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Influence of pressure on structure and properties of Si-doped glow discharge polymer film

He Zhi-Bing Yan Jian-Cheng Tang Yong-Jian Li Ping Zhang Ying

Influence of pressure on structure and properties of Si-doped glow discharge polymer film

He Zhi-Bing, Yan Jian-Cheng, Tang Yong-Jian, Li Ping, Zhang Ying
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  • Received Date:  12 August 2010
  • Accepted Date:  30 September 2010
  • Published Online:  15 June 2011

Influence of pressure on structure and properties of Si-doped glow discharge polymer film

  • 1. (1)Centre of Laser Fusion Research, China Academy of Engineering Physics, Mianyang 621900, China; (2)Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, China; (3)Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, China; Centre of Laser Fusion Research, China Academy of Engineering Physics, Mianyang 621900, China

Abstract: The Si-doped glow discharge polymer (Si-GDP) films are deposited by glow discharge polymerization technology at different pressures. The structure and the composition of eath Si-doped glow discharge polymer film are characterized by the Fourier transform infrared spectroscopy and x-ray photoelectron. Using ultraviolet/visible spectroscopy, the optical band gap is analyzed. The results show that the Si element exists mainly in the form of Si—C, Si—H, Si—O, Si—CH3. The relative content of Si—C decreases and then increases with the increase of pressure. It can be found that the ratio between C—C and C C decreases with the increase of pressure. As the pressure increases, the optical band-gap decreases and then increases.

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