Through the Coulormb-Explosion of MeV ion microcluster in self-supported superthin carbon foil, the determined value of 4HeH+ internuclear separation, generated by rf ion source,is obtained to be 0.094±0.003nm. It is found that 4HeH+ is different from H+2 and H+3, and their internuclear separations are closely related to the species and parameters of ion source. By means of the mechanism and condition of 4HeH+ formation, the difference of internuclear sepapation for 4HeH+ produced in the rf and deuplasmatron ion source was discussed.
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