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AN INVESTIGATION ON HYDROGEN EVOLUTION AND IR ABSORPTION OF a-C:H FILMS

PENG SHAO-QI LIU GUO-HONG

AN INVESTIGATION ON HYDROGEN EVOLUTION AND IR ABSORPTION OF a-C:H FILMS

PENG SHAO-QI, LIU GUO-HONG
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  • Received Date:  10 August 1987
  • Published Online:  06 July 2005

AN INVESTIGATION ON HYDROGEN EVOLUTION AND IR ABSORPTION OF a-C:H FILMS

  • 1. 中山大学物理系

Abstract: The hydrogen evolution and IR absorption spectroscopy experiments are used to investi-gate the content and configuration of hydrogen in the amorphous carbon films(a-C:H).The results show that: with ilacreasing of the substrate temperature Ts, 1)the configuration of hydrogen in a-C:H changes from a two-phase structure to a single phase structure;2)the hydrogen content in a-C:H decreases monotonically;3)the ratio of sp3 bonds tO sp2 bonds ina-C:H increases monotonically.

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