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介电层表面直接生长石墨烯的研究进展

杨慧慧 高峰 戴明金 胡平安

介电层表面直接生长石墨烯的研究进展

杨慧慧, 高峰, 戴明金, 胡平安
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  • 作为21世纪备受瞩目的材料,石墨烯兼具优异的电、热、光与力学性质,具有十分广阔的研究价值与应用价值.目前主要通过在金属基底上生长获得石墨烯,并将其转移至目标介电层基底上以构筑电子器件.转移过程不可避免地引入了褶皱、裂纹、破损以及聚合物/金属残留,严重损害了石墨烯的性能.因而直接在介电基底上制备高质量的石墨烯薄膜具有重要意义.本文总结了近年来在介电衬底上直接生长石墨烯的研究进展:阐述了金属辅助法、等离子体增强法以及热力学或动力学调控法等多种生长手段;介绍了多种介电/绝缘基底包括SiO2/Si,Al2O3,SrTiO3,h-BN,SiC,Si3N4以及玻璃表面生长石墨烯的特点与性能,分析了其可能的生长机理.根据拉曼谱图、薄层电阻、透光率、载流子迁移率等评估指标,将多种方法得到的石墨烯质量进行了总结与比较,并提出了直接在介电衬底上生成石墨烯的研究难点与趋势.
      通信作者: 胡平安, hupa@hit.edu.cn
    • 基金项目: 国家重点基础研究发展计划(批准号:2013CB632900)和国家自然科学基金(批准号:61390502,21373068)资助的课题.
    [1]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666

    [2]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Katsnelson M I, Grigorieva I V, Dubonos S V, Firsov A A 2005 Nature 438 197

    [3]

    Novoselov K S, Jiang Z, Zhang Y, Morozov S V, Stormer H L, Zeitler U, Maan J C, Boebinger G S, Kim P, Geim A K 2007 Science 315 1379

    [4]

    Mayorov A S, Gorbachev R V, Morozov S V, Britnell L, Jalil R, Ponomarenko L A, Blake P, Novoselov K S, Watanabe K, Taniguchi T, Geim A K 2011 Nano Lett. 11 2396

    [5]

    Katsnelson M I, Novoselov K S, Geim A K 2006 Nat. Phys. 2 620

    [6]

    Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152

    [7]

    Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777

    [8]

    Lin Y C, Lu C C, Yeh C H, Jin C, Suenaga K, Chiu P W 2012 Nano Lett. 12 414

    [9]

    Cheng Z, Zhou Q, Wang C, Li Q, Wang C, Fang Y 2011 Nano Lett. 11 767

    [10]

    Suk J W, Lee W H, Lee J, Chou H, Piner R D, Hao Y, Akinwande D, Ruoff R S 2013 Nano Lett. 13 1462

    [11]

    Ambrosi A, Pumera M 2014 Nanoscale 6 472

    [12]

    Suzuki S, Orofeo C M, Wang S, Maeda F, Takamura M, Hibino H 2013 J. Phys. Chem. C 117 22123

    [13]

    Li X, Zhu Y, Cai W, Borysiak M, Han B, Chen D, Piner R D, Colombo L, Ruoff R S 2009 Nano Lett. 9 4359

    [14]

    Chen X, Wu B, Liu Y 2016 Chem. Soc. Rev. 45 2057

    [15]

    Wang H, Yu G 2016 Adv. Mater. 28 4956

    [16]

    Li X S, Cai W W, Colombo L, Ruoff R S 2009 Nano Lett. 9 4268

    [17]

    Levendorf M P, Ruiz-Vargas C S, Garg S, Park J 2009 Nano Lett. 9 4479

    [18]

    Ismach A, Druzgalski C, Penwell S, Schwartzberg A, Zheng M, Javey A, Bokor J, Zhang Y 2010 Nano Lett. 10 1542

    [19]

    Shin H J, Choi W M, Yoon S M, Han G H, Woo Y S, Kim E S, Chae S J, Li X S, Benayad A, Loc D D, Gunes F, Lee Y H, Choi J Y 2011 Adv. Mater. 23 4392

    [20]

    Yan Z, Peng Z W, Sun Z Z, Yao J, Zhu Y, Zheng Liu, Ajayan P M, Tour J M 2011 ACS Nano 5 8187

    [21]

    Tamaoki M, Imaeda H, Kishimoto S, Mizutani T 2013 Appl. Phys. Lett. 103 183114

    [22]

    Xiong W, Zhou Y S, Jiang L J, Sarkar A, Mahjouri-Samani M, Xie Z Q, Gao Y, Ianno N J, Jiang L, Lu Y F 2013 Adv. Mater. 25 630

    [23]

    Zhuo Q Q, Wang Q, Zhang Y P, Zhang D, Li Q L, Gao C H, Sun Y Q, Ding L, Sun Q J, Wang S D, Zhong J, Sun X H, Lee S T 2015 ACS Nano 9 594

    [24]

    Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706

    [25]

    Teng P Y, Lu C C, Akiyama-Hasegawa K, Lin Y C, Yeh C H, Suenaga K, Chiu P W 2012 Nano Lett. 12 1379

    [26]

    Kim H, Song I, Park C, Son M, Hong M, Kim Y, Kim J S, Shin H J, Baik J, Choi H C 2013 ACS Nano 7 6575

    [27]

    Yen W C, Chen Y Z, Yeh C H, He J H, Chiu P W, Chueh Y L 2014 Sci. Rep. 4 4739

    [28]

    Murakami K, Tanaka S, Hirukawa A, Hiyama T, Kuwajima T, Kano E, Takeguchi M, Fujita J I 2015 Appl. Phys. Lett. 106 093112

    [29]

    Sun J, Chen Z, Yuan L, Chen Y, Ning J, Liu S, Ma D, Song X, Priydarshi M K, Bachmatiuk A, Rummeli M H, Ma T, Zhi L, Huang L, Zhang Y, Liu Z 2016 ACS Nano 10 11136

    [30]

    Reina A, Thiele S, Jia X, Bhaviripudi S, Dresselhaus M S, Schaefer J A, Kong J 2009 Nano Res. 2 509

    [31]

    Peng Z, Yan Z, Sun Z, Tour J M 2011 ACS Nano 5 8241

    [32]

    Su C Y, Lu A Y, Wu C Y, Li Y T, Liu K K, Zhang W, Lin S Y, Juang Z Y, Zhong Y L, Chen F R, Li L J 2011 Nano Lett. 11 3612

    [33]

    Kato T, Hatakeyama R 2012 ACS Nano 6 8508

    [34]

    Kwak J, Chu J H, Choi J K, Park S D, Go H, Kim S Y, Park K, Kim S D, Kim Y W, Yoon E, Kodambaka S, Kwon S Y 2012 Nat. Commun. 3 645

    [35]

    Wang J, Zeng M, Tan L, Dai B, Deng Y, Rummeli M, Xu H, Li Z, Wang S, Peng L, Eckert J, Fu L 2013 Sci. Rep. 3 2670

    [36]

    Tan L F, Zeng M Q, Zhang T, Fu L 2015 Nanoscale 7 9105

    [37]

    Berman D, Deshmukh S A, Narayanan B, Sankaranarayanan S K, Yan Z, Balandin A A, Zinovev A, Rosenmann D, Sumant A V 2016 Nat. Commun. 7 12099

    [38]

    Zhang L, Shi Z, Wang Y, Yang R, Shi D, Zhang G 2011 Nano Res. 4 315

    [39]

    Medina H, Lin Y C, Jin C, Lu C C, Yeh C H, Huang K P, Suenaga K, Robertson J, Chiu P W 2012 Adv. Funct. Mater. 22 2123

    [40]

    Wei D, Lu Y, Han C, Niu T, Chen W, Wee A T 2013 Angew. Chem. Int. Ed. Engl. 52 14121

    [41]

    Wei D C, Peng L, Li M L, Mao H Y, Niu T C, Han C, Chen W, Wee A T S 2015 ACS Nano 9 164

    [42]

    Kim Y S, Joo K, Jerng S K, Lee a H, Moon D, Kim j, Yoon E, Chun S H 2014 ACS Nano 8 2230

    [43]

    Kim Y S, Joo K, Jerng S K, Lee J H, Yoon E, Chun S H 2014 Nanoscale 6 10100

    [44]

    Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720

    [45]

    Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548

    [46]

    Behura S, Nguyen P, Che S, Debbarma R, Berry V 2015 J. Am. Chem. Soc. 137 13060

    [47]

    Chen J, Guo Y, Jiang L, Xu Z, Huang L, Xue Y, Geng D, Wu B, Hu W, Yu G, Liu Y 2014 Adv. Mater. 26 1348

    [48]

    Pang J, Mendes R G, Wrobel P S, Wlodarski M D, Ta H Q, Zhao L, Giebeler L, Trzebicka B, Gemming T, Fu L, Liu Z, Eckert J, Bachmatiuk A, Rummeli M H 2017 ACS Nano 11 1946

    [49]

    Hwang J, Shields V B, Thomas C I, Shivaraman S, Hao D, Kim M, Woll A R, Tompa G S, Spencer M G 2010 J. Cryst. Growth 312 3219

    [50]

    Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, LaBella M, Trumbull K, Kasarda R, Howsare C, Stitt J, Snyder D W 2011 ACS Nano 5 8062

    [51]

    Hwang J, Kim M, Campbell D, Alsalman H A, Kwak J Y, Shivaraman S, Woll A R, Singh A K, Hennig R G, Gorantla S, mmeli M H R, Spencer M G 2013 ACS Nano 7 385

    [52]

    Miyasaka Y, Nakamura A, Temmyo J 2011 Jpn. J. Appl. Phys. 50 04DH12

    [53]

    Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, Choi H C 2012 Nanoscale 4 3050

    [54]

    Park J, Lee J, Choi J H, Hwang D K, Song Y W 2015 Sci. Rep. 5 11839

    [55]

    Sun J, Gao T, Song X, Zhao Y, Lin Y, Wang H, Ma D, Chen Y, Xiang W, Wang J, Zhang Y, Liu Z 2014 J. Am. Chem. Soc. 136 6574

    [56]

    Li X A, Liu Z R, Wang B L, Yang J P, Ma Y W, Feng X M, Huang W, Gu M F 2013 Synth. Met. 174 50

    [57]

    Rmmeli M H, Bachmatiuk A, Scott A, Brrnert F, Warner J H, Hoffman V, Lin J H, Cuniberti G, Bchner B 2010 ACS Nano 4 4206

    [58]

    Young A F, Dean C R, Meric I, Sorgenfrei S, Ren H, Watanabe K, Taniguchi T, Hone J, Shepard K L, Kim P 2012 Phys. Rev. B 85 235458

    [59]

    Ding X, Ding G, Xie X, Huang F, Jiang M 2011 Carbon 49 2522

    [60]

    Tang S, Ding G, Xie X, Chen J, Wang C, Ding X, Huang F, Lu W, Jiang M 2012 Carbon 50 329

    [61]

    Son M, Lim H, Hong M, Choi H C 2011 Nanoscale 3 3089

    [62]

    Mishra N, Miseikis V, Convertino D, Gemmi M, Piazza V, Coletti C 2016 Carbon 96 497

    [63]

    Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792

    [64]

    Yankowitz M, Xue J, Cormode D, Sanchez-Yamagishi J D, Watanabe K, Taniguchi T, Jarillo-Herrero P, Jacquod P, LeRoy B J 2012 Nat. Phys. 8 382

    [65]

    Tang S, Wang H, Zhang Y, Li A, Xie H, Liu X, Liu L, Li T, Huang F, Xie X, Jiang M 2013 Sci. Rep. 3 2666

    [66]

    Wang M, Jang S K, Jang W J, Kim M, Park S Y, Kim S W, Kahng S J, Choi J Y, Ruoff R S, Song Y J, Lee S 2013 Adv. Mater. 25 2746

    [67]

    Gao T, Song X, Du H, Nie Y, Chen Y, Ji Q, Sun J, Yang Y, Zhang Y, Liu Z 2015 Nat. Commun. 6 6835

    [68]

    Tang S, Wang H, Wang H S, Sun Q, Zhang X, Cong C, Xie H, Liu X, Zhou X, Huang F, Chen X, Yu T, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6499

    [69]

    Li Q C, Zhao Z F, Yan B M, Song X J, Zhang Z P, Li J, Wu X S, Bian Z Q, Zou X L, Zhang Y F, Liu Z F 2017 Adv. Mater. 29 1701325

    [70]

    Berger C, Song M Z, Li X B, Wu X S, Brown N, Naud C C, Mayou D, Li T B, Hass J, Marchenkov A N, Conrad E H, First P N, Heer W A D 2006 Science 312 1191

    [71]

    Emtsev K V, Bostwick A, Horn K, Jobst J, Kellogg G L, Ley L, McChesney J L, Ohta T, Reshanov S A, Rohrl J, Rotenberg E, Schmid A K, Waldmann D, Weber H B, Seyller T 2009 Nat. Mater. 8 203

    [72]

    Varchon F, Feng R, Hass J, Li X, Nguyen B N, Naud C, Mallet P, Veuillen J Y, Berger C, Conrad E H, Magaud L 2007 Phys. Rev. Lett. 99 126805

    [73]

    Virojanadara C, Zakharov A A, Yakimova R, Johansson L I 2010 Surf. Sci. 604 L4

    [74]

    Walter A L, Jeon K J, Bostwick A, Speck F, Ostler M, Seyller T, Moreschini L, Kim Y S, Chang Y J, Horn K, Rotenberg E 2011 Appl. Phys. Lett. 98 184102

    [75]

    Ostler M, Fromm F, Koch R J, Wehrfritz P, Speck F, Vita H, Bttcher S, Horn K, Seyller T 2014 Carbon 70 258

    [76]

    Virojanadara C, Watcharinyanon S, Zakharov A A, Johansson L I 2010 Phys. Rev. B 82 205402

    [77]

    Xia C, Watcharinyanon S, Zakharov A A, Yakimova R, Hultman L, Johansson L I, Virojanadara C 2012 Phys. Rev. B 85 045418

    [78]

    Emtsev K V, Zakharov A A, Coletti C, Forti S, Starke U 2011 Phys. Rev. B 84 125423

    [79]

    Sun J, Lindvall N, Cole M T, Yurgens A 2011 Appl. Phys. Lett. 98 252107

    [80]

    Chen J, Guo Y, Wen Y, Huang L, Xue Y, Geng D, Wu B, Luo B, Yu G, Liu Y 2013 Adv. Mater. 25 992

    [81]

    Sun J, Chen Y, Priydarshi M K, Chen Z, Bachmatiuk A, Zou Z, Chen Z, Song X, Gao Y, Rummeli M H, Zhang Y, Liu Z 2015 Nano Lett. 15 5846

    [82]

    Sun J, Chen Y, Cai X, Ma B, Chen Z, Priydarshi M K, Chen K, Gao T, Song X, Ji Q, Guo X, Zou D, Zhang Y, Liu Z 2015 Nano Res. 8 3496

    [83]

    Chen Y, Sun J, Gao J, Du F, Han Q, Nie Y, Chen Z, Bachmatiuk A, Priydarshi M K, Ma D, Song X, Wu X, Xiong C, Rummeli M H, Ding F, Zhang Y, Liu Z 2015 Adv. Mater. 27 7839

    [84]

    Chen J, Zhao X, Tan S J, Xu H, Wu B, Liu B, Fu D, Fu W, Geng D, Liu Y, Liu W, Tang W, Li L, Zhou W, Sum T C, Loh K P 2017 J. Am. Chem. Soc. 139 1073

    [85]

    Chen X D, Chen Z, Jiang W S, Zhang C, Sun J, Wang H, Xin W, Lin L, Priydarshi M K, Yang H, Liu Z B, Tian J G, Zhang Y, Zhang Y, Liu Z 2017 Adv. Mater. 29 1603428

    [86]

    Wang E, Lu X, Ding S, Yao W, Yan M, Wan G, Deng K, Wang S, Chen G, Ma L, Jung J, Fedorov A V, Zhang Y, Zhang G, Zhou S 2016 Nat. Phys. 12 1111

    [87]

    Gorbachev R V, Song J C W, Yu G L, Kretinin A V, Withers F, Cao Y, Mishchenko A, Grigorieva I V, Novoselov K S, Levitov L S, Geim A K 2014 Science 346 448

    [88]

    Krishna Kumar R, Chen X, Auton G H, Mishchenko A, Bandurin D A, Morozov S V, Cao Y, Khestanova E, Ben Shalom M, Kretinin A V, Novoselov K S, Eaves L, Grigorieva I V, Ponomarenko L A, Falko V I, Geim A K 2017 Science 357 181

    [89]

    Scott A, Dianat A, Brrnert F, Bachmatiuk A, Zhang S, Warner J H, Borowiak-Paleń E, Knupfer M, Bchner B, Cuniberti G, Rmmeli M H 2011 Appl. Phys. Lett. 98 073110

  • [1]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666

    [2]

    Novoselov K S, Geim A K, Morozov S V, Jiang D, Katsnelson M I, Grigorieva I V, Dubonos S V, Firsov A A 2005 Nature 438 197

    [3]

    Novoselov K S, Jiang Z, Zhang Y, Morozov S V, Stormer H L, Zeitler U, Maan J C, Boebinger G S, Kim P, Geim A K 2007 Science 315 1379

    [4]

    Mayorov A S, Gorbachev R V, Morozov S V, Britnell L, Jalil R, Ponomarenko L A, Blake P, Novoselov K S, Watanabe K, Taniguchi T, Geim A K 2011 Nano Lett. 11 2396

    [5]

    Katsnelson M I, Novoselov K S, Geim A K 2006 Nat. Phys. 2 620

    [6]

    Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152

    [7]

    Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777

    [8]

    Lin Y C, Lu C C, Yeh C H, Jin C, Suenaga K, Chiu P W 2012 Nano Lett. 12 414

    [9]

    Cheng Z, Zhou Q, Wang C, Li Q, Wang C, Fang Y 2011 Nano Lett. 11 767

    [10]

    Suk J W, Lee W H, Lee J, Chou H, Piner R D, Hao Y, Akinwande D, Ruoff R S 2013 Nano Lett. 13 1462

    [11]

    Ambrosi A, Pumera M 2014 Nanoscale 6 472

    [12]

    Suzuki S, Orofeo C M, Wang S, Maeda F, Takamura M, Hibino H 2013 J. Phys. Chem. C 117 22123

    [13]

    Li X, Zhu Y, Cai W, Borysiak M, Han B, Chen D, Piner R D, Colombo L, Ruoff R S 2009 Nano Lett. 9 4359

    [14]

    Chen X, Wu B, Liu Y 2016 Chem. Soc. Rev. 45 2057

    [15]

    Wang H, Yu G 2016 Adv. Mater. 28 4956

    [16]

    Li X S, Cai W W, Colombo L, Ruoff R S 2009 Nano Lett. 9 4268

    [17]

    Levendorf M P, Ruiz-Vargas C S, Garg S, Park J 2009 Nano Lett. 9 4479

    [18]

    Ismach A, Druzgalski C, Penwell S, Schwartzberg A, Zheng M, Javey A, Bokor J, Zhang Y 2010 Nano Lett. 10 1542

    [19]

    Shin H J, Choi W M, Yoon S M, Han G H, Woo Y S, Kim E S, Chae S J, Li X S, Benayad A, Loc D D, Gunes F, Lee Y H, Choi J Y 2011 Adv. Mater. 23 4392

    [20]

    Yan Z, Peng Z W, Sun Z Z, Yao J, Zhu Y, Zheng Liu, Ajayan P M, Tour J M 2011 ACS Nano 5 8187

    [21]

    Tamaoki M, Imaeda H, Kishimoto S, Mizutani T 2013 Appl. Phys. Lett. 103 183114

    [22]

    Xiong W, Zhou Y S, Jiang L J, Sarkar A, Mahjouri-Samani M, Xie Z Q, Gao Y, Ianno N J, Jiang L, Lu Y F 2013 Adv. Mater. 25 630

    [23]

    Zhuo Q Q, Wang Q, Zhang Y P, Zhang D, Li Q L, Gao C H, Sun Y Q, Ding L, Sun Q J, Wang S D, Zhong J, Sun X H, Lee S T 2015 ACS Nano 9 594

    [24]

    Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706

    [25]

    Teng P Y, Lu C C, Akiyama-Hasegawa K, Lin Y C, Yeh C H, Suenaga K, Chiu P W 2012 Nano Lett. 12 1379

    [26]

    Kim H, Song I, Park C, Son M, Hong M, Kim Y, Kim J S, Shin H J, Baik J, Choi H C 2013 ACS Nano 7 6575

    [27]

    Yen W C, Chen Y Z, Yeh C H, He J H, Chiu P W, Chueh Y L 2014 Sci. Rep. 4 4739

    [28]

    Murakami K, Tanaka S, Hirukawa A, Hiyama T, Kuwajima T, Kano E, Takeguchi M, Fujita J I 2015 Appl. Phys. Lett. 106 093112

    [29]

    Sun J, Chen Z, Yuan L, Chen Y, Ning J, Liu S, Ma D, Song X, Priydarshi M K, Bachmatiuk A, Rummeli M H, Ma T, Zhi L, Huang L, Zhang Y, Liu Z 2016 ACS Nano 10 11136

    [30]

    Reina A, Thiele S, Jia X, Bhaviripudi S, Dresselhaus M S, Schaefer J A, Kong J 2009 Nano Res. 2 509

    [31]

    Peng Z, Yan Z, Sun Z, Tour J M 2011 ACS Nano 5 8241

    [32]

    Su C Y, Lu A Y, Wu C Y, Li Y T, Liu K K, Zhang W, Lin S Y, Juang Z Y, Zhong Y L, Chen F R, Li L J 2011 Nano Lett. 11 3612

    [33]

    Kato T, Hatakeyama R 2012 ACS Nano 6 8508

    [34]

    Kwak J, Chu J H, Choi J K, Park S D, Go H, Kim S Y, Park K, Kim S D, Kim Y W, Yoon E, Kodambaka S, Kwon S Y 2012 Nat. Commun. 3 645

    [35]

    Wang J, Zeng M, Tan L, Dai B, Deng Y, Rummeli M, Xu H, Li Z, Wang S, Peng L, Eckert J, Fu L 2013 Sci. Rep. 3 2670

    [36]

    Tan L F, Zeng M Q, Zhang T, Fu L 2015 Nanoscale 7 9105

    [37]

    Berman D, Deshmukh S A, Narayanan B, Sankaranarayanan S K, Yan Z, Balandin A A, Zinovev A, Rosenmann D, Sumant A V 2016 Nat. Commun. 7 12099

    [38]

    Zhang L, Shi Z, Wang Y, Yang R, Shi D, Zhang G 2011 Nano Res. 4 315

    [39]

    Medina H, Lin Y C, Jin C, Lu C C, Yeh C H, Huang K P, Suenaga K, Robertson J, Chiu P W 2012 Adv. Funct. Mater. 22 2123

    [40]

    Wei D, Lu Y, Han C, Niu T, Chen W, Wee A T 2013 Angew. Chem. Int. Ed. Engl. 52 14121

    [41]

    Wei D C, Peng L, Li M L, Mao H Y, Niu T C, Han C, Chen W, Wee A T S 2015 ACS Nano 9 164

    [42]

    Kim Y S, Joo K, Jerng S K, Lee a H, Moon D, Kim j, Yoon E, Chun S H 2014 ACS Nano 8 2230

    [43]

    Kim Y S, Joo K, Jerng S K, Lee J H, Yoon E, Chun S H 2014 Nanoscale 6 10100

    [44]

    Hao Y, Bharathi M S, Wang L, Liu Y, Chen H, Nie S, Wang X, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720

    [45]

    Chen J, Wen Y, Guo Y, Wu B, Huang L, Xue Y, Geng D, Wang D, Yu G, Liu Y 2011 J. Am. Chem. Soc. 133 17548

    [46]

    Behura S, Nguyen P, Che S, Debbarma R, Berry V 2015 J. Am. Chem. Soc. 137 13060

    [47]

    Chen J, Guo Y, Jiang L, Xu Z, Huang L, Xue Y, Geng D, Wu B, Hu W, Yu G, Liu Y 2014 Adv. Mater. 26 1348

    [48]

    Pang J, Mendes R G, Wrobel P S, Wlodarski M D, Ta H Q, Zhao L, Giebeler L, Trzebicka B, Gemming T, Fu L, Liu Z, Eckert J, Bachmatiuk A, Rummeli M H 2017 ACS Nano 11 1946

    [49]

    Hwang J, Shields V B, Thomas C I, Shivaraman S, Hao D, Kim M, Woll A R, Tompa G S, Spencer M G 2010 J. Cryst. Growth 312 3219

    [50]

    Fanton M A, Robinson J A, Puls C, Liu Y, Hollander M J, Weiland B E, LaBella M, Trumbull K, Kasarda R, Howsare C, Stitt J, Snyder D W 2011 ACS Nano 5 8062

    [51]

    Hwang J, Kim M, Campbell D, Alsalman H A, Kwak J Y, Shivaraman S, Woll A R, Singh A K, Hennig R G, Gorantla S, mmeli M H R, Spencer M G 2013 ACS Nano 7 385

    [52]

    Miyasaka Y, Nakamura A, Temmyo J 2011 Jpn. J. Appl. Phys. 50 04DH12

    [53]

    Song H J, Son M, Park C, Lim H, Levendorf M P, Tsen A W, Park J, Choi H C 2012 Nanoscale 4 3050

    [54]

    Park J, Lee J, Choi J H, Hwang D K, Song Y W 2015 Sci. Rep. 5 11839

    [55]

    Sun J, Gao T, Song X, Zhao Y, Lin Y, Wang H, Ma D, Chen Y, Xiang W, Wang J, Zhang Y, Liu Z 2014 J. Am. Chem. Soc. 136 6574

    [56]

    Li X A, Liu Z R, Wang B L, Yang J P, Ma Y W, Feng X M, Huang W, Gu M F 2013 Synth. Met. 174 50

    [57]

    Rmmeli M H, Bachmatiuk A, Scott A, Brrnert F, Warner J H, Hoffman V, Lin J H, Cuniberti G, Bchner B 2010 ACS Nano 4 4206

    [58]

    Young A F, Dean C R, Meric I, Sorgenfrei S, Ren H, Watanabe K, Taniguchi T, Hone J, Shepard K L, Kim P 2012 Phys. Rev. B 85 235458

    [59]

    Ding X, Ding G, Xie X, Huang F, Jiang M 2011 Carbon 49 2522

    [60]

    Tang S, Ding G, Xie X, Chen J, Wang C, Ding X, Huang F, Lu W, Jiang M 2012 Carbon 50 329

    [61]

    Son M, Lim H, Hong M, Choi H C 2011 Nanoscale 3 3089

    [62]

    Mishra N, Miseikis V, Convertino D, Gemmi M, Piazza V, Coletti C 2016 Carbon 96 497

    [63]

    Yang W, Chen G, Shi Z, Liu C C, Zhang L, Xie G, Cheng M, Wang D, Yang R, Shi D, Watanabe K, Taniguchi T, Yao Y, Zhang Y, Zhang G 2013 Nat. Mater. 12 792

    [64]

    Yankowitz M, Xue J, Cormode D, Sanchez-Yamagishi J D, Watanabe K, Taniguchi T, Jarillo-Herrero P, Jacquod P, LeRoy B J 2012 Nat. Phys. 8 382

    [65]

    Tang S, Wang H, Zhang Y, Li A, Xie H, Liu X, Liu L, Li T, Huang F, Xie X, Jiang M 2013 Sci. Rep. 3 2666

    [66]

    Wang M, Jang S K, Jang W J, Kim M, Park S Y, Kim S W, Kahng S J, Choi J Y, Ruoff R S, Song Y J, Lee S 2013 Adv. Mater. 25 2746

    [67]

    Gao T, Song X, Du H, Nie Y, Chen Y, Ji Q, Sun J, Yang Y, Zhang Y, Liu Z 2015 Nat. Commun. 6 6835

    [68]

    Tang S, Wang H, Wang H S, Sun Q, Zhang X, Cong C, Xie H, Liu X, Zhou X, Huang F, Chen X, Yu T, Ding F, Xie X, Jiang M 2015 Nat. Commun. 6 6499

    [69]

    Li Q C, Zhao Z F, Yan B M, Song X J, Zhang Z P, Li J, Wu X S, Bian Z Q, Zou X L, Zhang Y F, Liu Z F 2017 Adv. Mater. 29 1701325

    [70]

    Berger C, Song M Z, Li X B, Wu X S, Brown N, Naud C C, Mayou D, Li T B, Hass J, Marchenkov A N, Conrad E H, First P N, Heer W A D 2006 Science 312 1191

    [71]

    Emtsev K V, Bostwick A, Horn K, Jobst J, Kellogg G L, Ley L, McChesney J L, Ohta T, Reshanov S A, Rohrl J, Rotenberg E, Schmid A K, Waldmann D, Weber H B, Seyller T 2009 Nat. Mater. 8 203

    [72]

    Varchon F, Feng R, Hass J, Li X, Nguyen B N, Naud C, Mallet P, Veuillen J Y, Berger C, Conrad E H, Magaud L 2007 Phys. Rev. Lett. 99 126805

    [73]

    Virojanadara C, Zakharov A A, Yakimova R, Johansson L I 2010 Surf. Sci. 604 L4

    [74]

    Walter A L, Jeon K J, Bostwick A, Speck F, Ostler M, Seyller T, Moreschini L, Kim Y S, Chang Y J, Horn K, Rotenberg E 2011 Appl. Phys. Lett. 98 184102

    [75]

    Ostler M, Fromm F, Koch R J, Wehrfritz P, Speck F, Vita H, Bttcher S, Horn K, Seyller T 2014 Carbon 70 258

    [76]

    Virojanadara C, Watcharinyanon S, Zakharov A A, Johansson L I 2010 Phys. Rev. B 82 205402

    [77]

    Xia C, Watcharinyanon S, Zakharov A A, Yakimova R, Hultman L, Johansson L I, Virojanadara C 2012 Phys. Rev. B 85 045418

    [78]

    Emtsev K V, Zakharov A A, Coletti C, Forti S, Starke U 2011 Phys. Rev. B 84 125423

    [79]

    Sun J, Lindvall N, Cole M T, Yurgens A 2011 Appl. Phys. Lett. 98 252107

    [80]

    Chen J, Guo Y, Wen Y, Huang L, Xue Y, Geng D, Wu B, Luo B, Yu G, Liu Y 2013 Adv. Mater. 25 992

    [81]

    Sun J, Chen Y, Priydarshi M K, Chen Z, Bachmatiuk A, Zou Z, Chen Z, Song X, Gao Y, Rummeli M H, Zhang Y, Liu Z 2015 Nano Lett. 15 5846

    [82]

    Sun J, Chen Y, Cai X, Ma B, Chen Z, Priydarshi M K, Chen K, Gao T, Song X, Ji Q, Guo X, Zou D, Zhang Y, Liu Z 2015 Nano Res. 8 3496

    [83]

    Chen Y, Sun J, Gao J, Du F, Han Q, Nie Y, Chen Z, Bachmatiuk A, Priydarshi M K, Ma D, Song X, Wu X, Xiong C, Rummeli M H, Ding F, Zhang Y, Liu Z 2015 Adv. Mater. 27 7839

    [84]

    Chen J, Zhao X, Tan S J, Xu H, Wu B, Liu B, Fu D, Fu W, Geng D, Liu Y, Liu W, Tang W, Li L, Zhou W, Sum T C, Loh K P 2017 J. Am. Chem. Soc. 139 1073

    [85]

    Chen X D, Chen Z, Jiang W S, Zhang C, Sun J, Wang H, Xin W, Lin L, Priydarshi M K, Yang H, Liu Z B, Tian J G, Zhang Y, Zhang Y, Liu Z 2017 Adv. Mater. 29 1603428

    [86]

    Wang E, Lu X, Ding S, Yao W, Yan M, Wan G, Deng K, Wang S, Chen G, Ma L, Jung J, Fedorov A V, Zhang Y, Zhang G, Zhou S 2016 Nat. Phys. 12 1111

    [87]

    Gorbachev R V, Song J C W, Yu G L, Kretinin A V, Withers F, Cao Y, Mishchenko A, Grigorieva I V, Novoselov K S, Levitov L S, Geim A K 2014 Science 346 448

    [88]

    Krishna Kumar R, Chen X, Auton G H, Mishchenko A, Bandurin D A, Morozov S V, Cao Y, Khestanova E, Ben Shalom M, Kretinin A V, Novoselov K S, Eaves L, Grigorieva I V, Ponomarenko L A, Falko V I, Geim A K 2017 Science 357 181

    [89]

    Scott A, Dianat A, Brrnert F, Bachmatiuk A, Zhang S, Warner J H, Borowiak-Paleń E, Knupfer M, Bchner B, Cuniberti G, Rmmeli M H 2011 Appl. Phys. Lett. 98 073110

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  • 收稿日期:  2017-08-05
  • 修回日期:  2017-09-26
  • 刊出日期:  2017-11-05

介电层表面直接生长石墨烯的研究进展

  • 1. 哈尔滨工业大学材料科学与工程学院, 哈尔滨 150080;
  • 2. 哈尔滨工业大学, 微系统与微结构制造教育部重点实验室, 哈尔滨 150080
  • 通信作者: 胡平安, hupa@hit.edu.cn
    基金项目: 

    国家重点基础研究发展计划(批准号:2013CB632900)和国家自然科学基金(批准号:61390502,21373068)资助的课题.

摘要: 作为21世纪备受瞩目的材料,石墨烯兼具优异的电、热、光与力学性质,具有十分广阔的研究价值与应用价值.目前主要通过在金属基底上生长获得石墨烯,并将其转移至目标介电层基底上以构筑电子器件.转移过程不可避免地引入了褶皱、裂纹、破损以及聚合物/金属残留,严重损害了石墨烯的性能.因而直接在介电基底上制备高质量的石墨烯薄膜具有重要意义.本文总结了近年来在介电衬底上直接生长石墨烯的研究进展:阐述了金属辅助法、等离子体增强法以及热力学或动力学调控法等多种生长手段;介绍了多种介电/绝缘基底包括SiO2/Si,Al2O3,SrTiO3,h-BN,SiC,Si3N4以及玻璃表面生长石墨烯的特点与性能,分析了其可能的生长机理.根据拉曼谱图、薄层电阻、透光率、载流子迁移率等评估指标,将多种方法得到的石墨烯质量进行了总结与比较,并提出了直接在介电衬底上生成石墨烯的研究难点与趋势.

English Abstract

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