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The current status of surface wave plasma source development

Dong Tai-Yuan Ye Kun-Tao Liu Wei-Qing

The current status of surface wave plasma source development

Dong Tai-Yuan, Ye Kun-Tao, Liu Wei-Qing
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  • In this paper, a flat-type surface wave plasma (SWP) source generated by microwave discharg is introduced systematically. The principle of the surface wave plasma is analyzed and the energy absorption mechanism of the surface wave plasma discharge is explored. A novel wave-mode converter composed of the single-mode resonator array, sub-wavelength diffraction grating and a new type of slot antenna array is introduced. The research findings, such as the mechanism of the generation, the realization, the characteristics of plasma parameters and the numerical simulation of the new SWP sources are beneficial to industrial applications, will promote the effectiveness of the microelectronics industry and obtain a new breakthrough.
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    [2]

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    [3]

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    [4]

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    [5]

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    [6]

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    Nagatsu M, Xu G, Ghanashev I, Kanoh M , Sugai H 1997 Plasma Sources Sci. Technol. 6 427

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    Nagatsu M, Xu G, Yamage M, Kanoh M, Sugai H 1996 Jpn. J. Appl. Phys. 35 L341

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    Kousaka H, Ono K, Umehara N, Sawada I, Ishibashi K 2006 Thin Solid Films 506-507 503

    [15]

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    [17]

    Ghanashev I, Nagatsu M, Sugai H 1997 Jpn. J. Appl. Phys. 36 337

    [18]

    Kudela J, Terebessy T, Odrobina I, Kando M 2002 Appl. Phys. Lett. 80 1132

    [19]

    Sugai H, Ghanashev I, Mizuno K 2002 Appl. Phys. Lett. 77 3523

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    [21]

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    [22]

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    Lan C H, Hu X W, Jiang Z H, Liu M H 2010 Acta Phys. Sin. 59 4093 (in Chinese) [蓝朝辉, 胡希伟, 江中和, 刘明海 2010 物理学报 59 4093]

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    Tsuji A, Yasaka Y, Takeno H 2008 Surface & Coatings Technol. 202 5306

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Publishing process
  • Received Date:  15 November 2011
  • Accepted Date:  26 December 2011
  • Published Online:  05 July 2012

The current status of surface wave plasma source development

  • 1. School of Science, Jiangxi University of Science and Technology, Ganzhou 341000, China

Abstract: In this paper, a flat-type surface wave plasma (SWP) source generated by microwave discharg is introduced systematically. The principle of the surface wave plasma is analyzed and the energy absorption mechanism of the surface wave plasma discharge is explored. A novel wave-mode converter composed of the single-mode resonator array, sub-wavelength diffraction grating and a new type of slot antenna array is introduced. The research findings, such as the mechanism of the generation, the realization, the characteristics of plasma parameters and the numerical simulation of the new SWP sources are beneficial to industrial applications, will promote the effectiveness of the microelectronics industry and obtain a new breakthrough.

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