AN INVESTIGATION ON HYDROGEN EVOLUTION AND IR ABSORPTION OF a-C:H FILMS

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AN INVESTIGATION ON HYDROGEN EVOLUTION AND IR ABSORPTION OF a-C:H FILMS

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PENG SHAO-QI, LIU GUO-HONG

Acta Phys. Sin., 1988, 37(7): 1209-1212.

Abstract
The hydrogen evolution and IR absorption spectroscopy experiments are used to investi-gate the content and configuration of hydrogen in the amorphous carbon films(a-C:H).The results show that: with ilacreasing of the substrate temperature Ts, 1)the configuration of hydrogen in a-C:H changes from a two-phase structure to a single phase structure;2)the hydrogen content in a-C:H decreases monotonically;3)the ratio of sp3 bonds tO sp2 bonds ina-C:H increases monotonically.
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PENG SHAO-QI,

LIU GUO-HONG

1.
中山大学物理系
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