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A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING

WANG ZHEN-XIA

A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING

WANG ZHEN-XIA
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  • Abstract views:  2838
  • PDF Downloads:  498
  • Cited By: 0
Publishing process
  • Received Date:  07 September 1992
  • Accepted Date:  20 April 1993
  • Published Online:  20 January 1994

A PRINCIPLE FOR MICRO-REGION SUPERPOSITING OF ION SPUTTERING

  • 1. 中国科学院上海原子核研究所

Abstract: Solid surfaces subjected to energetic ion bombardment generally develop chara-cteristic structures, which may significantly change total and differential sputtering yields. The change is due to several competing effects, for instance, change of the effective projectile incidence angle, recapture of obliquely ejected particles (shadow effect), and element local-enrichment in different micro-region on the alloy surface. From these, we have now developed an efficient new theoretical method for covering all of the above effects exactly. This method and its application to the analysis of experimental results of element (Cd) and alloy system (AlxSn100-x)targets are de-scribed in detail.

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