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Study on atomic layer deposition preparation of core-shell structured nanometer materials

Li Yong Li Hui-Qi Xia Yang Liu Bang-Wu

Study on atomic layer deposition preparation of core-shell structured nanometer materials

Li Yong, Li Hui-Qi, Xia Yang, Liu Bang-Wu
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  • Received Date:  09 May 2013
  • Accepted Date:  28 May 2013
  • Published Online:  05 October 2013

Study on atomic layer deposition preparation of core-shell structured nanometer materials

  • 1. Shandong University of Science and Technology, Shandong 266590, China;
  • 2. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
Fund Project:  Project supported by the National Natural Science Foundation of China (Grant No. 61106060), the Knowledge Innovation Program of the Chinese Academy of Sciences (Grant No. Y2YF028001), and the National High-tech R&D Program of China (Grant No. 2012AA052401).

Abstract: Monocrystal Pt nanoparticles, amorphous Al2O3 thin film, polycrystalline ZnO and TiO2 thin films were fabricated on black carbon nanoparticles by means of atomic layer deposition (ALD). Using high resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectrometer (XPS), energy dispersive spectroscopy (EDS), We have characterized and analyzed the surface morphology, crystal structure and composition of the ranopasticles and thin filins. Results indicate that the ALD method is an ideal method to prepare core-shell stuctured nanometer materials. In addition, the reasons why the formation of ALD films with different crystal morphologies, such as monocrystal, amorphous, polycrystalline, were discussed.

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