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Design and fabrication of gold transmission phase gratings for soft X-rays

Qiu Ke-Qiang Xu Xiang-Dong Liu Ying Hong Yi-Lin Fu Shao-Jun

Design and fabrication of gold transmission phase gratings for soft X-rays

Qiu Ke-Qiang, Xu Xiang-Dong, Liu Ying, Hong Yi-Lin, Fu Shao-Jun
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  • Abstract views:  3836
  • PDF Downloads:  1186
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Publishing process
  • Received Date:  01 March 2008
  • Accepted Date:  18 April 2008
  • Published Online:  05 May 2008

Design and fabrication of gold transmission phase gratings for soft X-rays

  • 1. 中国科学技术大学国家同步辐射实验室,合肥 230029

Abstract: The diffraction efficiency of a gold transmission phase grating is simulated as a function of the depth of grooves and the duty cycle on the basis of the scalar diffraction theories. It is shown that the +1 order diffraction efficiency of a transmission phase grating with appropriate groove depth and duty cycle can beup to 21.9% of the incident light,whereas it is no greater than 10% for a conventional amplitude-mode transmission grating. Transmission gratings with area of 20mm×5mm,period of 1μm,duty cycle of 0.55 and 200nm thick gold bars supported by a membrane of 300nm thick polyimide have been fabricated by combining holographic lithography and electroplating. Its diffraction efficiency has been measured in national synchrotron radiation laboratory,and the maximum efficiency in +1 order is about 16% at λ=7.425nm.

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