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Structure and mechanical property of glow discharge polymer

He Zhi-Bing Yang Zhi-Lin Yan Jian-Cheng Song Zhi-Min Lu Tie-Cheng

Structure and mechanical property of glow discharge polymer

He Zhi-Bing, Yang Zhi-Lin, Yan Jian-Cheng, Song Zhi-Min, Lu Tie-Cheng
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Publishing process
  • Received Date:  25 June 2010
  • Accepted Date:  15 February 2011
  • Published Online:  05 April 2011

Structure and mechanical property of glow discharge polymer

  • 1. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;
  • 2. College of Physical Science and Technology, Sichuan University, Chengdu 610065, China

Abstract: Different glow discharge polymer (GDP) thin-films are prepared at various working pressures and flux ratios of trans-2-butune (T2B) to H2 by using low-pressure plasma enhanced chemical vapor deposition technology. Hydrogen atomic content and network structure of GDP thin-film are characterized by element analysis and Fourier transform infrared spectrum. The hardness and modulus of GDP coating are measured by nanoindentation. It is found that when working pressure and flux ratio between T2B and H2 gradually decrease, hydrogen content and sp3 CH3 groups decrease, sp2 CH2 and sp3 CH1,2 groups increase and hardness H and Youngs modulus E of GDP coating and the cross-linking degree of carbon network inerease.

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