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A MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR

LIU ZU-LI ZHU DA-QI SONG WEN-DONG CHEN JUN-FANG

A MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR

LIU ZU-LI, ZHU DA-QI, SONG WEN-DONG, CHEN JUN-FANG
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  • Received Date:  11 April 1991
  • Published Online:  05 February 1992

A MASS TRANSFER MODEL FOR THE PLASMA DEPOSITION PROCESS IN AXIAL-FLOW REACTOR

  • 1. 华中理工大学物埋系,武汉,430074

Abstract: A kinetic model for the glow discharge plasma deposition process in the axial-flow reactor is proposed. In particular, the realtionships between the deposition characteristics (i.e., generation rate, generation frequency, deposition rate, and gas efficiency) and the process parameters (gas flow rate and gas pressure) are examined by numerical modeling technique. Some results has been explained.

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