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DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGY

XIANG JIN-ZHONG ZHENG ZHI-HAO XIONG JING ZHANG FENG-QING

DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGY

XIANG JIN-ZHONG, ZHENG ZHI-HAO, XIONG JING, ZHANG FENG-QING
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  • Received Date:  10 May 1989
  • Published Online:  22 June 2005

DIAMOND-LIKE CARBON FILMS IMPLANTED WITH VARIOUS ION ENERGY

  • 1. (1)兰州大学现代物理系,兰州,730001; (2)中国科学院上海冶金研究所离子束开放研究实验室,上海,200050

Abstract: Diamond-like carbon (DLC) films, prepared by RF plasma CVD, were implanted at a dose of 5×1015Ar/cm2 with various ion energy of 50, 100, 140, 180 keV. Before and after ion implantation, IR absorption spectra, Raman spectra, optical gap Eopt, hydrogen contents and resistivities were measured. The results show that C-H bonds are destroyed and sp2 and sp3 components are decreased during implantation. While the ratio of (sp2/sp3) increases with ion energy. The Eopt, resistivities and hydrogen contents decrease with ion energy increasing. Ho-wever, at 180 keV, the above parameters have no evident change. These results are also discussed in this paper.

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