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物理学报. 2004, 53(3): 888-890.
doi: 10.7498/aps.53.888.
利用微波等离子体增强化学气相沉积法定向生长纳米碳管的研究
- 收稿日期: 2003-04-01
- 修回日期: 2003-06-11
- 刊出日期: 2004-03-15
English Abstract
Study on the definite direction growth of carbon nanotubes by the microwave plasma-enhanced chemical vapro phase deposition
- Received Date:
01 April 2003
- Accepted Date:
11 June 2003
- Published Online:
15 March 2004
Abstract: Using the microwave plasma-enhanced chemical vapor phase deposition,in the gas mixture of the methane and hydrogen, the aligned growth of the carbon nanotubes was observed and analyzed with a scanning electron microscope.The carbon nanotubes have the tidy arrangement in the perpendicular direction on a solid substrate.Its length is the same as the uniform caliber.This kind of carbon nanotubes can be used as the potential electron source material.
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Keywords:
- microwave plasma /
- carbon nanotubes
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