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INFRARED RESPONSIVITY OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER

CHEN CHANG-HONG YI XIN-JIAN XIONG BI-FENG

INFRARED RESPONSIVITY OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER

CHEN CHANG-HONG, YI XIN-JIAN, XIONG BI-FENG
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  • Received Date:  12 June 2000
  • Accepted Date:  25 July 2000
  • Published Online:  20 March 2001

INFRARED RESPONSIVITY OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER

  • 1. 华中科技大学光电工程系,武汉430074

Abstract: VO2 thin films are used for uncooled microbolometer due to their high temperature coefficient of resistance.In this paper,on the basis of fabricating the uncooled bolometer based on VO2 sputtered thin films,the responsivity for the spectral range of 8-12μm region dependence on bias current and chopper frequency is studied.The result indicates that the responsivity is over 17kV/W and up to 10kV/W at a chopper frequency of 10 and 30Hz,respectively.The device having a detectivity D of exceeding 1.0×108cm (Hz)1/2/W and a thermal time constant of 0.011 seconds has been realized.

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