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GREEN/BLUE LIGHT EMISSION AND LUMINESCENT-MECHANISM OF NANOCRYSTALLINE SILICON-EMBEDDED IN SILICON OXIDE THIN FILM

TANG YONG CHEN PEI-YI ZHU MEI-FANG CHEN GUO XU HUAI-ZHE HAN YI-QIN XIE KAN LIU ZHEN-XIANG

GREEN/BLUE LIGHT EMISSION AND LUMINESCENT-MECHANISM OF NANOCRYSTALLINE SILICON-EMBEDDED IN SILICON OXIDE THIN FILM

TANG YONG, CHEN PEI-YI, ZHU MEI-FANG, CHEN GUO, XU HUAI-ZHE, HAN YI-QIN, XIE KAN, LIU ZHEN-XIANG
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  • Received Date:  23 May 1996
  • Accepted Date:  24 March 1997
  • Published Online:  20 August 1997

GREEN/BLUE LIGHT EMISSION AND LUMINESCENT-MECHANISM OF NANOCRYSTALLINE SILICON-EMBEDDED IN SILICON OXIDE THIN FILM

  • 1. (1)清华大学微电子学研究所; (2)中国科学技术大学研究生院物理部半导体超晶格国家重点实验室; (3)中国科学院物理研究所

Abstract: Green/blue light emission with peak position around 2.3—2.4eV at room temperature was observed from Si nanocrystals embedded in silicon oxide films. The effects of thermal annealing on the structure, silicon core level and photoluminescence of silicon oxide films with nanostructures were studied. PL spectra consisted of peaks of 1.86 and 2.38eV, which were independent of annealing temperature Ta. Silicon and SiO2 phases were separated in the annealing temperature range. Both PL intensity and the amount of Si4+ increased repidly as Ta>750℃. From our observation, the origin of green/blue light emission is suggested to be related to the defects at the interface and in the SiOx network.

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