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A new atmospheric RF cold plasma source with microhollow cathode structure

Qiu Liang Meng Yue-Dong Ren Zhao-Xing Zhong Shao-Feng

A new atmospheric RF cold plasma source with microhollow cathode structure

Qiu Liang, Meng Yue-Dong, Ren Zhao-Xing, Zhong Shao-Feng
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  • Abstract views:  4272
  • PDF Downloads:  2112
  • Cited By: 0
Publishing process
  • Received Date:  17 November 2005
  • Accepted Date:  13 January 2006
  • Published Online:  20 November 2006

A new atmospheric RF cold plasma source with microhollow cathode structure

  • 1. 中国科学院等离子体物理研究所,合肥 230031

Abstract: The configuration and mechanism of a microhollow cathode discharge (MHCD) is introduced in this paper. The focus is a new type of cold atmospheric large-area plasma source, the fused hollow cathode (FHC) plasma source based on radio frequency hollow cathodes. Through its applications and related research, we present the characteristics of the hollow cathode discharge and the factors on which its characteristics depend, such as the cathode material, gas specy, frequency, gas flow, pressure, inner diameter of cathode, and the like. Two other types of related MHCD systems are given in addition.

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