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Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography

Luo Yin-Yan Zhu Xian-Fang

Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography

Luo Yin-Yan, Zhu Xian-Fang
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Publishing process
  • Received Date:  16 August 2010
  • Accepted Date:  25 February 2011
  • Published Online:  05 April 2011

Effects of thermal evaporation and electron beam evaporation on two-dimensional patterned Ag nanostructure during nanosphere lithography

  • 1. Department of Physics, Xiamen University, Xiamen 361005, China

Abstract: In the process of fabricating two-dimensional Ag nano-arrays via nanosphere lithography, different deposition methods present different lattice point shapes of Ag nanostructure. Nano-triangles are produced by thermal evaporation whereas nano-rings are obtained by electron beam evaporation although they are both of hexagonal lattice. It is indicated that the sizes, the surface nanocurvature, the thermal and the kinetic energies of the particles deposited are key factors controlling the formation of the shape of Ag lattice point.

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