亚波长金属线栅的设计、制备及偏振成像实验研究

康果果; 谭峤峰; 陈伟力; 李群庆; 金伟其; 金国藩

doi:10.7498/aps.60.014218

摘要

针对红外偏振成像系统,运用等效介质理论,在氟化钙基底上设计了周期为200 nm,深度为100 nm的金属铝栅.模拟计算结果表明,设计的金属铝栅在中红外(3—5 μm)和远红外(8—12 μm)双波段范围内,以及±20°的视场范围内能够提供大于35dB的消光比.利用电子束曝光、反应离子束刻蚀、等离子去胶等工艺完成了金属铝栅的制作.将金属铝栅放在中波红外热像仪前,得到了目标轮廓清晰的偏振图像.

关键词:

Metal wire-grid whose period is far less than the illuminating wavelength exhibits strong polarization selectivity within a large field of view over a wide wave length range. Thus it could be used as the polarization-controller in the polarimetric imaging system. For infrared polarimetric imaging system, an aluminum wire-grid on the CaF substrate with period of 200nm and depth of 100nm was designed based on effective medium theory. The calculation results demonstrate that the designed wire-grid has the extinction ratio larger than 35 dB within a field of view ±20° over both middle wave infrared (MWIR) (3—5 μm) and long wave infrared (LWIR) (8—12 μm). The aluminum wire-grid was fabricated by electron beam lithography, reactive ion etching and plasma stripping. A clear-cut polarimetric image was obtained when wire-grid was placed in front of a MWIR thermal infrared imager.

Keywords:

作者及机构信息

(1)北京理工大学光电学院,北京 100081; (2)清华大学精密测试技术与仪器国家重点实验室,北京 100084; (3)清华大学清华-富士康纳米科技研究中心,北京 100084

基金项目: 国家重点基础研究发展计划(973)项目(批准号:2007CB935303和2007CB935301)资助的课题.

Authors and contacts

(1)School of Optoelectronic, Beijing Institute of Technology University, Beijing 100081, China; (2)State Key Laboratory of Precision Measurement Technology and Instrument, Tsinghua University, Beijing 100084, China; (3)Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China

参考文献

[1]	Tyo J S, Goldstein D L, Chenault D B, Shaw J A 2006 Appl. Opt. 45 5453
[2]	Shen S, She J, Tao T 2005 J. Opt. Soc. Am. A 22 961
[3]	Yamada I, Nishii J, Satio M 2008 Opt. Lett. 47 4735
[4]	Richter I, Sun P C, Fainman Y 1995 Appl. Opt. 34 2421
[5]	Zhang S W, Bayanheshig 2008 Acta. Phys. Sin. 57 3486 (in Chinese) [张善文、巴音贺希格 2008 物理学报 57 3486]
[6]	Zhao D Z, Zhang H Y 1988 Wave Optics(Beijing:Astronautic Publishing House) p63 (in Chinese) [赵达尊、张怀玉 1988 波动光学(北京:宇航出版社)第63页]
[7]	Ekberg M, Nikolajeff F, Larsson M, Hard S 1994 Appl. Opt. 33 103
[8]	Zhu X L, Xu Y G, Yang S 2007 Opt Express. 15 16546
[9]	Fang L, Du J L, Guo X W, Wang J Q, Zhang Z Y, Luo X G, Du C L 2008 Chin. Phys. B 17 2499

施引文献

[1]	Tyo J S, Goldstein D L, Chenault D B, Shaw J A 2006 Appl. Opt. 45 5453
[2]	Shen S, She J, Tao T 2005 J. Opt. Soc. Am. A 22 961
[3]	Yamada I, Nishii J, Satio M 2008 Opt. Lett. 47 4735
[4]	Richter I, Sun P C, Fainman Y 1995 Appl. Opt. 34 2421
[5]	Zhang S W, Bayanheshig 2008 Acta. Phys. Sin. 57 3486 (in Chinese) [张善文、巴音贺希格 2008 物理学报 57 3486]
[6]	Zhao D Z, Zhang H Y 1988 Wave Optics(Beijing:Astronautic Publishing House) p63 (in Chinese) [赵达尊、张怀玉 1988 波动光学(北京:宇航出版社)第63页]
[7]	Ekberg M, Nikolajeff F, Larsson M, Hard S 1994 Appl. Opt. 33 103
[8]	Zhu X L, Xu Y G, Yang S 2007 Opt Express. 15 16546
[9]	Fang L, Du J L, Guo X W, Wang J Q, Zhang Z Y, Luo X G, Du C L 2008 Chin. Phys. B 17 2499

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