Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

Wang Li-Li An Tao Wen Mao Zheng Wei-Tao

Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

Wang Li-Li, An Tao, Wen Mao, Zheng Wei-Tao
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  3870
  • PDF Downloads:  941
  • Cited By: 0
Publishing process
  • Received Date:  20 January 2010
  • Accepted Date:  12 May 2010
  • Published Online:  15 January 2011

Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

  • 1. (1)College of Science, Changchun University, Changchun 130022, China; (2)College of Science, Changchun University, Changchun 130022, China;Department of Materials Science, Jilin University, Changchun 130012, China; (3)Department of Materials Science, Jilin University, Changchun 130012, China

Abstract: TiN/SiNx multilayer coatings were deposited at different deposition pressure by reactive magnetron sputtering. The microstructure and mechanical properties of the coatings were characterized using X-ray diffraction (XRD), atomic force microscopy (AFM) and nanoindentation. The results showed that the layer structure became rough and the preferred orientation of TiN transferred from (200) to (111) plane with the increase of deposition pressure. Surface roughness of the coatings increased but the hardness and elastic modulus decreased with increasing deposition pressure. The variation of mechanical properties are attributed to the changes in layer structures and the densities of the coatings.

Reference (15)

Catalog

    /

    返回文章
    返回