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Abstract: Using the microwave plasma-enhanced chemical vapor phase deposition,in the gas mixture of the methane and hydrogen, the aligned growth of the carbon nanotubes was observed and analyzed with a scanning electron microscope.The carbon nanotubes have the tidy arrangement in the perpendicular direction on a solid substrate.Its length is the same as the uniform caliber.This kind of carbon nanotubes can be used as the potential electron source material.