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物理学报. 2010, 59(2): 1035-1039.
doi: 10.7498/aps.59.1035.
光子晶体波导对垂直腔面发射激光器光束远场形貌的调控
- 收稿日期: 2009-04-18
- 修回日期: 2009-05-22
- 刊出日期: 2010-01-05
English Abstract
Control of the photonic crystal waveguide over the beam profile of vertical-cavity surface-emitting lasers
- Received Date:
18 April 2009
- Accepted Date:
22 May 2009
- Published Online:
05 January 2010
Abstract: The control of the photonic crystal waveguide over the beam profile of vertical-cavity surface-emitting lasers is investigated. The symmetric slab waveguide model is adopted to analyze the control parameters of the beam profile in the photonic-crystal vertical-cavity surface-emitting laser （PC-VCSEL）. The filling factor （the ratio of the hole diameter to the lattice constant） and the etching depth control the divergence angle of the PC-VCSEL, and the low filling factor and the shallow etching depth are beneficial to achieve the low-divergence-angle beam. Two types of PC-VCSELs with different filling factors and etching depths are designed and fabricated. The experimental results show that the device with a lower filling factor and a shallower etching depth has a lower divergence angle, which agrees well with the theoretical predictions.
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