The deep levels of Ga0.47In0.53As/InP lasers with broad, proton-bombarded stripe contacts and SQW (Single Quantum Well) grown by LP一MOVPE have been studied using DLTS (Deep Level Transient Spectroscopy) technique. DLTS Spectra of samples show that hole traps H1(Ev+0.09eV) and H2(Ev+O.11eV) and electron traps El (Ev-0.35eV) and E2 (Ev-0.42eV) present in Ga0.47In0.53As layer of lasers with broad and proton-bombarded stripe contacts, respectively. These traps may be related to Zn introduction in Ga0.47In0.53 As layer, native defect and interactions between H1 and damage induced by proton-bombardment, respectively. They may spatially localize in Ga0.47In0.53As layer and interface regions of discontinous variation In mole fraction of Ga1-xInx As layer with XIn=0.53.