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Multiscale entropy complexity analysis of metallic interconnection electromigration noise

He Liang Du Lei Chen Jian-Ping Zhuang Yi-Qi Li Wei-Hua

Multiscale entropy complexity analysis of metallic interconnection electromigration noise

He Liang, Du Lei, Chen Jian-Ping, Zhuang Yi-Qi, Li Wei-Hua
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  • Received Date:  26 December 2007
  • Accepted Date:  14 February 2008
  • Published Online:  05 May 2008

Multiscale entropy complexity analysis of metallic interconnection electromigration noise

  • 1. (1)西安电子科技大学技术物理学院,西安 710071; (2)西安电子科技大学微电子学院,西安 710071

Abstract: In order to solve the limitation of traditional frequency-domain analysis in Al interconnection electromigration noise, the multiscale entropy (MSE) method is proposed to analyze the electromigration noise time series. The result shows that at the early stage, electromigration noise is irregular, the noise complexity is large, and with the occurrence of nucleation, the electromigration noise becomes more regular, and the complexity decreases obviously. It indicates that the disorder degree of electromigration system decreases continually. Compared with traditional parameters, MSE can be used to successfully characterize electromigration process.

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