硅基光子集成研究进展

周培基; 李智勇; 俞育德; 余金中

doi:10.7498/aps.63.104218

摘要

报道了国际上关于硅基光子集成的最新研究进展和本课题组在该领域的研究成果，包括对一些光收发模块、Ⅲ-V族/硅基激光器等集成器件的结构改进和工艺的探索，展示了兼容互补金属氧化物半导体工艺的硅基光子集成在信息技术领域中的巨大前景. 可以预见，硅基光子集成已成为硅光子学的主要研究内容，硅光子学及硅基光子集成的发展目标是趋向更高速率、更低功耗及更大集成密度.

关键词:

The research progress of the silicon-based photonic integration in the world and the results of our group in recent years are reported in this paper, including exploration of design and improvement on process of the optical transceiver modules, Ⅲ-V/silicon lasers and other integrated photonics. The silicon photonics is predicted to have a great prospect in many fields due to its good compatibility with complementary metal oxide semiconductor technology. It is concluded that the trend of photonic integration on silicon substrate is toward high data rate, low power consumption and large integration density, and the silicon based photonic integration will become a main research subject of silicon photonics in the future.

Keywords:

作者及机构信息

1.
中国科学院半导体研究所集成光电子学国家重点实验室, 北京 100083

基金项目: 国家重点基础研究发展计划（批准号：2011CB301701）、国家高技术研究发展计划（批准号：2012AA012202）和国家自然科学基金（批准号：61275065）资助的课题.

Authors and contacts

1.
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Funds: Project supported by the State Key Development Program for Basic Research of China (Grant No. 2011CB301701), the National High Technology Research and Development Program of China (Grant No. 2012AA012202), and the National Natural Science Foundation of China (Grant No. 61275065).

参考文献

[1]	Zhu Y, Xu X J, Li Z Y, Zhou L, Han W H, Fan Z C, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 014229
[2]	Zhou L, Li Z Y, Zhu Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 124214
[3]	Zhou L, Li Z Y, Hu Y T, Xiong K, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074212
[4]	Xu H H, Huang Q Z, Li Y T, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 084210
[5]	Hu Y T, Xiao X, Li Z Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074208
[6]	Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Chin. Phys. B 21 074203
[7]	Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D, Yu J Z 2013 Chin. Phys. B 22 114212
[8]	Yu J Z 2011 Silicon Photonics (Beijing: Science Press) p404 (in Chinese) [余金中 2011 硅光子学 (北京: 科学出版社) 第404页]
[9]	Pinguet T, Analui B, Balmater E, Guckenberger D, Harrison M, Koumans R, Kucharski D, Liang Y, Masini G, Mekis A, Mirsaidi S, Narasimha A, Peterson M, Rines D, Sadagopan V, Sahni S, Sleboda T J, Song D, Wang Y, Welch B, Witzens J, Yao J, Abdalla S, Gloeckner S, Dobbelaere P D 2008 Group IV Photonics Conference Cardiff, UK, September 17-19, 2008 p362
[10]	Jater S, Malinge Y, Zhou Z, Liang H, Liao S, Li Z, Bushyakanist C, Lee D C, Shafiiha R, Luff J, Feng D Z, Asghari M 2012 Group IV Photonics Conference San Diego, USA, August 29-31, 2012 p159
[11]	Assefa S, Shank S, Green W, Khater M, Kiewra E, Reinholm C, Kamlapurkar S, Rylyakov A, Schow C, Horst F, Pan H P, Topuria T, Rice P, Gill D M, Rosenberg J, Barwicz T, Yang M, Proesel J, Hofrichter J, Offrein B, Gu X X, Haensch W, Monaghan J E, Vlasov Y 2012 International Electron Devices Meeting San Francisco, USA, December 10-13, 2012 p33.8.1
[12]	Assefa S, Pan H, Shank S, Green W M J, Rylyakov A, Schow C, Khater M, Kamlapurkar S, Kiewra E, Reinholm C, Topuria T, Rice P, Baks C, Vlasov Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.4
[13]	Nishi H, Kou R, Hiraki T, Tsuchizawa T, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.4
[14]	Dong P, Liu X, Chandrasekhar S, Buhl L L, Aroca R, Baeyens Y, Chen Y K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 PDP5C.6
[15]	Novack A, Liu Y, Ding R, Gould M, Jones T B, Li Q, Yang Y, Ma Y J, Zhang Y, Padmaraju K, Bergmen K, Lim A E J, Lo G Q, Hochberg M 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p7
[16]	Intermite G, Warburton R E, Myronov M, Allred P, Leadley D R, Gallacher K, Paul D J, Pilgrim N J, Lever L J M, Ikonic Z, Kelsall R W, Buller G S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p132
[17]	Takeda K, Hiraki T, Tsuchizawa T, Nishi H, Kou R, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p138
[18]	Kang J, Zhang R, Takenaka M, Takagi S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p140
[19]	Cho N, Kim M, Ma Z Q 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p77
[20]	Kim I G, Jang K S, Kim S, Joo J, Kim G 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p79
[21]	Suwa Y, 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p37
[22]	Sukhdeo D S, Nam D, Kang J H, Petykiewicz J, Lee J H, Jung W S, Vuckovic J, Brongersma M L, Saraswat K C 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p73
[23]	Geiger R, Sess M J, Minamisawa R A, Bonzone C, Schiefler G, Frigeriod J, Chrastina D, Isella G, Spolenakb R, Faist J, Sigg H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p93
[24]	Colece L 1997 Solid State Phenom. 54 55
[25]	Campenhout J V, Romeo P R, Regreny P, Seassal C, Thourhout D V, Cioccio L D, Fedeli J M, Baets R 2013 National Fiber Optic Engineers Conference Anaheim, USA, March 25, 2007 PDP35
[26]	Spuesens T, Régreny P, Thourhout D V 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p154
[27]	Wang Z Q, Sheng Zhen, Qiu C, Li H, Wu A M, Wang X, Zou S C, Gan F W 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p49
[28]	Kurczveil G 2011 IEEE J. Sel. Top. Quant. Electron. 17 1521
[29]	Liepvre A L, Jany C, Accard A, Lamponi M, Make D, Lelarge F, Fedeli J M, Messaoudene S, Bordel D, Duan G H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p150
[30]	Painchaud Y, Pelletier M, Poulin M, Pelletier F, Latrasse C, Robidoux G, Savard S, Gagné J F, Trudel V, Picard M J, Poulin P, Sirois P, D'Amours F, Asselin D, Paquet S, Paquet C, Cyr M, Guy M, Osman M M, Zhuge Q, Xu X, Chagnon M, Plant D V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.2
[31]	Sahni S, Ayazi A, Chi Y M, Dahl A, Dobbelaere P D, Gloeckner S, Hon K Y, Hovey S, Liang Y, Mack M, Masini G, Mekis A, Peterson M, Pinguet T, Schramm J, Sharp M, Sun P, Timpe R, Verslegers L 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p81
[32]	Urino Y, Horikawa T, Nakamura T, Arakawa Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.6
[33]	Rakowski M, Pantouvaki M, Yu H, Bogaerts W, Meyer K D, Steyaert M, Snyder B, O'Brien P, Ryckaert J, Absil P, Campenhout J V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.5
[34]	Xiao X, Xu H, Li X Y, Li Z Y, Chu T, Yu J Z, Yu Y D 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OW4J.3
[35]	Li Z Y, Xu D X, McKinnon W R, Janz S, Schmid J H, Cheben P, Yu J Z 2009 Opt. Express 17 15947
[36]	Xiao X, Xu H, Li X Y, Hu Y T, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 02507
[37]	Xu H, Xiao X, Li X Y, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15093
[38]	Hu Y T, Xiao X, Xu H, Li X Y, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15079
[39]	Xu H H, Hu Y T, Zhu Y, Li Y T, Li Z Y, Fan Z C, Yu Y D, Yu J Z 2010 Group IV Photonics Conference Beijing, China, September 1-3, 2010 p1.21

施引文献

[1]	Zhu Y, Xu X J, Li Z Y, Zhou L, Han W H, Fan Z C, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 014229
[2]	Zhou L, Li Z Y, Zhu Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 124214
[3]	Zhou L, Li Z Y, Hu Y T, Xiong K, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074212
[4]	Xu H H, Huang Q Z, Li Y T, Yu Y D, Yu J Z 2010 Chin. Phys. B 19 084210
[5]	Hu Y T, Xiao X, Li Z Y, Li Y T, Fan Z C, Han W H, Yu Y D, Yu J Z 2011 Chin. Phys. B 20 074208
[6]	Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Chin. Phys. B 21 074203
[7]	Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D, Yu J Z 2013 Chin. Phys. B 22 114212
[8]	Yu J Z 2011 Silicon Photonics (Beijing: Science Press) p404 (in Chinese) [余金中 2011 硅光子学 (北京: 科学出版社) 第404页]
[9]	Pinguet T, Analui B, Balmater E, Guckenberger D, Harrison M, Koumans R, Kucharski D, Liang Y, Masini G, Mekis A, Mirsaidi S, Narasimha A, Peterson M, Rines D, Sadagopan V, Sahni S, Sleboda T J, Song D, Wang Y, Welch B, Witzens J, Yao J, Abdalla S, Gloeckner S, Dobbelaere P D 2008 Group IV Photonics Conference Cardiff, UK, September 17-19, 2008 p362
[10]	Jater S, Malinge Y, Zhou Z, Liang H, Liao S, Li Z, Bushyakanist C, Lee D C, Shafiiha R, Luff J, Feng D Z, Asghari M 2012 Group IV Photonics Conference San Diego, USA, August 29-31, 2012 p159
[11]	Assefa S, Shank S, Green W, Khater M, Kiewra E, Reinholm C, Kamlapurkar S, Rylyakov A, Schow C, Horst F, Pan H P, Topuria T, Rice P, Gill D M, Rosenberg J, Barwicz T, Yang M, Proesel J, Hofrichter J, Offrein B, Gu X X, Haensch W, Monaghan J E, Vlasov Y 2012 International Electron Devices Meeting San Francisco, USA, December 10-13, 2012 p33.8.1
[12]	Assefa S, Pan H, Shank S, Green W M J, Rylyakov A, Schow C, Khater M, Kamlapurkar S, Kiewra E, Reinholm C, Topuria T, Rice P, Baks C, Vlasov Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.4
[13]	Nishi H, Kou R, Hiraki T, Tsuchizawa T, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.4
[14]	Dong P, Liu X, Chandrasekhar S, Buhl L L, Aroca R, Baeyens Y, Chen Y K 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 PDP5C.6
[15]	Novack A, Liu Y, Ding R, Gould M, Jones T B, Li Q, Yang Y, Ma Y J, Zhang Y, Padmaraju K, Bergmen K, Lim A E J, Lo G Q, Hochberg M 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p7
[16]	Intermite G, Warburton R E, Myronov M, Allred P, Leadley D R, Gallacher K, Paul D J, Pilgrim N J, Lever L J M, Ikonic Z, Kelsall R W, Buller G S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p132
[17]	Takeda K, Hiraki T, Tsuchizawa T, Nishi H, Kou R, Fukuda H, Ishikawa Y, Wada K, Yamada K 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p138
[18]	Kang J, Zhang R, Takenaka M, Takagi S 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p140
[19]	Cho N, Kim M, Ma Z Q 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p77
[20]	Kim I G, Jang K S, Kim S, Joo J, Kim G 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p79
[21]	Suwa Y, 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p37
[22]	Sukhdeo D S, Nam D, Kang J H, Petykiewicz J, Lee J H, Jung W S, Vuckovic J, Brongersma M L, Saraswat K C 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p73
[23]	Geiger R, Sess M J, Minamisawa R A, Bonzone C, Schiefler G, Frigeriod J, Chrastina D, Isella G, Spolenakb R, Faist J, Sigg H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p93
[24]	Colece L 1997 Solid State Phenom. 54 55
[25]	Campenhout J V, Romeo P R, Regreny P, Seassal C, Thourhout D V, Cioccio L D, Fedeli J M, Baets R 2013 National Fiber Optic Engineers Conference Anaheim, USA, March 25, 2007 PDP35
[26]	Spuesens T, Régreny P, Thourhout D V 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p154
[27]	Wang Z Q, Sheng Zhen, Qiu C, Li H, Wu A M, Wang X, Zou S C, Gan F W 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p49
[28]	Kurczveil G 2011 IEEE J. Sel. Top. Quant. Electron. 17 1521
[29]	Liepvre A L, Jany C, Accard A, Lamponi M, Make D, Lelarge F, Fedeli J M, Messaoudene S, Bordel D, Duan G H 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p150
[30]	Painchaud Y, Pelletier M, Poulin M, Pelletier F, Latrasse C, Robidoux G, Savard S, Gagné J F, Trudel V, Picard M J, Poulin P, Sirois P, D'Amours F, Asselin D, Paquet S, Paquet C, Cyr M, Guy M, Osman M M, Zhuge Q, Xu X, Chagnon M, Plant D V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.2
[31]	Sahni S, Ayazi A, Chi Y M, Dahl A, Dobbelaere P D, Gloeckner S, Hon K Y, Hovey S, Liang Y, Mack M, Masini G, Mekis A, Peterson M, Pinguet T, Schramm J, Sharp M, Sun P, Timpe R, Verslegers L 2013 Group IV Photonics Conference Seoul, Korean, August 28-30, 2013 p81
[32]	Urino Y, Horikawa T, Nakamura T, Arakawa Y 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2J.6
[33]	Rakowski M, Pantouvaki M, Yu H, Bogaerts W, Meyer K D, Steyaert M, Snyder B, O'Brien P, Ryckaert J, Absil P, Campenhout J V 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OM2H.5
[34]	Xiao X, Xu H, Li X Y, Li Z Y, Chu T, Yu J Z, Yu Y D 2013 Optical Fiber Communications Conference Anaheim, USA, March 17-21, 2013 OW4J.3
[35]	Li Z Y, Xu D X, McKinnon W R, Janz S, Schmid J H, Cheben P, Yu J Z 2009 Opt. Express 17 15947
[36]	Xiao X, Xu H, Li X Y, Hu Y T, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 02507
[37]	Xu H, Xiao X, Li X Y, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15093
[38]	Hu Y T, Xiao X, Xu H, Li X Y, Xiong K, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Opt. Express 20 15079
[39]	Xu H H, Hu Y T, Zhu Y, Li Y T, Li Z Y, Fan Z C, Yu Y D, Yu J Z 2010 Group IV Photonics Conference Beijing, China, September 1-3, 2010 p1.21

[1]	王子尧, 陈福家, 郗翔, 高振, 杨怡豪. 非互易拓扑光子学. 物理学报, 2024, 73(6): 064201. doi: 10.7498/aps.73.20231850
[2]	张赞, 黄北举, 陈弘达. 基于可重构硅光滤波器的计算重建片上光谱仪. 物理学报, 2024, 73(14): 140701. doi: 10.7498/aps.73.20240224
[3]	熊霄, 曹启韬, 肖云峰. 铌酸锂集成光子器件的发展与机遇. 物理学报, 2023, 72(23): 234201. doi: 10.7498/aps.72.20231295
[4]	杜特, 马汉斯, 姜鑫鹏, 赵芬, 张兆健, 王志成, 彭政, 张伊祎, 张煜青, 罗鸣宇, 邹宏新, 吴加贵, 闫培光, 朱刚毅, 于洋, 何新, 陈欢, 张振福, 杨俊波. 片上光互连器件的智能化设计研究进展. 物理学报, 2023, 72(18): 184204. doi: 10.7498/aps.72.20230705
[5]	刘宁, 刘肯, 朱志宏. 集成二维材料非线性光学特性研究进展. 物理学报, 2023, 72(17): 174202. doi: 10.7498/aps.72.20230729
[6]	李科, 董明利, 袁配, 鹿利单, 孙广开, 祝连庆. 基于阵列波导光栅的光纤布拉格光栅解调技术综述. 物理学报, 2022, 71(9): 094207. doi: 10.7498/aps.71.20212063
[7]	皇甫夏虹, 刘双飞, 肖家军, 张蓓, 彭新村. 纳米光子学结构对GaInAsSb p-n结红外光电性能的调控. 物理学报, 2021, 70(11): 118501. doi: 10.7498/aps.70.20201829
[8]	鹿利单, 祝连庆, 曾周末, 崔一平, 张东亮, 袁配. 基于硅基光子器件的Fano共振研究进展. 物理学报, 2021, 70(3): 034204. doi: 10.7498/aps.70.20200550
[9]	王洪飞, 解碧野, 詹鹏, 卢明辉, 陈延峰. 拓扑光子学研究进展. 物理学报, 2019, 68(22): 224206. doi: 10.7498/aps.68.20191437
[10]	涂鑫, 陈震旻, 付红岩. 硅基光波导开关技术综述. 物理学报, 2019, 68(10): 104210. doi: 10.7498/aps.68.20190011
[11]	肖金标, 王登峰. 硅基槽式纳米线多模干涉型模阶数转换器全矢量分析. 物理学报, 2017, 66(7): 074203. doi: 10.7498/aps.66.074203
[12]	肖廷辉, 于洋, 李志远. 石墨烯-硅基混合光子集成电路. 物理学报, 2017, 66(21): 217802. doi: 10.7498/aps.66.217802
[13]	崔鑫, 李苏宇, 郭福明, 田原野, 陈基根, 曾思良, 杨玉军. 高频激光脉冲作用下原子的光子和光电子发射. 物理学报, 2015, 64(4): 043201. doi: 10.7498/aps.64.043201
[14]	肖金标, 罗辉, 徐银, 孙小菡. 硅基槽式微环谐振腔型偏振解复用器全矢量分析. 物理学报, 2015, 64(19): 194207. doi: 10.7498/aps.64.194207
[15]	张治国. 垂直多结光伏型集成硅X射线探测器的实现和实验. 物理学报, 2014, 63(24): 248501. doi: 10.7498/aps.63.248501
[16]	杨彪, 李智勇, 肖希, Nemkova Anastasia, 余金中, 俞育德. 硅基光栅耦合器的研究进展. 物理学报, 2013, 62(18): 184214. doi: 10.7498/aps.62.184214
[17]	朱樟明, 左平, 杨银堂. 考虑硅通孔的三维集成电路热传输解析模型. 物理学报, 2011, 60(11): 118001. doi: 10.7498/aps.60.118001
[18]	郭立俊, Jan-Peter Wüstenberg, Andreyev Oleksiy, Michael Bauer, Martin Aeschlimann. 利用飞秒双光子光电子发射研究GaAs(100)的自旋动力学过程. 物理学报, 2005, 54(7): 3200-3205. doi: 10.7498/aps.54.3200
[19]	屈卫星, 徐至展, 张文琦. 二阶离化过程对双光子自电离光电子能谱的影响. 物理学报, 1991, 40(5): 686-692. doi: 10.7498/aps.40.686
[20]	程开甲. 电子集体振动理论. 物理学报, 1958, 14(3): 244-261. doi: 10.7498/aps.14.244

计量

文章访问数: 13617
PDF下载量: 4714
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板