搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

硅基光源的研究进展

沈浩 李东升 杨德仁

引用本文:
Citation:

硅基光源的研究进展

沈浩, 李东升, 杨德仁

Research progress of silicon light source

Shen Hao, Li Dong-Sheng, Yang De-Ren
PDF
导出引用
  • 随着人们对大容量、高速和低成本的信息传播的要求越来越迫切, 近年来硅基光电子学得以蓬勃发展, 但硅基光源一直没有得到真正的解决, 成为制约硅基光电子学发展的瓶颈. 硅的间接带隙本质给高效硅基光源的实现带来很大困难, 实用化的硅基激光是半导体科学家长期奋斗的目标. 本文分别介绍了硅基发光材料、硅基发光二极管和硅基激光的研究进展, 最后总结了目前各种硅基光源面临的问题和未来的发展方向.
    To meet the requirements for high speed, low cost, and more information capacity, silicon photonics has been booming in recent years. Silicon photonics covers a very wide field. For the silicon photonics, researchers have successfully achieved silicon-based optical waveguides, switches, modulators, and detectors. But the problem of silicon based light source has not been really resolved, which has become a primary bottleneck for further developing the silicon photonics. The momentum of a phonon is required to allow an electron to transit from the minimum of the conduction band to the maximum of the valence band in Si because of the indirect bandgap. This two-particle process with a low probability makes it difficult to achieve high-efficiency silicon-based light source by itself. However, much effort has been made to characterize and understand the light-emission phenomena of silicon-based devices. Also, more attempts were made to enhance the emission efficiency of silicon. Practical silicon lasers are very important for silicon photonics and have been a long goal for semiconductor scientists. A number of important breakthroughs in the past decade have focused on silicon as a photonic platform thanks to the efforts of scientists. In this review, we introduce the recent progress of silicon-based luminescence materials, silicon light emitting diodes and silicon lasers. In the first part of this paper, common types of silicon-based light emitting materials, including porous silicon, silicon nanocrystals, rare earth-doped silicon, silicon defect emission, germanium on silicon and semiconducting silicides are comprehensively reviewed. Among them, the quantum effects and surface effects of low-dimensional silicon can greatly enhance the light emission efficiency. The erbium atoms in silicon-based rare earth materials can produce the light emission at communication wavelength band independently of the host. The transition from the lowest excited state to the 4f ground state yields light at 1.54 m. Moreover the emission energy is independent of the temperature due to the inner atomic transition. Group IV materials grown on silicon such as Ge and GeSn alloy can change from indirect bandgap into direct bandgap by introducing mechanically strain and modifying the component. Strong enhancement of photoluminescence and net gain emerging from the direct transition are very significant for fabricating the devices. In the second part, different light emitting diodes (LEDs) fabricated with above luminescent materials are introduced. The Si PN diodes were once popular at the earlier research stage. One approach was to modify the effective surface on high-purity single crystal silicon and the other idea was to use optically active defects in silicon. Ten years later, silicon LEDs in which the dressed-photon-phonons assisted method is used, made the Si PN diode rejuvenated. LEDs fabricated on nano-structured Si and silicon-based film were limited in the optoelectronic integration since the luminescence wavelength is not corresponding to the low-loss communication region. Although erbium-doped and Er silicate LEDs emit suitable light, their high turn-on voltage and low luminescence efficiency block the practical application. The researches of Ge-on-Si LED mainly focus on modifying the band structure by introducing strain and n-doping. In the third part, firstly we summarize the basic rules of the silicon laser. Then, we review the most recent progress in the field. Nanometer Si with periodic array can only behave unambiguous laser action using optical pumping and at very low temperature. Low threshold silicon Raman lasers with racetrack ring resonator cavities can only stop on paper also due to the difficulty in electrical pumping. The Ge-on-Si lasers operating at room temperature by optical and electrical pumping were accomplished in the past 5 years. The GeSn laser that is CMOS-compatible also came into being this year. Although so far, lasing has been implemented only by using pulsed optical pumping and stopped working at 90 K, this first demonstration of lasing in a direct-gap group IV alloy grown on standard silicon substrates is potentially an important step on the way to a platform of fully integrated silicon-based photonics. Hybrid III-V-on-Si lasers are considered as one of the most practical means due to the excellent photoelectric properties and mature preparation technology. Finally, current problems and future development direction in the silicon light source are also presented briefly.
    • 基金项目: 国家重点基础研究发展计划(批准号: 2013CB632102)资助的课题.
    • Funds: Project supported by the National Basic Research Program of China (Grant No. 2013CB632102).
    [1]

    Krishnamoorthy A V, Ho R, Zheng X, Schwetman H, Lexau J, Koka P, Li G, Shubin I, Cunningham J E 2009 Proc. IEEE 97 1337

    [2]

    Arakawa Y, Nakamura T, Urino Y, Fujita T 2013 IEEE Commun. Mag. 51 72

    [3]

    Soref R 2006 IEEE J. Sel. Top. Quant. 12 1678

    [4]

    Masini G, Colace L, Assanto G 2002 Mater. Sci. Eng. B 89 2

    [5]

    Lim A E, Song J, Fang Q, Li C, Tu X, Duan N C K, Tern R P, Liow T 2014 IEEE J. Sel. Top. Quant. 20 1

    [6]

    Mashanovich G Z, Milošević M M, Nedeljkovic M, Owens N, Xiong B, Teo E J, Hu Y 2011 Opt. Express 19 7112

    [7]

    Vlasov Y, Mcnab S 2004 Opt. Express 12 1622

    [8]

    Lee K K, Lim D R, Kimerling L C, Shin J, Cerrina F 2001 Opt. Lett. 26 1888

    [9]

    Pathak S, Yu H, van Thourhout D, Bogaerts W 2014 11th IEEE International Conference on Group IV Photonics IEEE Paris, France, August 27-29, 2014 p237

    [10]

    Yao J, Sun Z, Zhong L, Natelson D, Tour J M 2010 Nano Lett. 10 4105

    [11]

    Tanabe T, Notomi M, Mitsugi S, Shinya A, Kuramochi E 2005 Appl. Phys. Lett. 87 151112

    [12]

    Reed G T, Mashanovich G, Gardes F Y, Thomson D J 2010 Nat. Photon. 4 518

    [13]

    Liao L, Liu A, Rubin D, Basak J, Chetrit Y, Nguyen H, Cohen R, Izhaky N, Paniccia M 2007 Electron. Lett. 43 1196

    [14]

    Xu Q, Schmidt B, Pradhan S, Lipson M 2005 Nature 435 325

    [15]

    Liu A, Jones R, Liao L, Samara-Rubio D, Rubin D, Cohen O, Nicolaescu R, Paniccia M 2004 Nature 427 615

    [16]

    Oehme M, Werner J, Kasper E, Jutzi M, Berroth M 2006 Appl. Phys. Lett. 89 71117

    [17]

    Yu Z, Aceves-Mijares M 2009 Appl. Phys. Lett. 95 81101

    [18]

    Michel J, Liu J, Kimerling L C 2010 Nat. Photon. 4 527

    [19]

    Rong H, Liu A, Jones R, Cohen O, Hak D, Nicolaescu R, Fang A, Paniccia M 2005 Nature 433 292

    [20]

    Rong H, Jones R, Liu A, Cohen O, Hak D, Fang A, Paniccia M 2005 Nature 433 725

    [21]

    Camacho-Aguilera R E, Cai Y, Patel N, Bessette J T, Romagnoli M, Kimerling L C, Michel J 2012 Opt. Express 20 11316

    [22]

    Liu J, Sun X, Camacho-Aguilera R, Kimerling L C, Michel J 2010 Opt. Lett. 35 679

    [23]

    Wirths S, Geiger R, von den Driesch N, Mussler G, Stoica T, Mantl S, Ikonic Z, Luysberg M, Chiussi S, Hartmann J M 2015 Nat. Photon. 9 88

    [24]

    Chen S M, Tang M C, Wu J, Jiang Q, Dorogan V G, Benamara M, Mazur Y I, Salamo G J, Seeds A J, Liu H 2014 Electron. Lett. 50 1467

    [25]

    Justice J, Bower C, Meitl M, Mooney M B, Gubbins M A, Corbett B 2012 Nat. Photon. 6 610

    [26]

    Yang H, Zhao D, Chuwongin S, Seo J, Yang W, Shuai Y, Berggren J, Hammar M, Ma Z, Zhou W 2012 Nat. Photon. 6 615

    [27]

    Liu H, Wang T, Jiang Q, Hogg R, Tutu F, Pozzi F, Seeds A 2011 Nat. Photon. 5 416

    [28]

    Chen R, Tran T D, Ng K W, Ko W S, Chuang L C, Sedgwick F G, Chang-Hasnain C 2011 Nat. Photon. 5 170

    [29]

    Canham L T 1990 Appl. Phys. Lett. 57 1046

    [30]

    Jung K H, Shih S, Kwong D L 1993 J. Electrochem. Soc. 140 3046

    [31]

    Cullis A G 1991 Nature 353 335

    [32]

    Cullis A G, Canham L T, Calcott P D J 1997 J. Appl. Phys. 82 909

    [33]

    Buda F, Kohanoff J, Parrinello M 1992 Phys. Rev. Lett. 69 1272

    [34]

    Prokes S M 1993 Appl. Phys. Lett. 62 3244

    [35]

    Qin G G, Jia Y Q 1993 Solid State Commun. 86 559

    [36]

    Pi X, Chen X, Yang D 2011 J. Phys. Chem. C 115 9838

    [37]

    Chen X, Pi X, Yang D 2010 J. Phys. Chem. C 115 661

    [38]

    Ma Y, Chen X, Pi X, Yang D 2012 J. Nanopart. Res. 14 1

    [39]

    Chen X, Pi X, Yang D 2011 Appl. Phys. Lett. 99 193108

    [40]

    Wang R, Pi X, Yang D 2013 Phys. Chem. Chem. Phys. 15 1815

    [41]

    Ma Y, Pi X, Yang D 2012 J. Phys. Chem. C 116 5401

    [42]

    Ni Z, Pi X, Yang D 2012 RSC Adv. 2 11227

    [43]

    Ma Y, Chen X, Pi X, Yang D 2011 J. Phys. Chem. C 115 12822

    [44]

    Pi X, Chen X, Ma Y, Yang D 2011 Nanoscale 3 4584

    [45]

    Pi X D, Wang R 2014 Chin. Phys. B 23 076102

    [46]

    Wang R, Pi X, Yang D 2012 J. Phys. Chem. C 116 19434

    [47]

    Valenta J, Juhasz R, Linnros J 2002 Appl. Phys. Lett. 80 1070

    [48]

    Priolo F, Gregorkiewicz T, Galli M, Krauss T F 2014 Nat. Nanotechnol. 9 19

    [49]

    Wang Y Q, Smirani R, Ross G G 2004 Nanotechnology 15 1554

    [50]

    Pei Z, Su A Y, Hwang H L, Hsiao H L 2005 Appl. Phys. Lett. 86 63503

    [51]

    Kim T, Park N, Kim K, Sung G Y, Ok Y, Seong T, Choi C 2004 Appl. Phys. Lett. 85 5355

    [52]

    Kang Z T, Arnold B, Summers C J, Wagner B K 2006 Nanotechnology 17 4477

    [53]

    Orii T, Hirasawa M, Seto T 2003 Appl. Phys. Lett. 83 3395

    [54]

    Zacharias M, Heitmann J, Scholz R, Kahler U, Schmidt M, Bläsing J 2002 Appl. Phys. Lett. 80 661

    [55]

    Rui Y, Li S, Xu J, Song C, Jiang X, Li W, Chen K, Wang Q, Zuo Y 2011 J. Appl. Phys. 110 64322

    [56]

    Lin G, Pai Y, Lin C, Chen C 2010 Appl. Phys. Lett. 96 263514

    [57]

    Ennen H, Pomrenke G, Axmann A, Eisele K, Haydl W, Schneider J 1985 Appl. Phys. Lett. 46 381

    [58]

    Ennen H 1983 Appl. Phys. Lett. 43 943

    [59]

    Adeola G W, Rinnert H, Miska P, Vergnat M 2007 J. Appl. Phys. 102 53515

    [60]

    Taguchi A, Takahei K 1998 J. Appl. Phys. 83 2800

    [61]

    Priolo F, Franzò G, Pacifici D, Vinciguerra V, Iacona F, Irrera A 2001 J. Appl. Phys. 89 264

    [62]

    Kenyon A J, Trwoga P F, Federighi M, Pitt C W 1994 J. Phys.: Condens. Matter 6 L319

    [63]

    Jambois O, Gourbilleau F, Kenyon A J, Montserrat J, Rizk R, Garrido B 2010 Opt. Express 18 2230

    [64]

    Ramírez J M, Cueff S, Berencén Y, Labbé C, Garrido B 2014 J. Appl. Phys. 116 83103

    [65]

    Xu L, Jin L, Li D, Yang D 2013 Appl. Phys. Lett. 103 71101

    [66]

    Garrido B, García C, Seo S Y, Pellegrino P, Navarro-Urrios D, Daldosso N, Pavesi L, Gourbilleau F, Rizk R 2007 Phys. Rev. B 76

    [67]

    de Dood M J A, Knoester J, Tip A, Polman A 2005 Phys. Rev. B 71 115102

    [68]

    Savchyn O, Ruhge F R, Kik P G, Todi R M, Coffey K R, Nukala H, Heinrich H 2007 Phys. Rev. B 76 195419

    [69]

    Kanjilal A, Rebohle L, Voelskow M, Skorupa W, Helm M 2008 J. Appl. Phys. 104 103522

    [70]

    Jin L, Li D, Xiang L, Wang F, Yang D, Que D 2013 Nanoscale Res. Lett. 8 366

    [71]

    Yerci S, Li R, Kucheyev S O, van Buuren T, Basu S N, Dal Negro L 2010 IEEE J. Sel. Top. Quant. 16 114

    [72]

    Steveler E, Rinnert H, Devaux X, Dossot M, Vergnat M 2010 Appl. Phys. Lett. 97 221902

    [73]

    Miritello M, Lo Savio R, Iacona F, Franzò G, Irrera A, Piro A M, Bongiorno C, Priolo F 2007 Adv. Mater. 19 1582

    [74]

    Isshiki H, de Dood M J A, Polman A, Kimura T 2004 Appl. Phys. Lett. 85 4343

    [75]

    Wang X J, Wang B, Wang L, Guo R M, Isshiki H, Kimura T, Zhou Z 2011 Appl. Phys. Lett. 98 71903

    [76]

    Wang X J, Yuan G, Isshiki H, Kimura T, Zhou Z 2010 J. Appl. Phys. 108 13506

    [77]

    Wang L, Guo R, Wang B, Wang X, Zhou Z 2012 IEEE Photon. Technol. Lett. 24 900

    [78]

    Yin L, Ning H, Turkdogan S, Liu Z, Ning C 2012 CLEO: Science and Innovations California, United States, May 5-12, 2012 h3D-h4D

    [79]

    Lo Savio R, Miritello M, Piro A M, Priolo F, Iacona F 2008 Appl. Phys. Lett. 93 21919

    [80]

    Liu Z, Zhao G, Yin L, Ning C Z 2014 CLEO: Science and Innovations California, United States, May 4-9, 2014 M4H

    [81]

    Tajima M, Kamata Y 2013 Jpn. J. Appl. Phys. 52 86602

    [82]

    Milosavljević M, Lourenço M A, Gwilliam R M, Homewood K P 2011 J. Appl. Phys. 110 33508

    [83]

    Yu X, Song L, Yang D, Kittler M, Rozgonyi G A 2010 Appl. Phys. Lett. 96 211120

    [84]

    Kveder V, Badylevich M, Schrter W, Seibt M, Steinman E, Izotov A 2005 Phys. Status Solidi A 202 901

    [85]

    Kveder V, Badylevich M, Steinman E, Izotov A, Seibt M, Schroter W 2004 Appl. Phys. Lett. 84 2106

    [86]

    Ng W L, Lourenco M A, Gwilliam R M, Ledain S, Shao G, Homewood K P 2001 Nature 410 192

    [87]

    Xiang L, Li D, Jin L, Wang S, Yang D 2013 J. Appl. Phys. 113 33518

    [88]

    Xiang L, Li D, Jin L, Pivac B, Yang D 2012 J. Appl. Phys. 112 63528

    [89]

    Xiang L, Li D, Jin L, Yang D 2012 Solid State Commun. 152 1956

    [90]

    Kawazoe T, Mueed M A, Ohtsu M 2011 Appl. Phys. B 104 747

    [91]

    Liu J, Sun X, Pan D, Wang X, Kimerling L C, Koch T L, Michel J 2007 Opt. Express 15 11272

    [92]

    Liu J, Cannon D D, Wada K, Ishikawa Y, Danielson D T, Jongthammanurak S, Michel J, Kimerling L C 2004 Phys. Rev. B 70 155309

    [93]

    Sun X, Liu J, Kimerling L C, Michel J 2009 Appl. Phys. Lett. 95 11911

    [94]

    Kouvetakis J, Kouvetakis J, Tolle J, Tolle J, Menendez J, Menendez J D, Costa V R D 2007 4th IEEE International Conference on Group IV Photonics IEEE Tokyo, Japan, September 19-21, 2007 p1

    [95]

    Soref R, Kouvetakis J, Tolle J, Menendez J, D Costa V 2007 J. Mater. Res. 22 3281

    [96]

    Sturm J C 1998 MRS Bull. 23 60

    [97]

    He G, Atwater H A 1997 Phys. Rev. Lett. 79 1937

    [98]

    Filonov A B, Migas D B, Shaposhnikov V L, Borisenko V E, Henrion W, Rebien M, Stauss P, Lange H, Behr G 1998 J. Appl. Phys. 83 4410

    [99]

    Lange H 1997 Phys. Status Solidi B 201 3

    [100]

    Leong D, Harry M, Reeson K J, Homewood K P 1997 Nature 387 686

    [101]

    Green M A, Zhao J, Wang A, Reece P J, Gal M 2001 Nature 412 805

    [102]

    Lourenco M A, Milosavljevic M, Gwilliam R M, Homewood K P, Shao G 2005 Appl. Phys. Lett. 87 201105

    [103]

    Yamaguchi M, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 119

    [104]

    Motoichi O 2012 Nanophotonics 1 83

    [105]

    Wada N, Tran M A, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 113

    [106]

    Tran M A, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 105

    [107]

    Loni A, Simons A J, Cox T I, Calcott P, Canham L T 1995 Electron. Lett. 31 1288

    [108]

    Hirschman K D, Tsybeskov L, Duttagupta S P, Fauchet P M 1996 Nature 384 338

    [109]

    Cheng K, Anthony R, Kortshagen U R, Holmes R J 2011 Nano Lett. 11 1952

    [110]

    Maier-Flaig F, Rinck J, Stephan M, Bocksrocker T, Bruns M, Kbel C, Powell A K, Ozin G A, Lemmer U 2013 Nano Lett. 13 475

    [111]

    Anopchenko A, Marconi A, Wang M, Pucker G, Bellutti P, Pavesi L 2011 Appl. Phys. Lett. 99 181108

    [112]

    Berencn Y, Carreras J, Jambois O, Ramrez J M, Rodrguez J A, Domnguez C, Hunt C E, Garrido B 2011 Opt. Express 19 A234

    [113]

    Huh C, Kim K H, Kim B K, Kim W, Ko H, Choi C J, Sung G Y 2010 Adv. Mater. 22 5058

    [114]

    Vaccaro L, Cannas M, Radzig V, Boscaino R 2008 Phys. Rev. B 78 75421

    [115]

    Skuja L 1998 J. Non-Cryst. Solids 239 16

    [116]

    Kim H B, Kim T G, Son J H, Whang C N, Chae K H, Lee W S, Im S, Song J H 2000 J. Appl. Phys. 88 1851

    [117]

    Juvert J, Gonzalez Fernandez A A, Morales-Snchez A, Barreto J, Aceves M, Llobera A, Domnguez C 2013 J. Lightwave Technol. 31 2913

    [118]

    Robertson J, Powell M J 1984 Appl. Phys. Lett. 44 415

    [119]

    Kistner J, Chen X, Weng Y, Strunk H P, Schubert M B, Werner J H 2011 J. Appl. Phys. 110 23520

    [120]

    Huang R, Wang D Q, Ding H L, Wang X, Chen K J, Xu J, Guo Y Q, Song J, Ma Z Y 2010 Opt. Express 18 1144

    [121]

    Cen Z H, Chen T P, Liu Z, Liu Y, Ding L, Yang M, Wong J I, Yu S F, Goh W P 2010 Opt. Express 18 20439

    [122]

    Pei Z, Chang Y R, Hwang H L 2002 Appl. Phys. Lett. 80 2839

    [123]

    Li D, Wang F, Yang D, Que D 2012 Opt. Express 20 17359

    [124]

    Wang F, Li D, Yang D, Que D 2012 Nanoscale Res. Lett. 7 669

    [125]

    Li D, Wang F, Yang D 2013 Nanoscale 5 3435

    [126]

    Wang F, Li D, Yang D, Que D 2013 Opt. Express 21 846

    [127]

    Wang F, Li D, Jin L, Ren C, Yang D, Que D 2013 Opt. Lett. 38 2832

    [128]

    Wang F, Li D, Yang D, Que D 2012 Appl. Phys. Lett. 100 31113

    [129]

    Wang F, Li D, Jin L, Ren C, Yang D, Que D 2013 Opt. Express 21 1675

    [130]

    Monroy B M, Crgut O, Gallart M, Hnerlage B, Gilliot P 2011 Appl. Phys. Lett. 98 261108

    [131]

    Ramírez J M, Ferrarese Lupi F, Jambois O, Berencén Y, Navarro-Urrios D, Anopchenko A, Marconi A, Prtljaga N, Tengattini A, Pavesi L, Colonna J P, Fedeli J M, Garrido B 2012 Nanotechnology 23 125203

    [132]

    Irrera A, Iacona F, Franzó G, Miritello M, Lo Savio R, Castagna M E, Coffa S, Priolo F 2010 J. Appl. Phys. 107 54302

    [133]

    Rebohle L, Berencén Y, Wutzler R, Braun M, Hiller D, Ramírez J M, Garrido B, Helm M, Skorupa W 2014 J. Appl. Phys. 116 123104

    [134]

    Yerci S, Li R, Dal Negro L 2010 Appl. Phys. Lett. 97 81109

    [135]

    Cueff S, Manel Ramiírez J, Kurvits J A, Berencén Y, Zia R, Garrido B, Rizk R, Labbé C 2013 Appl. Phys. Lett. 103 191109

    [136]

    Yin Y, Xu W J, Wei F, Ran G Z, Qin G G, Shi Y F, Yao Q G, Yao S D 2010 J. Phys. D: Appl. Phys. 43 335102

    [137]

    Wang B, Guo R M, Wang X J, Wang L, Hong L Y, Yin B, Gao L F, Zhou Z 2012 Opt. Mater. 34 1371

    [138]

    Yin Y, Sun K, Xu W J, Ran G Z, Qin G G, Wang S M, Wang C Q 2009 J. Phys.: Condens. Matterr 21 12204

    [139]

    Luan H, Lim D R, Lee K K, Chen K M, Sandland J G, Wada K, Kimerling L C 1999 Appl. Phys. Lett. 75 2909

    [140]

    Sun X, Liu J, Kimerling L C, Michel J 2009 Opt. Lett. 34 1198

    [141]

    Cheng S, Lu J, Shambat G, Yu H, Saraswat K, Vuckovic J, Nishi Y 2009 Opt. Express 17 10019

    [142]

    Hu W, Cheng B, Xue C, Xue H, Su S, Bai A, Luo L, Yu Y, Wang Q 2009 Appl. Phys. Lett. 95 92102

    [143]

    Liu Z, Hu W, Li C, Li Y, Xue C, Li C, Zuo Y, Cheng B, Wang Q 2012 Appl. Phys. Lett. 101 231108

    [144]

    Liu Z, Hu W, Su S, Li C, Li C, Xue C, Li Y, Zuo Y, Cheng B, Wang Q 2012 Opt. Express 20 22327

    [145]

    Pavesi L, Dal Negro L, Mazzoleni C, Franzo G, Priolo F 2000 Nature 408 440

    [146]

    Cloutier S G, Kossyrev P A, Xu J 2005 Nat. Mater. 4 887

    [147]

    Rong H, Xu S, Kuo Y, Sih V, Cohen O, Raday O, Paniccia M 2007 Nat. Photon. 1 232

    [148]

    Samuel I D, Namdas E B, Turnbull G A 2009 Nat. Photon. 3 546

    [149]

    Tanabe K, Watanabe K, Arakawa Y 2012 Sci. Rep. 2 349

    [150]

    Tanabe K, Guimard D, Bordel D, Iwamoto S, Arakawa Y 2010 Opt. Express 18 10604

    [151]

    Liang D, Fiorentino M, Okumura T, Chang H, Spencer D T, Kuo Y, Fang A W, Dai D, Beausoleil R G, Bowers J E 2009 Opt. Express 17 20355

    [152]

    Fang A W, Lively E, Kuo Y, Liang D, Bowers J E 2008 Opt. Express 16 4413

    [153]

    Liang D, Bowers J E 2008 J. Vac. Sci. Technol. B 26 1560

    [154]

    van Campenhout J, Rojo Romeo P, Regreny P, Seassal C, van Thourhout D, Verstuyft S, Di Cioccio L, Fedeli J, Lagahe C, Baets R 2007 Opt. Express 15 6744

    [155]

    Fang A W, Park H, Cohen O, Jones R, Paniccia M J, Bowers J E 2006 Opt. Express 14 9203

    [156]

    Roelkens G, van Thourhout D, Baets R, Smit M 2006 Opt. Express 14 8154

    [157]

    Mi Z, Bhattacharya P, Yang J, Pipe K P 2005 Electron. Lett. 41 742

    [158]

    Chen S M, Tang M C, Wu J, Jiang Q, Dorogan V G, Benamara M, Mazur Y I, Salamo G J, Seeds A J, Liu H 2014 Electron. Lett. 50 1467

  • [1]

    Krishnamoorthy A V, Ho R, Zheng X, Schwetman H, Lexau J, Koka P, Li G, Shubin I, Cunningham J E 2009 Proc. IEEE 97 1337

    [2]

    Arakawa Y, Nakamura T, Urino Y, Fujita T 2013 IEEE Commun. Mag. 51 72

    [3]

    Soref R 2006 IEEE J. Sel. Top. Quant. 12 1678

    [4]

    Masini G, Colace L, Assanto G 2002 Mater. Sci. Eng. B 89 2

    [5]

    Lim A E, Song J, Fang Q, Li C, Tu X, Duan N C K, Tern R P, Liow T 2014 IEEE J. Sel. Top. Quant. 20 1

    [6]

    Mashanovich G Z, Milošević M M, Nedeljkovic M, Owens N, Xiong B, Teo E J, Hu Y 2011 Opt. Express 19 7112

    [7]

    Vlasov Y, Mcnab S 2004 Opt. Express 12 1622

    [8]

    Lee K K, Lim D R, Kimerling L C, Shin J, Cerrina F 2001 Opt. Lett. 26 1888

    [9]

    Pathak S, Yu H, van Thourhout D, Bogaerts W 2014 11th IEEE International Conference on Group IV Photonics IEEE Paris, France, August 27-29, 2014 p237

    [10]

    Yao J, Sun Z, Zhong L, Natelson D, Tour J M 2010 Nano Lett. 10 4105

    [11]

    Tanabe T, Notomi M, Mitsugi S, Shinya A, Kuramochi E 2005 Appl. Phys. Lett. 87 151112

    [12]

    Reed G T, Mashanovich G, Gardes F Y, Thomson D J 2010 Nat. Photon. 4 518

    [13]

    Liao L, Liu A, Rubin D, Basak J, Chetrit Y, Nguyen H, Cohen R, Izhaky N, Paniccia M 2007 Electron. Lett. 43 1196

    [14]

    Xu Q, Schmidt B, Pradhan S, Lipson M 2005 Nature 435 325

    [15]

    Liu A, Jones R, Liao L, Samara-Rubio D, Rubin D, Cohen O, Nicolaescu R, Paniccia M 2004 Nature 427 615

    [16]

    Oehme M, Werner J, Kasper E, Jutzi M, Berroth M 2006 Appl. Phys. Lett. 89 71117

    [17]

    Yu Z, Aceves-Mijares M 2009 Appl. Phys. Lett. 95 81101

    [18]

    Michel J, Liu J, Kimerling L C 2010 Nat. Photon. 4 527

    [19]

    Rong H, Liu A, Jones R, Cohen O, Hak D, Nicolaescu R, Fang A, Paniccia M 2005 Nature 433 292

    [20]

    Rong H, Jones R, Liu A, Cohen O, Hak D, Fang A, Paniccia M 2005 Nature 433 725

    [21]

    Camacho-Aguilera R E, Cai Y, Patel N, Bessette J T, Romagnoli M, Kimerling L C, Michel J 2012 Opt. Express 20 11316

    [22]

    Liu J, Sun X, Camacho-Aguilera R, Kimerling L C, Michel J 2010 Opt. Lett. 35 679

    [23]

    Wirths S, Geiger R, von den Driesch N, Mussler G, Stoica T, Mantl S, Ikonic Z, Luysberg M, Chiussi S, Hartmann J M 2015 Nat. Photon. 9 88

    [24]

    Chen S M, Tang M C, Wu J, Jiang Q, Dorogan V G, Benamara M, Mazur Y I, Salamo G J, Seeds A J, Liu H 2014 Electron. Lett. 50 1467

    [25]

    Justice J, Bower C, Meitl M, Mooney M B, Gubbins M A, Corbett B 2012 Nat. Photon. 6 610

    [26]

    Yang H, Zhao D, Chuwongin S, Seo J, Yang W, Shuai Y, Berggren J, Hammar M, Ma Z, Zhou W 2012 Nat. Photon. 6 615

    [27]

    Liu H, Wang T, Jiang Q, Hogg R, Tutu F, Pozzi F, Seeds A 2011 Nat. Photon. 5 416

    [28]

    Chen R, Tran T D, Ng K W, Ko W S, Chuang L C, Sedgwick F G, Chang-Hasnain C 2011 Nat. Photon. 5 170

    [29]

    Canham L T 1990 Appl. Phys. Lett. 57 1046

    [30]

    Jung K H, Shih S, Kwong D L 1993 J. Electrochem. Soc. 140 3046

    [31]

    Cullis A G 1991 Nature 353 335

    [32]

    Cullis A G, Canham L T, Calcott P D J 1997 J. Appl. Phys. 82 909

    [33]

    Buda F, Kohanoff J, Parrinello M 1992 Phys. Rev. Lett. 69 1272

    [34]

    Prokes S M 1993 Appl. Phys. Lett. 62 3244

    [35]

    Qin G G, Jia Y Q 1993 Solid State Commun. 86 559

    [36]

    Pi X, Chen X, Yang D 2011 J. Phys. Chem. C 115 9838

    [37]

    Chen X, Pi X, Yang D 2010 J. Phys. Chem. C 115 661

    [38]

    Ma Y, Chen X, Pi X, Yang D 2012 J. Nanopart. Res. 14 1

    [39]

    Chen X, Pi X, Yang D 2011 Appl. Phys. Lett. 99 193108

    [40]

    Wang R, Pi X, Yang D 2013 Phys. Chem. Chem. Phys. 15 1815

    [41]

    Ma Y, Pi X, Yang D 2012 J. Phys. Chem. C 116 5401

    [42]

    Ni Z, Pi X, Yang D 2012 RSC Adv. 2 11227

    [43]

    Ma Y, Chen X, Pi X, Yang D 2011 J. Phys. Chem. C 115 12822

    [44]

    Pi X, Chen X, Ma Y, Yang D 2011 Nanoscale 3 4584

    [45]

    Pi X D, Wang R 2014 Chin. Phys. B 23 076102

    [46]

    Wang R, Pi X, Yang D 2012 J. Phys. Chem. C 116 19434

    [47]

    Valenta J, Juhasz R, Linnros J 2002 Appl. Phys. Lett. 80 1070

    [48]

    Priolo F, Gregorkiewicz T, Galli M, Krauss T F 2014 Nat. Nanotechnol. 9 19

    [49]

    Wang Y Q, Smirani R, Ross G G 2004 Nanotechnology 15 1554

    [50]

    Pei Z, Su A Y, Hwang H L, Hsiao H L 2005 Appl. Phys. Lett. 86 63503

    [51]

    Kim T, Park N, Kim K, Sung G Y, Ok Y, Seong T, Choi C 2004 Appl. Phys. Lett. 85 5355

    [52]

    Kang Z T, Arnold B, Summers C J, Wagner B K 2006 Nanotechnology 17 4477

    [53]

    Orii T, Hirasawa M, Seto T 2003 Appl. Phys. Lett. 83 3395

    [54]

    Zacharias M, Heitmann J, Scholz R, Kahler U, Schmidt M, Bläsing J 2002 Appl. Phys. Lett. 80 661

    [55]

    Rui Y, Li S, Xu J, Song C, Jiang X, Li W, Chen K, Wang Q, Zuo Y 2011 J. Appl. Phys. 110 64322

    [56]

    Lin G, Pai Y, Lin C, Chen C 2010 Appl. Phys. Lett. 96 263514

    [57]

    Ennen H, Pomrenke G, Axmann A, Eisele K, Haydl W, Schneider J 1985 Appl. Phys. Lett. 46 381

    [58]

    Ennen H 1983 Appl. Phys. Lett. 43 943

    [59]

    Adeola G W, Rinnert H, Miska P, Vergnat M 2007 J. Appl. Phys. 102 53515

    [60]

    Taguchi A, Takahei K 1998 J. Appl. Phys. 83 2800

    [61]

    Priolo F, Franzò G, Pacifici D, Vinciguerra V, Iacona F, Irrera A 2001 J. Appl. Phys. 89 264

    [62]

    Kenyon A J, Trwoga P F, Federighi M, Pitt C W 1994 J. Phys.: Condens. Matter 6 L319

    [63]

    Jambois O, Gourbilleau F, Kenyon A J, Montserrat J, Rizk R, Garrido B 2010 Opt. Express 18 2230

    [64]

    Ramírez J M, Cueff S, Berencén Y, Labbé C, Garrido B 2014 J. Appl. Phys. 116 83103

    [65]

    Xu L, Jin L, Li D, Yang D 2013 Appl. Phys. Lett. 103 71101

    [66]

    Garrido B, García C, Seo S Y, Pellegrino P, Navarro-Urrios D, Daldosso N, Pavesi L, Gourbilleau F, Rizk R 2007 Phys. Rev. B 76

    [67]

    de Dood M J A, Knoester J, Tip A, Polman A 2005 Phys. Rev. B 71 115102

    [68]

    Savchyn O, Ruhge F R, Kik P G, Todi R M, Coffey K R, Nukala H, Heinrich H 2007 Phys. Rev. B 76 195419

    [69]

    Kanjilal A, Rebohle L, Voelskow M, Skorupa W, Helm M 2008 J. Appl. Phys. 104 103522

    [70]

    Jin L, Li D, Xiang L, Wang F, Yang D, Que D 2013 Nanoscale Res. Lett. 8 366

    [71]

    Yerci S, Li R, Kucheyev S O, van Buuren T, Basu S N, Dal Negro L 2010 IEEE J. Sel. Top. Quant. 16 114

    [72]

    Steveler E, Rinnert H, Devaux X, Dossot M, Vergnat M 2010 Appl. Phys. Lett. 97 221902

    [73]

    Miritello M, Lo Savio R, Iacona F, Franzò G, Irrera A, Piro A M, Bongiorno C, Priolo F 2007 Adv. Mater. 19 1582

    [74]

    Isshiki H, de Dood M J A, Polman A, Kimura T 2004 Appl. Phys. Lett. 85 4343

    [75]

    Wang X J, Wang B, Wang L, Guo R M, Isshiki H, Kimura T, Zhou Z 2011 Appl. Phys. Lett. 98 71903

    [76]

    Wang X J, Yuan G, Isshiki H, Kimura T, Zhou Z 2010 J. Appl. Phys. 108 13506

    [77]

    Wang L, Guo R, Wang B, Wang X, Zhou Z 2012 IEEE Photon. Technol. Lett. 24 900

    [78]

    Yin L, Ning H, Turkdogan S, Liu Z, Ning C 2012 CLEO: Science and Innovations California, United States, May 5-12, 2012 h3D-h4D

    [79]

    Lo Savio R, Miritello M, Piro A M, Priolo F, Iacona F 2008 Appl. Phys. Lett. 93 21919

    [80]

    Liu Z, Zhao G, Yin L, Ning C Z 2014 CLEO: Science and Innovations California, United States, May 4-9, 2014 M4H

    [81]

    Tajima M, Kamata Y 2013 Jpn. J. Appl. Phys. 52 86602

    [82]

    Milosavljević M, Lourenço M A, Gwilliam R M, Homewood K P 2011 J. Appl. Phys. 110 33508

    [83]

    Yu X, Song L, Yang D, Kittler M, Rozgonyi G A 2010 Appl. Phys. Lett. 96 211120

    [84]

    Kveder V, Badylevich M, Schrter W, Seibt M, Steinman E, Izotov A 2005 Phys. Status Solidi A 202 901

    [85]

    Kveder V, Badylevich M, Steinman E, Izotov A, Seibt M, Schroter W 2004 Appl. Phys. Lett. 84 2106

    [86]

    Ng W L, Lourenco M A, Gwilliam R M, Ledain S, Shao G, Homewood K P 2001 Nature 410 192

    [87]

    Xiang L, Li D, Jin L, Wang S, Yang D 2013 J. Appl. Phys. 113 33518

    [88]

    Xiang L, Li D, Jin L, Pivac B, Yang D 2012 J. Appl. Phys. 112 63528

    [89]

    Xiang L, Li D, Jin L, Yang D 2012 Solid State Commun. 152 1956

    [90]

    Kawazoe T, Mueed M A, Ohtsu M 2011 Appl. Phys. B 104 747

    [91]

    Liu J, Sun X, Pan D, Wang X, Kimerling L C, Koch T L, Michel J 2007 Opt. Express 15 11272

    [92]

    Liu J, Cannon D D, Wada K, Ishikawa Y, Danielson D T, Jongthammanurak S, Michel J, Kimerling L C 2004 Phys. Rev. B 70 155309

    [93]

    Sun X, Liu J, Kimerling L C, Michel J 2009 Appl. Phys. Lett. 95 11911

    [94]

    Kouvetakis J, Kouvetakis J, Tolle J, Tolle J, Menendez J, Menendez J D, Costa V R D 2007 4th IEEE International Conference on Group IV Photonics IEEE Tokyo, Japan, September 19-21, 2007 p1

    [95]

    Soref R, Kouvetakis J, Tolle J, Menendez J, D Costa V 2007 J. Mater. Res. 22 3281

    [96]

    Sturm J C 1998 MRS Bull. 23 60

    [97]

    He G, Atwater H A 1997 Phys. Rev. Lett. 79 1937

    [98]

    Filonov A B, Migas D B, Shaposhnikov V L, Borisenko V E, Henrion W, Rebien M, Stauss P, Lange H, Behr G 1998 J. Appl. Phys. 83 4410

    [99]

    Lange H 1997 Phys. Status Solidi B 201 3

    [100]

    Leong D, Harry M, Reeson K J, Homewood K P 1997 Nature 387 686

    [101]

    Green M A, Zhao J, Wang A, Reece P J, Gal M 2001 Nature 412 805

    [102]

    Lourenco M A, Milosavljevic M, Gwilliam R M, Homewood K P, Shao G 2005 Appl. Phys. Lett. 87 201105

    [103]

    Yamaguchi M, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 119

    [104]

    Motoichi O 2012 Nanophotonics 1 83

    [105]

    Wada N, Tran M A, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 113

    [106]

    Tran M A, Kawazoe T, Ohtsu M 2014 Appl. Phys. A 115 105

    [107]

    Loni A, Simons A J, Cox T I, Calcott P, Canham L T 1995 Electron. Lett. 31 1288

    [108]

    Hirschman K D, Tsybeskov L, Duttagupta S P, Fauchet P M 1996 Nature 384 338

    [109]

    Cheng K, Anthony R, Kortshagen U R, Holmes R J 2011 Nano Lett. 11 1952

    [110]

    Maier-Flaig F, Rinck J, Stephan M, Bocksrocker T, Bruns M, Kbel C, Powell A K, Ozin G A, Lemmer U 2013 Nano Lett. 13 475

    [111]

    Anopchenko A, Marconi A, Wang M, Pucker G, Bellutti P, Pavesi L 2011 Appl. Phys. Lett. 99 181108

    [112]

    Berencn Y, Carreras J, Jambois O, Ramrez J M, Rodrguez J A, Domnguez C, Hunt C E, Garrido B 2011 Opt. Express 19 A234

    [113]

    Huh C, Kim K H, Kim B K, Kim W, Ko H, Choi C J, Sung G Y 2010 Adv. Mater. 22 5058

    [114]

    Vaccaro L, Cannas M, Radzig V, Boscaino R 2008 Phys. Rev. B 78 75421

    [115]

    Skuja L 1998 J. Non-Cryst. Solids 239 16

    [116]

    Kim H B, Kim T G, Son J H, Whang C N, Chae K H, Lee W S, Im S, Song J H 2000 J. Appl. Phys. 88 1851

    [117]

    Juvert J, Gonzalez Fernandez A A, Morales-Snchez A, Barreto J, Aceves M, Llobera A, Domnguez C 2013 J. Lightwave Technol. 31 2913

    [118]

    Robertson J, Powell M J 1984 Appl. Phys. Lett. 44 415

    [119]

    Kistner J, Chen X, Weng Y, Strunk H P, Schubert M B, Werner J H 2011 J. Appl. Phys. 110 23520

    [120]

    Huang R, Wang D Q, Ding H L, Wang X, Chen K J, Xu J, Guo Y Q, Song J, Ma Z Y 2010 Opt. Express 18 1144

    [121]

    Cen Z H, Chen T P, Liu Z, Liu Y, Ding L, Yang M, Wong J I, Yu S F, Goh W P 2010 Opt. Express 18 20439

    [122]

    Pei Z, Chang Y R, Hwang H L 2002 Appl. Phys. Lett. 80 2839

    [123]

    Li D, Wang F, Yang D, Que D 2012 Opt. Express 20 17359

    [124]

    Wang F, Li D, Yang D, Que D 2012 Nanoscale Res. Lett. 7 669

    [125]

    Li D, Wang F, Yang D 2013 Nanoscale 5 3435

    [126]

    Wang F, Li D, Yang D, Que D 2013 Opt. Express 21 846

    [127]

    Wang F, Li D, Jin L, Ren C, Yang D, Que D 2013 Opt. Lett. 38 2832

    [128]

    Wang F, Li D, Yang D, Que D 2012 Appl. Phys. Lett. 100 31113

    [129]

    Wang F, Li D, Jin L, Ren C, Yang D, Que D 2013 Opt. Express 21 1675

    [130]

    Monroy B M, Crgut O, Gallart M, Hnerlage B, Gilliot P 2011 Appl. Phys. Lett. 98 261108

    [131]

    Ramírez J M, Ferrarese Lupi F, Jambois O, Berencén Y, Navarro-Urrios D, Anopchenko A, Marconi A, Prtljaga N, Tengattini A, Pavesi L, Colonna J P, Fedeli J M, Garrido B 2012 Nanotechnology 23 125203

    [132]

    Irrera A, Iacona F, Franzó G, Miritello M, Lo Savio R, Castagna M E, Coffa S, Priolo F 2010 J. Appl. Phys. 107 54302

    [133]

    Rebohle L, Berencén Y, Wutzler R, Braun M, Hiller D, Ramírez J M, Garrido B, Helm M, Skorupa W 2014 J. Appl. Phys. 116 123104

    [134]

    Yerci S, Li R, Dal Negro L 2010 Appl. Phys. Lett. 97 81109

    [135]

    Cueff S, Manel Ramiírez J, Kurvits J A, Berencén Y, Zia R, Garrido B, Rizk R, Labbé C 2013 Appl. Phys. Lett. 103 191109

    [136]

    Yin Y, Xu W J, Wei F, Ran G Z, Qin G G, Shi Y F, Yao Q G, Yao S D 2010 J. Phys. D: Appl. Phys. 43 335102

    [137]

    Wang B, Guo R M, Wang X J, Wang L, Hong L Y, Yin B, Gao L F, Zhou Z 2012 Opt. Mater. 34 1371

    [138]

    Yin Y, Sun K, Xu W J, Ran G Z, Qin G G, Wang S M, Wang C Q 2009 J. Phys.: Condens. Matterr 21 12204

    [139]

    Luan H, Lim D R, Lee K K, Chen K M, Sandland J G, Wada K, Kimerling L C 1999 Appl. Phys. Lett. 75 2909

    [140]

    Sun X, Liu J, Kimerling L C, Michel J 2009 Opt. Lett. 34 1198

    [141]

    Cheng S, Lu J, Shambat G, Yu H, Saraswat K, Vuckovic J, Nishi Y 2009 Opt. Express 17 10019

    [142]

    Hu W, Cheng B, Xue C, Xue H, Su S, Bai A, Luo L, Yu Y, Wang Q 2009 Appl. Phys. Lett. 95 92102

    [143]

    Liu Z, Hu W, Li C, Li Y, Xue C, Li C, Zuo Y, Cheng B, Wang Q 2012 Appl. Phys. Lett. 101 231108

    [144]

    Liu Z, Hu W, Su S, Li C, Li C, Xue C, Li Y, Zuo Y, Cheng B, Wang Q 2012 Opt. Express 20 22327

    [145]

    Pavesi L, Dal Negro L, Mazzoleni C, Franzo G, Priolo F 2000 Nature 408 440

    [146]

    Cloutier S G, Kossyrev P A, Xu J 2005 Nat. Mater. 4 887

    [147]

    Rong H, Xu S, Kuo Y, Sih V, Cohen O, Raday O, Paniccia M 2007 Nat. Photon. 1 232

    [148]

    Samuel I D, Namdas E B, Turnbull G A 2009 Nat. Photon. 3 546

    [149]

    Tanabe K, Watanabe K, Arakawa Y 2012 Sci. Rep. 2 349

    [150]

    Tanabe K, Guimard D, Bordel D, Iwamoto S, Arakawa Y 2010 Opt. Express 18 10604

    [151]

    Liang D, Fiorentino M, Okumura T, Chang H, Spencer D T, Kuo Y, Fang A W, Dai D, Beausoleil R G, Bowers J E 2009 Opt. Express 17 20355

    [152]

    Fang A W, Lively E, Kuo Y, Liang D, Bowers J E 2008 Opt. Express 16 4413

    [153]

    Liang D, Bowers J E 2008 J. Vac. Sci. Technol. B 26 1560

    [154]

    van Campenhout J, Rojo Romeo P, Regreny P, Seassal C, van Thourhout D, Verstuyft S, Di Cioccio L, Fedeli J, Lagahe C, Baets R 2007 Opt. Express 15 6744

    [155]

    Fang A W, Park H, Cohen O, Jones R, Paniccia M J, Bowers J E 2006 Opt. Express 14 9203

    [156]

    Roelkens G, van Thourhout D, Baets R, Smit M 2006 Opt. Express 14 8154

    [157]

    Mi Z, Bhattacharya P, Yang J, Pipe K P 2005 Electron. Lett. 41 742

    [158]

    Chen S M, Tang M C, Wu J, Jiang Q, Dorogan V G, Benamara M, Mazur Y I, Salamo G J, Seeds A J, Liu H 2014 Electron. Lett. 50 1467

计量
  • 文章访问数:  7631
  • PDF下载量:  1324
  • 被引次数: 0
出版历程
  • 收稿日期:  2015-07-07
  • 修回日期:  2015-08-14
  • 刊出日期:  2015-10-05

/

返回文章
返回