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Microstructures of Mo/Si multilayer mirror after proton irradiation

Guan Qing-Feng Lü Peng Wang Xiao-Dong Wan Ming-Zhen Gu Qian-Qian Chen Bo

Microstructures of Mo/Si multilayer mirror after proton irradiation

Guan Qing-Feng, Lü Peng, Wang Xiao-Dong, Wan Ming-Zhen, Gu Qian-Qian, Chen Bo
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  • In this paper we characterize the microstructures of Mo/si multilager in space solar telescope induced by proton irradiation by transmission electron microscope (TEM). The optical performances of the Mo/Si multilayer mirror before and after proton irradiation are also determined. The experimental results show that some defect structures are introduced after proton irradiation. The Mo/Si periodic structure is destructed in some irradiation regions. The widths of Mo layer and Si layer significantly change and the Mo/Si interface is much rougher than before irradiation. Moreover, the obvious distortions of the Mo/Si interface and the formation of the small islands in Mo layer are also found. Furthermore, proton irradiation reduces the reflectivity of Mo/Si multilayer mirror. The dominante mechanism of optical degeneration of the Mo/Si multilayer induced by proton irradiation should be attributed to the formation of the defect structures.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 10878004, 50671042), and the Opening Foundation of State Key Laboratory of Applied Optics, China.
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    Gussenhoven M S, Mullon E G 1993 IEEE Trans. Nucl. Sci. 40 221

    [2]

    Fan X H, Chen B, Guan Q F 2008 Acta Phys. Sin. 57 1829(in Chinese) [范鲜红,陈波,关庆丰 2008 物理学报 57 1829]

    [3]

    Cheng X W, Guan Q F, Fan X H, Chen B 2010 Chin. Phys. B 19 016103

    [4]

    Fan X H, Ni Q L, Chen B 2008 Acta Phys. Sin. 57 6494 (in Chinese) [范鲜红,尼启良,陈波 2008 物理学报 57 6494]

    [5]

    Lauriente M, VampolaA L, Koga R, Hosken R 1999 Spacecraft Rockets 36 902

    [6]

    Stearns G, RosenR S, Vernon S P 1993 Appl. Opt. 32 6952

    [7]

    Feng D 2000 Metallogrphy Physics (Vol.1)(Beijing:Science Press) p223 (in Chinese) [冯端 2000 金属物理学 (第一卷)(北京:科学出版社)第223页]

    [8]

    Wirth B D, Caturla M J, Diaz de la R T, Khraishi T, Zbib H 2001 J. Nucl. Mater. 180 23

    [9]

    Wang X T, Guan Q F, Qiu D H, Cheng X W, Li Y, Peng D J, Gu Q Q Acta Phys. Sin. 59 7252 (in Chinese) [王雪涛,关庆丰,邱冬华,程秀围,李艳,彭冬晋,顾倩倩 2010 物理学报 59 7252]

    [10]

    Wang X T, Guan Q F, Gu Q Q, Peng D J, Li Y, Chen B 2010 J. Inorganic Mater. 25 1313(in Chinese) [王雪涛,关庆丰,顾倩倩,彭东晋,李艳,陈波 2010 无机材料学报 25 1313]

    [11]

    Guan Q F, Chen D Q, Zhu J, Qiu D H,Wang X T, Chen XW2009 Acta Phys. Sin. 58 4846 (in Chinese) [关庆丰,程笃庆,朱键,邱冬华,王雪涛,程秀围 2009 物理学报 58 4846]

    [12]

    Chen D Q, Guan Q F, Zhu J, Qiu D H, Chen XW,Wang X T 2009 Acta Phys. Sin. 58 7300 (in Chinese) [程笃庆,关庆丰,朱健,邱东华,程秀围,王雪涛 2009 物理学报 58 7300]

    [13]

    Guan Q F, Chen B, Zhang Q Y, Dong C, Zou G T 2008 Acta Phys. Sin. 57 392 (in Chinese) [关庆丰,陈波,张庆瑜,董闯,邹广田 2008 物理学报 57 392]

    [14]

    Guan Q F, An C X, Qin Y, Zou J X, Hao S Z, Zhang Q Y, Dong C, Zou G T 2005 Acta Phys. Sin. 54 3927 (in Chinese) [关庆丰,安春香,秦颖,邹建新,郝胜志,张庆瑜,董闯,邹广田 2005 物理学报 54 3927]

    [15]

    Morawe C, Peffen J C, Hignete O 2001 SPIE High resolution multilayer X-ray 4145 61

    [16]

    Liu X, Wang Z S, Yi K 2008 Optical Interference Coatings (Hangzhou: Zhejiang University Press) p215 (in Chinese) [刘旭,王占山,易葵 2008 光学干涉薄膜 (杭州:浙江大学出版社)第215页]

  • [1]

    Gussenhoven M S, Mullon E G 1993 IEEE Trans. Nucl. Sci. 40 221

    [2]

    Fan X H, Chen B, Guan Q F 2008 Acta Phys. Sin. 57 1829(in Chinese) [范鲜红,陈波,关庆丰 2008 物理学报 57 1829]

    [3]

    Cheng X W, Guan Q F, Fan X H, Chen B 2010 Chin. Phys. B 19 016103

    [4]

    Fan X H, Ni Q L, Chen B 2008 Acta Phys. Sin. 57 6494 (in Chinese) [范鲜红,尼启良,陈波 2008 物理学报 57 6494]

    [5]

    Lauriente M, VampolaA L, Koga R, Hosken R 1999 Spacecraft Rockets 36 902

    [6]

    Stearns G, RosenR S, Vernon S P 1993 Appl. Opt. 32 6952

    [7]

    Feng D 2000 Metallogrphy Physics (Vol.1)(Beijing:Science Press) p223 (in Chinese) [冯端 2000 金属物理学 (第一卷)(北京:科学出版社)第223页]

    [8]

    Wirth B D, Caturla M J, Diaz de la R T, Khraishi T, Zbib H 2001 J. Nucl. Mater. 180 23

    [9]

    Wang X T, Guan Q F, Qiu D H, Cheng X W, Li Y, Peng D J, Gu Q Q Acta Phys. Sin. 59 7252 (in Chinese) [王雪涛,关庆丰,邱冬华,程秀围,李艳,彭冬晋,顾倩倩 2010 物理学报 59 7252]

    [10]

    Wang X T, Guan Q F, Gu Q Q, Peng D J, Li Y, Chen B 2010 J. Inorganic Mater. 25 1313(in Chinese) [王雪涛,关庆丰,顾倩倩,彭东晋,李艳,陈波 2010 无机材料学报 25 1313]

    [11]

    Guan Q F, Chen D Q, Zhu J, Qiu D H,Wang X T, Chen XW2009 Acta Phys. Sin. 58 4846 (in Chinese) [关庆丰,程笃庆,朱键,邱冬华,王雪涛,程秀围 2009 物理学报 58 4846]

    [12]

    Chen D Q, Guan Q F, Zhu J, Qiu D H, Chen XW,Wang X T 2009 Acta Phys. Sin. 58 7300 (in Chinese) [程笃庆,关庆丰,朱健,邱东华,程秀围,王雪涛 2009 物理学报 58 7300]

    [13]

    Guan Q F, Chen B, Zhang Q Y, Dong C, Zou G T 2008 Acta Phys. Sin. 57 392 (in Chinese) [关庆丰,陈波,张庆瑜,董闯,邹广田 2008 物理学报 57 392]

    [14]

    Guan Q F, An C X, Qin Y, Zou J X, Hao S Z, Zhang Q Y, Dong C, Zou G T 2005 Acta Phys. Sin. 54 3927 (in Chinese) [关庆丰,安春香,秦颖,邹建新,郝胜志,张庆瑜,董闯,邹广田 2005 物理学报 54 3927]

    [15]

    Morawe C, Peffen J C, Hignete O 2001 SPIE High resolution multilayer X-ray 4145 61

    [16]

    Liu X, Wang Z S, Yi K 2008 Optical Interference Coatings (Hangzhou: Zhejiang University Press) p215 (in Chinese) [刘旭,王占山,易葵 2008 光学干涉薄膜 (杭州:浙江大学出版社)第215页]

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  • Received Date:  21 March 2011
  • Accepted Date:  27 April 2011
  • Published Online:  05 January 2012

Microstructures of Mo/Si multilayer mirror after proton irradiation

  • 1. State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences, Changchun 130033, China;
  • 2. College of Material Science and Engineering, Jiangsu University, Zhenjiang 212013, China
Fund Project:  Project supported by the National Natural Science Foundation of China (Grant Nos. 10878004, 50671042), and the Opening Foundation of State Key Laboratory of Applied Optics, China.

Abstract: In this paper we characterize the microstructures of Mo/si multilager in space solar telescope induced by proton irradiation by transmission electron microscope (TEM). The optical performances of the Mo/Si multilayer mirror before and after proton irradiation are also determined. The experimental results show that some defect structures are introduced after proton irradiation. The Mo/Si periodic structure is destructed in some irradiation regions. The widths of Mo layer and Si layer significantly change and the Mo/Si interface is much rougher than before irradiation. Moreover, the obvious distortions of the Mo/Si interface and the formation of the small islands in Mo layer are also found. Furthermore, proton irradiation reduces the reflectivity of Mo/Si multilayer mirror. The dominante mechanism of optical degeneration of the Mo/Si multilayer induced by proton irradiation should be attributed to the formation of the defect structures.

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