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中国物理学会期刊
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Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, Gong Xiang-Dong. Simulation of step response of silane low-temperature pasma(1)J. Acta Physica Sinica, 2005, 54(7): 3251-3256. DOI: 10.7498/aps.54.3251
Citation: Yang Jing, Li Jing-Zhen, Sun Xiu-Quan, Gong Xiang-Dong. Simulation of step response of silane low-temperature pasma(1)J. Acta Physica Sinica, 2005, 54(7): 3251-3256. DOI: 10.7498/aps.54.3251
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Simulation of step response of silane low-temperature pasma(1)

Acta Phys. Sin., 2005, 54(7): 3251-3256.
DOI: 10.7498/aps.54.3251
CSTR: 32037.14.aps.54.3251
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