Search

Article

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

Preparation and gas-sensing properties of the silver nanoparticles/porous silicon composite

Yan Da-Li Li Shen-Yu Liu Shi-Yu Zhu Yun

Preparation and gas-sensing properties of the silver nanoparticles/porous silicon composite

Yan Da-Li, Li Shen-Yu, Liu Shi-Yu, Zhu Yun
PDF
Get Citation

(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

Metrics
  • Abstract views:  666
  • PDF Downloads:  18263
  • Cited By: 0
Publishing process
  • Received Date:  26 December 2014
  • Accepted Date:  26 February 2015
  • Published Online:  05 July 2015

Preparation and gas-sensing properties of the silver nanoparticles/porous silicon composite

  • 1. College of Physics and Materials Science, Tianjin Normal University, Tianjin 300387, China;
  • 2. School of Marine Science and Engineering, Hebei University of Technology, Tianjin 300130, China
Fund Project:  Project supported by the National Natural Science Foundation of China (Grant No. 11104203), and the Tianjin Normal University Doctoral Foundation, China (Grant No. 52XB1416).

Abstract: The p-type porous silicon layer with the aperture about 1.5 microns and hole depth about 15 microns is prepared by electrochemical etching of a p-type monocrystalline silicon wafer with a resistivity 10-15 cm and along [100] orientation in a double-tank cell which consists of the electrolyte (volume ratio HF: DMF=1:2). Silver nanoparticles film with different thickness has been deposited on porous silicon by the electroless deposition for different deposition times. Morphology and microstructure of the silver nanoparticles/porous silicon composite and ere studied by scanning electron microscope and X ray diffracmeter. Result indicates that the silver nanoparticles are uniformly distributed on the surface of porous silicon and the deposition time has an important influence on the morphology of the composite. The gas-sensing properties of the silver nanoparticles/porous silicon composite to NH3 are tested at room temperature by the static volumetric method. Results show that the deposition time has a significant impact on the gas-sensing properties of the silver nanoparticles/porous silicon. In a short deposition time, the composite with an appropriate amount of silver nanoparticles doped on the porous silicon shows good gas-sensing properties to NH3 with high sensitivity, fast response-recovery characteristic due to the high specific surface area and special microstructure. At room temperature, the gas sensor has a sensitivity of about 5.8 to 50 ppm NH3.

Reference (22)

Catalog

    /

    返回文章
    返回