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STUDY ON THE COERCIVITY OF RF SPUTTERED IRON OXIDE THIN FILMS

YU MEI YOU GUANG-JIAN ZHOU ZENG-JUN LUO HUI-LIN

STUDY ON THE COERCIVITY OF RF SPUTTERED IRON OXIDE THIN FILMS

YU MEI, YOU GUANG-JIAN, ZHOU ZENG-JUN, LUO HUI-LIN
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  • Received Date:  02 June 1986
  • Published Online:  20 March 2005

STUDY ON THE COERCIVITY OF RF SPUTTERED IRON OXIDE THIN FILMS

  • 1. (1)Department of Electrical Engineering and Computer Sciences,University of California,San Diego,La Jolla,CA 92093,USA; (2)北京大学物理系

Abstract: The study on magnetic properties of RF sputtered iron oxide thin films was carried out systematically. More specifically, the temperature dependence (77-500 K) of the coercivity and the variation of coercivity with different iron oxide phases such as the as-sputtered Fe3O4, partially transformed Fe3O4/(γ-Fe2O3), and γ-Fe2O3, were investigated. Comparing the theoretical analyses with the experimental results, the contributions to the coercivity from shape anisotropy, magnetocrystalline anisotropy, and stress-induced magnetic anisotropy were obtained separately. And the first-order crystalline anisotropy constant K1 vs. temperature for Fe3O4 and γ-Fe2O3 films was derived from Ms(T) and Hc(T) over the temperature range of 100-500 K.

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