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INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES

WANG YIN-YUE XU HUAI-ZHE CHEN GUANG-HUA

INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES

WANG YIN-YUE, XU HUAI-ZHE, CHEN GUANG-HUA
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  • Received Date:  04 February 1991
  • Published Online:  05 January 1992

INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES

  • 1. 兰州大学物理系,兰州,730000

Abstract: The thermal stability of a-Si:H/a-Ge:H superlattices was studied using LR and XRD spec tra. It was found that the crystallization temperature of superlattices with small layer thickness is higher than that of bulk a-Ge:H. Results are discussed preliminarily.

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