氘化及氦离子注入对钪膜的表面形貌和相结构的影响

彭述明; 申华海; 龙兴贵; 周晓松; 杨莉; 祖小涛

doi:10.7498/aps.61.176106

摘要

采用XRD, SEM, AFM等详细研究了氘化及氦离子注入对钪膜的表面形貌和相结构的影响. 结果表明,在单晶硅及抛光Mo基片上制备的钪膜均具有(002)晶面择优取向;钪膜氘化后表面会出现大量孔洞, 氘化后氘化钪(ScD2)晶粒长大,但内部会残留少量未完全氘化反应的晶粒尺寸较小的 ScD0.33/Sc晶粒;氦离子注入对钪及氘化钪的表面形貌没有明显影响, 离子注入的氦将在钪及氘化钪晶格中聚集成泡,导致氦离子注入层中的钪及氘化钪衍射峰向低角度偏移, 并且氦泡的聚集具有择优取向性.

关键词:

钪膜 /
氘化 /
氦离子注入 /
表面形貌

Abstract

The effects of deuteration and helium-implantation on the surface morphology and phase structure of scandium (Sc) thick film are investigated by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) methods. The preferred orientation of (002) crystal plane is observed for both films deposited on substrates of monocrystalline-silicon and polished-molybdenum. A great number of holes appear on surface after deuteration and the grain size of ScD2 is bigger than that of Sc, whereas a few ScD0.33/Sc grains with relatively small grain size retain inside crystal. The surface morphologies of scandium and scandium deuteride films are slightly affected by helium-implantation. The formation of helium bubbles with a preferred orientation in the crystal lattice of scandium and scandium deuteride, generated by the aggregation of ion-implanted helium, causes the corresponding diffraction peaks of scandium and scandium deuteride phase to shift towards smaller angles.

Keywords:

作者及机构信息

1.
中国工程物理研究院核物理与化学研究所, 绵阳 621900;

2.
电子科技大学物理电子学院, 成都 610054

基金项目: 国家自然科学基金委员会-中国工程物理研究院联合基金(批准号: 10976007);国家自然科学基金(批准号: 50871106)和中国工程物理研究院科学技术发展基金(批准号: 2009A0301015)资助的课题.

Authors and contacts

1.
Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China;

2.
Department of Applied Physics, University of Electronic Science and Technology of China, Chengdu 610054, China

Funds: Project supported by the Joint Fund of the National Natural Science Foundation of China and the China Academy of Engineering Physics (Grant No. 10976007),the National Natural Science Foundation of China (Grant No. 50871106), and the Foundation for Development of Science and Technology of China Academy of Engineering Physics (Grant No. 2009A0301015).

参考文献

[1]	Dow P A, Briers G W, Dewey M A P, Stark D S 1968 Nucl. Instrum. Methods 60 293
[2]	Ohmura A, Machida A, Watanuki T, Aoki K, Nakano S, Takemura K 2007 J. Alloys Compd. 446-447 598
[3]	Snow C S, Mattsson T 2008 Sandia National Laboratories Report USA
[4]	Bing W Z, Long X G, Zhu Z L, Hao W L, Luo S Z, Peng S M 2010 Chin. J. Inorg. Chem. 26 1008 (in Chinese) [邴文增, 龙兴贵, 朱祖良, 郝万立, 罗顺忠, 彭述明 2010 无机化学学报 26 1008]
[5]	Kass W J 1977 J. Vac. Sci. Technol. A 14 518
[6]	Blewer R S, Maurin J K 1972 J. Nucl. Mater. 44 260
[7]	Barnes R B 1965 Nature 206 1307
[8]	Mcguire J C, Kempter C P 1960 J. Chem. Phys: Letters to the Editor 33 1584
[9]	Prem M, Krexner G, Pleschiutschnig J 2003 J. Alloys Compd. 356-357 683
[10]	Miyamoto M, Nishijima D, Ueda Y, Doerner R P, Kurishita H, Baldwin M J, Morito S, Ono K, Hanna J 2009 Nucl. Fusion 49 065035
[11]	Azarkh Z M, Funin V N 1965 Sov. Phys. Crystallogr. 10 21
[12]	Saitoh H, Machida A, Katayama Y, Aoki K 2010 J. Appl. Phys. 108 063516
[13]	Parish C M, Snow C S, Kammler D R, Brewer L N 2010 J. Nucl. Mater. 403 191
[14]	Zhou X S, Long X G, Zhang L, Peng S M, Luo S Z 2010 J. Nucl. Mater. 396 223
[15]	Snow C S, Brewer L N, Gelles D S 2008 J. Nucl. Mater. 374 147

施引文献

[1]	Dow P A, Briers G W, Dewey M A P, Stark D S 1968 Nucl. Instrum. Methods 60 293
[2]	Ohmura A, Machida A, Watanuki T, Aoki K, Nakano S, Takemura K 2007 J. Alloys Compd. 446-447 598
[3]	Snow C S, Mattsson T 2008 Sandia National Laboratories Report USA
[4]	Bing W Z, Long X G, Zhu Z L, Hao W L, Luo S Z, Peng S M 2010 Chin. J. Inorg. Chem. 26 1008 (in Chinese) [邴文增, 龙兴贵, 朱祖良, 郝万立, 罗顺忠, 彭述明 2010 无机化学学报 26 1008]
[5]	Kass W J 1977 J. Vac. Sci. Technol. A 14 518
[6]	Blewer R S, Maurin J K 1972 J. Nucl. Mater. 44 260
[7]	Barnes R B 1965 Nature 206 1307
[8]	Mcguire J C, Kempter C P 1960 J. Chem. Phys: Letters to the Editor 33 1584
[9]	Prem M, Krexner G, Pleschiutschnig J 2003 J. Alloys Compd. 356-357 683
[10]	Miyamoto M, Nishijima D, Ueda Y, Doerner R P, Kurishita H, Baldwin M J, Morito S, Ono K, Hanna J 2009 Nucl. Fusion 49 065035
[11]	Azarkh Z M, Funin V N 1965 Sov. Phys. Crystallogr. 10 21
[12]	Saitoh H, Machida A, Katayama Y, Aoki K 2010 J. Appl. Phys. 108 063516
[13]	Parish C M, Snow C S, Kammler D R, Brewer L N 2010 J. Nucl. Mater. 403 191
[14]	Zhou X S, Long X G, Zhang L, Peng S M, Luo S Z 2010 J. Nucl. Mater. 396 223
[15]	Snow C S, Brewer L N, Gelles D S 2008 J. Nucl. Mater. 374 147

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