549

    [95]

    Jacob Z, Alekseyev L V, Narimanov E 2006 Opt. Express 14 8247

    [96]

    Liu Z, Lee H, Xiong Y, Sun C, Zhang X 2007 Science 315 1686

    [97]

    Lee H, Liu Z, Xiong Y, Sun C, Zhang X 2007 Opt. Express 15 15886

    [98]

    Rho J, Ye Z, Xiong Y, Yin X, Liu Z, Choi H, Bartal G, Zhang X 2010 Nat. Commun. 1 143

    [99]

    Xiong Y, Liu Z, Zhang X 2008 Appl. Phys. Lett. 93 111116

    [100]

    Xiong Y, Liu Z, Zhang X 2009 Appl. Phys. Lett. 94 203108

    [101]

    Chen L, Wang G P 2009 Opt. Express 17 3903

    [102]

    Aronovich D, Bartal G 2013 Opt. Lett. 38 413

    [103]

    Zhang T, Chen L, Li X 2013 Opt. Express 21 20888

    [104]

    Xu F, Chen G, Wang C, Cao B, Lou Y 2013 Opt. Lett. 38 3819

    [105]

    Gao P, Yao N, Wang C, Zhao Z, Luo Y, Wang Y, Gao G, Liu K, Zhao C, Luo X 2015 Appl. Phys. Lett. 106 093110

  • [1]

    Wagner C, Harned N 2010 Nat. Photon. 4 24

    [2]

    Gale M T, Knop K 1983 Proc. SPIE 0398 347

    [3]

    Roth W, Schumacher H, Beneking H 1983 Electron. Lett. 19 142

    [4]

    Rensch C, Hell S, Schickfus M V, Hunklinger S 1989 Appl. Opt. 28 3754

    [5]

    Goltsos W C, Liu S A 1990 Proc. SPIE 1211 137

    [6]

    Haruna M, Takahashi M, Wakahayashi K, Nishihara H 1990 Appl. Opt. 29 5120

    [7]

    Cui Z 2005 Micro-Nanofabrication Technologies and Applications (Beijing: Higher Education Press) p51

    [8]

    Wang Y, Guo C, Cao S, Miao J, Ren T, Liu Q 2010 J. Nanosci. Nanotechnol. 10 7134

    [9]

    Liu Q, Duan X, Peng C 2014 Novel Optical Technologies for Nanofabrication (Berlin Heidelberg: Springer-Verlag) p8

    [10]

    Kurihara K, Nakano T, Ikeya H, Ujiie M, Tominaga J 2008 Microelectron. Eng. 85 1197

    [11]

    Hao Y F, Sun M Y, Shi S, Pan X, Zhu J Q 2017 Chin. J. Lasers 44 0102015 (in Chinese) [郝艳飞, 孙明营, 时双, 潘雪, 朱健强 2017 中国激光 44 0102015]

    [12]

    Yun Z Q, Wei R S, Li W, Luo W W, Wu Q, Xu X G, Zhang X Z 2013 Acta Phys. Sin. 62 068101 (in Chinese) [云志强, 魏汝省, 李威, 罗维维, 吴强, 徐现刚, 张心正 2013 物理学报 62 068101]

    [13]

    He F, Xu H, Cheng Y, Ni J, Xiong H, Xu Z, Sugioka K, Midorikawa K 2010 Opt. Lett. 35 1106

    [14]

    Block E, Greco M, Vitek D, Masihzadeh O, Ammar D A, Kahook M Y, Mandava N, Durfee C, Squier J 2013 Biomed. Opt. Exp. 4 831

    [15]

    Guo C F, Cao S, Jiang P, Fang Y, Zhang J, Fan Y, Wang Y, Xu W, Zhao Z, Liu Q 2009 Opt. Express 17 19981

    [16]

    Guo C F, Zhang J, Miao J, Fan Y, Liu Q 2010 Opt. Express 18 2621

    [17]

    Guo C F, Zhang Z, Cao S, Liu Q 2009 Opt. Lett. 34 2820

    [18]

    Wang M, Wang C, Tian Y, Zhang J, Guo C, Zhang X, Liu Q 2014 Appl. Surf. Sci. 296 209

    [19]

    Wang Y, Miao J, Tian Y, Guo C, Zhang J, Ren T, Liu Q 2011 Opt. Express 19 17390

    [20]

    Xia F, Zhang X Z, Wang M, Yi S, Liu Q, Xu J J 2014 Opt. Express 22 16889

    [21]

    Xia F, Zhang X Z, Wang M, Liu Q, Xu J J 2015 Opt. Express 23 29193

    [22]

    Kaiser W, Garrett C G B 1961 Phys. Rev. Lett. 7 229

    [23]

    Maruo S, Nakamura O, Kawata S 1997 Opt. Lett. 22 132

    [24]

    Kawata S, Sun H B, Tanaka T, Takada K 2001 Nature 412 697

    [25]

    Sun H B, Kawakami T, Xu Y, Ye J Y, Matuso S, Misawa H, Miwa M, Kaneko R 2000 Opt. Lett. 25 1110

    [26]

    Sun H B, Suwa T, Takada K, Zaccaria R P, Kim M S, Lee K S, Kawata S 2004 Appl. Phys. Lett. 85 3708

    [27]

    Boyd R W 2003 Nonlinear Optics-Handbook of Laser Technology and Applications (Philadelphia: Taylor Francis) p161

    [28]

    Takada K, Sun H B, Kawata S 2005 Appl. Phys. Lett. 86 071122

    [29]

    Wu D, Chen Q D, Niu L G, Jiao J, Xia H, Song J F, Sun H B 2009 IEEE Photon. Tech. L. 21 1535

    [30]

    Wu D, Niu L G, Chen Q D, Wang R, Sun H B 2008 Opt. Lett. 33 2913

    [31]

    Xia H, Wang J, Tian Y, Chen Q D, Du X B, Zhang Y L, He Y, Sun H B 2010 Adv. Mater. 22 3204

    [32]

    Sun Y L, Dong W F, Yang R Z, Meng X, Zhang L, Chen Q D, Sun H B 2012 Angew. Chem. Int. Ed. 51 1558

    [33]

    Sun Y L, Dong W F, Niu L G, Jiang T, Liu D X, Zhang L, Wang Y S, Chen Q D, Kim D P, Sun H B 2014 Light: Sci. Appl. 3 e129

    [34]

    Xing J F, Dong X Z, Chen W Q, Duan X M, Takeyasu N, Tanaka T, Kawata S 2007 Appl. Phys. Lett. 90 131106

    [35]

    Dong X Z, Zhao Z S, Duan X M 2008 Appl. Phys. Lett. 92 091113

    [36]

    Song Y, Dong X Z, Zhao Z S, Duan X M 2011 High Power Laser Part Beams 23 1780 (in Chinese) [宋旸, 董贤子, 赵震声, 段宣明 2011 强激光与粒子束 23 1780]

    [37]

    Gan Z, Cao Y, Evans R A, Gu M 2013 Nat. Commun. 4 2061

    [38]

    Li W, Cao T X, Zhai Z, Yu X, Zhang X Z, Xu J J 2013 Nanotechnology 24 215301

    [39]

    Long J, Xiong W, Liu Y, Jiang L J, Zhou Y S, Li D W, Jiang L, Lu Y F 2017 Chin. J. Lasers 44 0102003 (in Chinese) [龙婧, 熊伟, 刘莹, 蒋立佳, 周云申, 李大卫, 姜澜, 陆永枫 2017 中国激光 44 0102003]

    [40]

    Liu L P, Zhan S J, Yang H, Gong Q H, Li Y 2017 Chin. J. Lasers 44 0102006 (in Chinese) [刘力谱, 张世杰, 杨宏, 龚旗煌, 李焱 2017 中国激光 44 0102006]

    [41]

    Sugioka K 2017 Nanophotonics 6 393

    [42]

    Wu Y E, Ren M X, Wang Z H, Li W, Wu Q, Yi S, Zhang X Z, Xu J J 2014 AIP Adv. 4 057107

    [43]

    Hell S W, Wichmann J 1994 Opt. Lett. 19 780

    [44]

    Klar T A, Jakobs S, Dyba M, Egner A, Hell S W 2000 Proc. Natl. Acad. Sci. USA 97 8206

    [45]

    Hell S W, Dyba M, Jakobs S 2004 Curr. Opin. Neurobiol. 14 599

    [46]

    Li L, Gattass R R, Gershgoren E, Hwang H, Fourkas J T 2009 Science 324 910

    [47]

    Scott T F, Kowalski B A, Sullivan A C, Bowman C N, Mcleod R R 2009 Science 324 913

    [48]

    Andrew T L, Tsai H Y, Menon R 2009 Science 324 917

    [49]

    Fischer J, von Freymann G, Wegener M 2010 Adv. Mater. 22 3578

    [50]

    Wollhofen R, Katzmann J, Hrelescu C, Jacak J, Klar T A 2013 Opt. Express 21 10831

    [51]

    Kilby J S 1976 IEEE Trans. Electron Devices 23 648

    [52]

    Chong T C, Hong M H, Shi L P 2010 Laser Photon. Rev. 4 123

    [53]

    Zhou W, Bridges D, Li R, Bai S, Ma Y, Hou T, Hu A 2016 Sci. Lett. J. 5 228

    [54]

    Krausch G, Wegscheider S, Kirsch A, Bielefeldt H, Meiners J, Mlynek J 1995 Opt. Commun. 119 283

    [55]

    Sun S, Leggett G J 2002 Nano Lett. 2 1223

    [56]

    Sun S, Leggett G J 2004 Nano Lett. 4 1381

    [57]

    Grigoropoulos C P, Hwang D J 2007 MRS bull. 32 16

    [58]

    Wang L, Uppuluri S M, Jin E X, Xu X 2006 Nano Lett. 6 361

    [59]

    Kim S, Jung H, Kim Y, Jang J, Hahn J W 2012 Adv. Mater. 24 OP337

    [60]

    Terris B, Mamin H, Rugar D, Studenmund W, Kino G 1994 Appl. Phys. Lett. 65 388

    [61]

    Terris B, Mamin H, Rugar D 1996 Appl. Phys. Lett. 68 141

    [62]

    Tominaga J, Nakano T, Atoda N 1988 Appl. Phys. Lett. 73 2078

    [63]

    Kuwahara M, Nakano T, Tominaga J, Lee M B, Atoda N 1999 Jpn. J. Appl. Phys. 38 L1079

    [64]

    Kuwahara M, Nakano T, Mihalcea C, Shima T, Kim J H, Tominaga J, Atoda N 2001 Microelectron. Eng. 57-58 883

    [65]

    Barnes W L, Dereux A, Ebbesen T W 2003 Nature 424 824

    [66]

    Wang C, Zhang W, Zhao Z, Wang Y, Gao P, Luo Y, Luo X 2016 Micromachines 7 118

    [67]

    Luo X, Ishihara T 2004 Appl. Phys. Lett. 84 4780

    [68]

    Liu Z W, Wei Q H, Zhang X 2005 Nano Lett. 5 957

    [69]

    Liu Z, Wang Y, Yao J, Lee H, Srituravanich W, Zhang X 2009 Nano Lett. 9 462

    [70]

    Xu T, Fang L, Ma J, Zeng B, Liu Y, Cui J, Wang C, Feng Q, Luo X 2009 Appl. Phys. B: Lasers O. 97 175

    [71]

    Dong J, Liu J, Kang G, Xie J, Wang Y 2014 Sci. Rep. 4 5618

    [72]

    Chen X, Yang F, Zhang C, Zhou J, Guo L J 2016 ACS Nano 10 4039

    [73]

    Liang G, Wang C, Zhao Z, Wang Y, Yao N, Gao P, Luo Y, Gao G, Zhao Q, Luo X 2015 Adv. Opt. Mater. 3 1248

    [74]

    Li Y, Liu F, Xiao L, Cui K, Feng X, Zhang W, Huang Y 2013 Appl. Phys. Lett. 102 063113

    [75]

    Li Y, Liu F, Ye Y, Meng W, Cui K, Feng X, Zhang W, Huang Y 2014 Appl. Phys. Lett. 104 081115

    [76]

    Birnbaum M 1965 J. Appl. Phys. 36 3688

    [77]

    Borowiec A, Haugen H 2003 Appl. Phys. Lett. 82 4462

    [78]

    Jia T, Chen H, Huang M, Zhao F, Qiu J, Li R, Xu Z, He X, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429

    [79]

    Vorobyev A, Guo C 2005 Phys. Rev. B 72 195422

    [80]

    Qi L T, Nishii K, Namba Y 2009 Opt. Lett. 34 1846

    [81]

    Oktem B, Pavlov I, Ilday S, Kalaycioglu H, Rybak A, Yavas S, Erdogan M, Ilday F O 2013 Nat. Photon. 7 897

    [82]

    Bonse J, Hhm S, Rosenfeld A, Krger J 2013 Appl. Phys. A 110 547

    [83]

    He X, Datta A, Nam W, Traverso L M, Xu X 2016 Sci. Rep. 6 35035

    [84]

    Huang M, Zhao F, Cheng Y, Xu N, Xu Z 2009 ACS Nano 3 4062

    [85]

    Yuan Y, Jiang L, Li X, Wang C, Lu Y 2012 J. Appl. Phys. 112 103103

    [86]

    Yang M, Wu Q, Chen Z, Zhang B, Tang B, Yao J, Drevensek Olenik I, Xu J J 2014 Opt. Lett. 39 343

    [87]

    Shimotsuma Y, Kazansky P G, Qiu J, Hirao K 2003 Phys. Rev. Lett. 91 247405

    [88]

    Wang Y C, Zhang F T, Qiu J R 2017 Chin. J. Lasers 44 0102001 (in Chinese) [王珏晨, 张芳腾, 邱建荣 2017 中国激光 44 0102001]

    [89]

    Dai Y, Wu G, Lin X, Ma G, Qiu J R 2012 Opt. Express 20 18072

    [90]

    Liao Y, Ni J, Qiao L, Huang M, Bellouard Y, Sugioka K, Cheng Y 2015 Optica 2 329

    [91]

    Pendry J B 2000 Phys. Rev. Lett. 85 3966

    [92]

    Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534

    [93]

    Chaturvedi P, Wu W, Logeeswaran V, Yu Z, Islam M S, Wang S Y, Williams R S, Fang N X 2010 Appl. Phys. Lett. 96 043102

    [94]

    Liu H, Wang B, Ke L, Deng J, Chum C C, Teo S L, Shen L, Maier S A, Teng J 2012 Nano Lett. 12 1549

    [95]

    Jacob Z, Alekseyev L V, Narimanov E 2006 Opt. Express 14 8247

    [96]

    Liu Z, Lee H, Xiong Y, Sun C, Zhang X 2007 Science 315 1686

    [97]

    Lee H, Liu Z, Xiong Y, Sun C, Zhang X 2007 Opt. Express 15 15886

    [98]

    Rho J, Ye Z, Xiong Y, Yin X, Liu Z, Choi H, Bartal G, Zhang X 2010 Nat. Commun. 1 143

    [99]

    Xiong Y, Liu Z, Zhang X 2008 Appl. Phys. Lett. 93 111116

    [100]

    Xiong Y, Liu Z, Zhang X 2009 Appl. Phys. Lett. 94 203108

    [101]

    Chen L, Wang G P 2009 Opt. Express 17 3903

    [102]

    Aronovich D, Bartal G 2013 Opt. Lett. 38 413

    [103]

    Zhang T, Chen L, Li X 2013 Opt. Express 21 20888

    [104]

    Xu F, Chen G, Wang C, Cao B, Lou Y 2013 Opt. Lett. 38 3819

    [105]

    Gao P, Yao N, Wang C, Zhao Z, Luo Y, Wang Y, Gao G, Liu K, Zhao C, Luo X 2015 Appl. Phys. Lett. 106 093110

  • [1] 乔志星, 秦成兵, 贺文君, 弓亚妮, 张晓荣, 张国峰, 陈瑞云, 高岩, 肖连团, 贾锁堂. 通过光致还原调制氧化石墨烯寿命并用于微纳图形制备. 物理学报, 2018, 67(6): 066802. doi: 10.7498/aps.67.20172331
    [2] 袁强, 赵文轩, 马睿, 张琛, 赵伟, 王爽, 冯晓强, 王凯歌, 白晋涛. 基于偏振光相位调制的超衍射极限空间结构光研究. 物理学报, 2017, 66(11): 110201. doi: 10.7498/aps.66.110201
    [3] 刘双龙, 刘伟, 陈丹妮, 牛憨笨. 超衍射极限相干反斯托克斯拉曼散射显微成像技术中空心光束的形成. 物理学报, 2014, 63(21): 214601. doi: 10.7498/aps.63.214601
    [4] 云志强, 魏汝省, 李威, 罗维维, 吴强, 徐现刚, 张心正. 6H-SiC的飞秒激光超衍射加工. 物理学报, 2013, 62(6): 068101. doi: 10.7498/aps.62.068101
    [5] 高斯, 王子涵, 滑建冠, 李乾坤, 李爱武, 于颜豪. 飞秒激光加工蓝宝石超衍射纳米结构. 物理学报, 2017, 66(14): 147901. doi: 10.7498/aps.66.147901
    [6] 魏伟华, 李木天, 刘墨南. 基于飞秒激光直写的单向单模耦合微腔. 物理学报, 2018, 67(6): 064203. doi: 10.7498/aps.67.20172395
    [7] 焦悦, 陶海岩, 季博宇, 宋晓伟, 林景全. 用于飞秒激光纳米加工的TiO2粒子阵列诱导多种基底表面近场增强. 物理学报, 2017, 66(14): 144203. doi: 10.7498/aps.66.144203
    [8] 张茜, 李萌, 龚旗煌, 李焱. 飞秒激光直写光量子逻辑门. 物理学报, 2019, 68(10): 104205. doi: 10.7498/aps.68.20190024
    [9] 李世雄, 白忠臣, 黄政, 张欣, 秦水介, 毛文雪. 激光诱导等离子体加工石英微通道机理研究. 物理学报, 2012, 61(11): 115201. doi: 10.7498/aps.61.115201
    [10] 林圆圆, 姜有恩, 韦辉, 范薇, 李学春. 基于飞秒激光微加工的介质膜损伤修复研究. 物理学报, 2015, 64(15): 154207. doi: 10.7498/aps.64.154207
    [11] 王文亭, 胡冰, 王明伟. 飞秒激光精细加工含能材料. 物理学报, 2013, 62(6): 060601. doi: 10.7498/aps.62.060601
    [12] 朱元庆, 曲兴华, 张福民, 陶会荣. 实际加工表面红外激光散射特性的实验研究. 物理学报, 2013, 62(24): 244201. doi: 10.7498/aps.62.244201
    [13] 梁春永, 王洪水, 王锐, 杨建军, 韩伟, 杨阳. 飞秒激光在空气和水中对硅片烧蚀加工的实验研究. 物理学报, 2009, 58(8): 5429-5435. doi: 10.7498/aps.58.5429
    [14] 于歌, 杨慎华, 王蒙, 寇淑清, 林宝君, 卢万春. Nd: YAG激光烧蚀裂解加工技术模拟分析与实验研究. 物理学报, 2012, 61(9): 092801. doi: 10.7498/aps.61.092801
    [15] 张朝阳, 李中洋, 秦昌亮, 印洁, 张长桃, 毛卫平, 冯钦玉. 脉冲激光与电化学复合的应力刻蚀加工质量研究. 物理学报, 2013, 62(9): 094210. doi: 10.7498/aps.62.094210
    [16] 王承伟, 赵全忠, 钱静, 黄媛媛, 王关德, 李阳博, 柏锋, 范文中, 李虹瑾. 黑体辐射法测量电介质内部被超短激光脉冲加工后的温度. 物理学报, 2016, 65(12): 125201. doi: 10.7498/aps.65.125201
    [17] 张国文, 卢兴强, 曹华保, 尹宪华, 吕凤年, 张臻, 李菁辉, 王仁贵, 马伟新, 朱俭. 高功率激光光束经颗粒污染后的近场衍射效应. 物理学报, 2012, 61(2): 024201. doi: 10.7498/aps.61.024201
    [18] 胡兴雷, 孙雅洲, 梁迎春, 陈家轩. 单晶硅微纳构件加工表面性能的时变性研究. 物理学报, 2013, 62(22): 220704. doi: 10.7498/aps.62.220704
    [19] 罗菊, 冯国英, 韩敬华, 沈雄, 张丽君, 丁坤艳. 激光等离子体去除微纳颗粒的热力学研究. 物理学报, 2020, 69(8): 084201. doi: 10.7498/aps.69.20191933
    [20] 朱家健, 杜文博, 周朴, 许晓军, 刘泽金. 单模光纤激光极限功率的数值研究. 物理学报, 2012, 61(6): 064209. doi: 10.7498/aps.61.064209
  • 引用本文:
    Citation:
计量
  • 文章访问数:  762
  • PDF下载量:  332
  • 被引次数: 0
出版历程
  • 收稿日期:  2017-04-28
  • 修回日期:  2017-05-31
  • 刊出日期:  2017-07-20

激光超衍射加工机理与研究进展

  • 1. 南开大学物理科学学院, 泰达应用物理研究院, 弱光非线性光子学教育部重点实验室, 天津 300457;
  • 2. 青岛大学物理科学学院, 青岛 266071
  • 通信作者: 许京军, jjxu@nankai.edu.cn
    基金项目: 

    国家重点基础研究发展计划(批准号:2013CB328702)、国家自然科学基金(批准号:11674182)、天津市自然科学基金(批准号:17JCYBJC16700)、111计划(批准号:B07013)、教育部长江学者和创新团队发展计划(批准号:IRT_13R29)和山西大学极端光学协同创新中心资助的课题.

摘要: 随着纳米科技和微纳电子器件的发展,制造业对微纳加工技术的要求越来越高.激光加工技术是一种绿色先进制造技术,具有巨大的发展潜力,已广泛应用于不同的制造领域.为实现低成本、高效率、大面积尤其是高精度的激光微纳加工制造,研究和发展激光超衍射加工技术具有十分重要的科学意义和应用价值.本文首先阐述了基于非线性效应的远场激光直写超衍射加工技术的原理与国内外发展状况,包括激光烧蚀加工技术、激光诱导改性加工技术和多光子光聚合加工技术等;然后介绍了几种基于倏逝波的近场激光超衍射加工技术,包括扫描近场光刻技术、表面等离子激元光刻技术等新型超衍射激光近场光刻技术的机理与研究进展;最后对激光超衍射加工中存在的问题及未来发展方向进行了讨论.

English Abstract

参考文献 (105)

目录

    /

    返回文章
    返回