搜索

x
中国物理学会期刊

N+注入修复外延Fe膜面内六重磁对称

CSTR: 32037.14.aps.68.20190131

Recovering in-plane six-fold magnetic symmetry of epitaxial Fe films by N+ implantation

CSTR: 32037.14.aps.68.20190131
PDF
HTML
导出引用
  • 为了研究离子注入对外延磁性薄膜面内磁各向异性的影响, 用离子加速器对在有错切角的Si(111)面上外延生长的Fe膜进行了N+注入实验. 随着N+注入剂量的增加, 外延生长的Fe膜的面内磁各向异性逐渐从二重对称改变为六重对称. 通过透射电子显微镜和刻蚀实验验证, 发现离子辐照改变了Fe膜表面和界面的状态. 未辐照Fe膜面内二重磁对称来自于由于Si(111)面的错切使得在薄膜界面和表面处形成的原子台阶. N+注入的溅射作用使得Fe膜表面的原子台阶被擦除, N+注入使得缓冲层和Fe膜界面处相互扩散导致界面处原子台阶消失. 因此, 外延Fe膜在大剂量N+注入后表现出Fe(111)面诱导的六重磁对称. 研究结果对于提高面内磁记录密度有潜在的应用价值.

     

    In order to study the effect of ion implantation on the in-plane magnetic anisotropy of epitaxial magnetic films, a 3-nm Al buffer layer is epitaxially grown on an Si (111) substrate with a miscut angle, and then 25-nm Fe is grown on the buffer layer. High-resolution X-ray diffraction reveals that the epitaxial Fe film has a (111)-oriented bcc structure. The epitaxial Fe films are implanted by 10 keV N+ ions with dose up to 5 × 1016 ions/cm2. The change and mechanism of the in-plane magnetic anisotropy of the epitaxial Fe film are studied systematically. It is found that the in-plane magnetic anisotropy of the epitaxial Fe film is gradually changed from two-fold to six-fold symmetry with the increase of N+ implantation dose. It is confirmed by transmission electron microscopy and etching experiments that ion implantation changes the surface and interface state of Fe film. This result is consistent with the result from the SRIM software simulation. The in-plane magnetic uniaxial anisotropy of epitaxial Fe film comes from atomic steps at the surface and the interface of the Fe film. These steps result from Si (111) substrate with a miscut angle. Ion implantation has effects on sputtering and atomic diffusion. The sputtering effect causes the step at the surface of the Fe film to be erased, and the diffusion of the atom leads the step at the interface of the Fe film to disappear. The in-plane uniaxial anisotropy induced by the atomic step is weakened, and the magnetocrystalline anisotropy induced by the Fe (111) plane is dominant. Therefore, the epitaxial Fe film exhibits Fe (111) plane induced six-fold magnetic symmetry after high-dose N+ implantation. This work indicates that the in-plane magnetic anisotropy of Fe films epitaxially grown on Si (111) substrate with miscut angle can be modified and precisely controlled by ion implantation. This work may be of practical significance for improving the density of in-plane magnetic recording material.

     

    目录

    /

    返回文章
    返回