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Be薄膜应力的X射线掠入射侧倾法分析

李佳 房奇 罗炳池 周民杰 李恺 吴卫东

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Be薄膜应力的X射线掠入射侧倾法分析

李佳, 房奇, 罗炳池, 周民杰, 李恺, 吴卫东

Residual stress analysis by grazing-incidence X-ray diffraction on beryllium films

Li Jia, Fang Qi, Luo Bing-Chi, Zhou Min-Jie, Li Kai, Wu Wei-Dong
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  • 由于铍薄膜极易被X射线穿透, 传统的几何模式下很难获得有效的X射线衍射应力分析结果. 本文采用掠入射侧倾法分析SiO2基底上Be薄膜残余应力, 相比其他衍射几何方法, 提高了衍射的信噪比, 获得的薄膜应力拟合曲线线形较好. 对Be薄膜的不同晶面分析, 残余应力结果相同, 表明其力学性质各向同性; 利用不同掠入射角下X射线的穿透深度不同, 获得应力在深度方向上的分布; 由薄膜面内不同方向的残余应力相同, 确定薄膜处于等双轴应力状态.
    Measurements of residual stress in beryllium thin film under standard Bragg-Brentano geometry are always problematic. In this article, a new experimental method using grazing- incidence X-ray diffraction is presented according to the convential sin2Ψ method, which effectively increases the signal-to-noise ratio. Analysis shows that the assumption (isotropic material) is logical, because the values of stress results from the three families of planes are camparable. The stress gradient can be measured at diffrenent grazing incidence angles. The results indicate the uniformity of the residual stress of the thin film along various Φ directions.
    • 基金项目: 国家自然科学基金(批准号: 11204280)和 等离子体物理重点实验室基金(批准号: 9140C6805020907)资助的课题.
    • Funds: Project supported by National Natural Science Foundation of China (Grant No. 11204280) and the Science and Technology on Plasma Physics Laboratory, China (Grant No. 9140C6805020907).
    [1]

    Montgomery D S, Nobile A, Walsh P J 2004 Rev. Sci. Instrum. 75 3986

    [2]

    Davydov D A, Kholopova O V, Kolbasov B N 2007 J. Nucl. Mater. 367 1079

    [3]

    Swift D C, Tierney T E, Luo S N 2005 Phys. Plasmas 12 056308

    [4]

    Kádas K, Vitos L, Johansson B 2007 Phys. Rev. B 75 035132

    [5]

    Di Y X, Ji X H, Hu M, Qin Y W, Chen J L 2006 Acta Phys. Sin. 43 5451 (in Chinese) [邸玉贤, 计欣华, 胡明, 秦玉文, 陈金龙 2006物理学报 43 5451]

    [6]

    Xu K W, Gao R S, Yu L G, He J W 1994 Acta Phys. Sin. 43 1295 (in Chinese) [徐可为, 高润生, 于莉根, 何家文 1994物理学报 43 1295]

    [7]

    Freund L B, Suresh S 2007 Thin Film Materials: Stress, Defect, Formation, and Surface Evolution (Beijing: Science Press) pp145, 264 (in Chinese) [Freund L B, Suresh S 2007薄膜材料–-应力、缺陷的形成和表面演化 (北京: 科学出版社)第145, 264页]

    [8]

    Doerner M F, Nix W D 1988 CRC Crit. Rev. Solid. State. Mater. Sci. 14 225

    [9]

    Kong D J, Zhang Y K, Chen Z G, Lu J Z, Feng A X, Ren X D, Ge T 2007 Acta Phys. Sin. 56 4056 (in Chinese) [孔德军, 张永康, 陈志刚, 鲁金忠, 冯爱新, 任旭东, 葛涛 2007物理学报 56 4056]

    [10]

    Conchon F, Renault P O, Bourhis E L, Krauss C, Goudeau P, Barthel E, Grachev S Y, Soudergard E, Rondeau V, Gy R, Lazzari R, Jupille J, Brun N 2010 Thin Solid Film 519 1563

    [11]

    Birkholz M 2006 Thin Film Analysis by X-ray Scattering (Weinheim: WILEY-VCH Verlag GmbH & Co.KgaA) pp253, 276

    [12]

    Peng J, Ji V, Seiler W, Tomescu A, Levesque A, Bouteville A 2006 Surf. Coat. Technol. 200 2738

    [13]

    Ma C H, Huang J H, Chen H 2002 Thin Solid Film 418 73

    [14]

    Bruker 2009 Diffrac Leptos 7 User Manual (Karlsruhe: Bruker AXS Gmbh) pp66-77

    [15]

    Sun B, Kang C Y, Li R P, Liu Z L, Tang J, Xu P S, Pan G Q 2009 Nuclear Techniq. 32 492 (in Chinese) [孙柏, 康朝阳, 李锐鹏, 刘忠良, 唐军, 徐彭寿, 潘国强 2009 核技术 32 492]

    [16]

    Dong P, Chen Y Z, Bai C M 2004 Rare Metal Materials and Engineering 33 445 (in Chinese) [董平, 陈勇忠, 柏朝茂 2004 稀有金属材料与工程 33 445]

  • [1]

    Montgomery D S, Nobile A, Walsh P J 2004 Rev. Sci. Instrum. 75 3986

    [2]

    Davydov D A, Kholopova O V, Kolbasov B N 2007 J. Nucl. Mater. 367 1079

    [3]

    Swift D C, Tierney T E, Luo S N 2005 Phys. Plasmas 12 056308

    [4]

    Kádas K, Vitos L, Johansson B 2007 Phys. Rev. B 75 035132

    [5]

    Di Y X, Ji X H, Hu M, Qin Y W, Chen J L 2006 Acta Phys. Sin. 43 5451 (in Chinese) [邸玉贤, 计欣华, 胡明, 秦玉文, 陈金龙 2006物理学报 43 5451]

    [6]

    Xu K W, Gao R S, Yu L G, He J W 1994 Acta Phys. Sin. 43 1295 (in Chinese) [徐可为, 高润生, 于莉根, 何家文 1994物理学报 43 1295]

    [7]

    Freund L B, Suresh S 2007 Thin Film Materials: Stress, Defect, Formation, and Surface Evolution (Beijing: Science Press) pp145, 264 (in Chinese) [Freund L B, Suresh S 2007薄膜材料–-应力、缺陷的形成和表面演化 (北京: 科学出版社)第145, 264页]

    [8]

    Doerner M F, Nix W D 1988 CRC Crit. Rev. Solid. State. Mater. Sci. 14 225

    [9]

    Kong D J, Zhang Y K, Chen Z G, Lu J Z, Feng A X, Ren X D, Ge T 2007 Acta Phys. Sin. 56 4056 (in Chinese) [孔德军, 张永康, 陈志刚, 鲁金忠, 冯爱新, 任旭东, 葛涛 2007物理学报 56 4056]

    [10]

    Conchon F, Renault P O, Bourhis E L, Krauss C, Goudeau P, Barthel E, Grachev S Y, Soudergard E, Rondeau V, Gy R, Lazzari R, Jupille J, Brun N 2010 Thin Solid Film 519 1563

    [11]

    Birkholz M 2006 Thin Film Analysis by X-ray Scattering (Weinheim: WILEY-VCH Verlag GmbH & Co.KgaA) pp253, 276

    [12]

    Peng J, Ji V, Seiler W, Tomescu A, Levesque A, Bouteville A 2006 Surf. Coat. Technol. 200 2738

    [13]

    Ma C H, Huang J H, Chen H 2002 Thin Solid Film 418 73

    [14]

    Bruker 2009 Diffrac Leptos 7 User Manual (Karlsruhe: Bruker AXS Gmbh) pp66-77

    [15]

    Sun B, Kang C Y, Li R P, Liu Z L, Tang J, Xu P S, Pan G Q 2009 Nuclear Techniq. 32 492 (in Chinese) [孙柏, 康朝阳, 李锐鹏, 刘忠良, 唐军, 徐彭寿, 潘国强 2009 核技术 32 492]

    [16]

    Dong P, Chen Y Z, Bai C M 2004 Rare Metal Materials and Engineering 33 445 (in Chinese) [董平, 陈勇忠, 柏朝茂 2004 稀有金属材料与工程 33 445]

计量
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  • PDF下载量:  1100
  • 被引次数: 0
出版历程
  • 收稿日期:  2012-12-12
  • 修回日期:  2013-03-26
  • 刊出日期:  2013-07-05

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