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The research of the air-sensitive sensor based on thephotonic crystal beam splitter

Kong Yan-Mei Gao Chao-Qun Jing Yu-Peng Chen Da-Peng

The research of the air-sensitive sensor based on thephotonic crystal beam splitter

Kong Yan-Mei, Gao Chao-Qun, Jing Yu-Peng, Chen Da-Peng
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  • Abstract views:  3121
  • PDF Downloads:  743
  • Cited By: 0
Publishing process
  • Received Date:  08 July 2010
  • Accepted Date:  17 August 2010
  • Published Online:  15 May 2011

The research of the air-sensitive sensor based on thephotonic crystal beam splitter

  • 1. Integrated Circuit Advanced Process Center, Key Lab of Microelectronics Device and Integration Technology,Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

Abstract: The spectroscopy is the ultimate way for chemical analysis. This paper mainly describes the idea of an air-sensitive sensor based on MEMS technology, and more over, a photonic crystal (PC) beam splitter was designed, which can achieve high resolution beam steering, and this improves the resolution of the sensor. The paper offers a new idea and lays the foundation for the novel beam splitter that applied to many optical systems.

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