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本文利用热释氢和红外吸收研究了H在非晶态碳(a-C:H)膜中的含量和组态。实验结果表明,随着样品制备时衬底温度的增大:1)H在a-C:H膜中的组态从两相结构过渡为单相结构;2)H在a-C:H膜中的含量单调减少;3)a-C:H膜中sP3/sP2键合比例单调增大。The hydrogen evolution and IR absorption spectroscopy experiments are used to investi-gate the content and configuration of hydrogen in the amorphous carbon films(a-C:H).The results show that: with ilacreasing of the substrate temperature Ts, 1)the configuration of hydrogen in a-C:H changes from a two-phase structure to a single phase structure;2)the hydrogen content in a-C:H decreases monotonically;3)the ratio of sp3 bonds tO sp2 bonds ina-C:H increases monotonically.
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