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对于GD-a-SixC1-x:H薄膜进行了XPS分析,得到了一些与Katayama相类似的结果。本文将给出GD-a-SixC1-x:H样品的价电子等离子激元(Plasmon)的频率ωp以及原子浓度(Nsi+NC+NH)随样品含碳量的变化,Si2p和C1s芯电子结合能随含碳量变化的化学移动,并对这些结果进行了初步的分析。XPS analyses of the GD-a-SixC1-x:H samples have been made, the results are similar to those of katayama. In this paper, the chemical shifts of Si2p and Cls levels, the observed valence-electron plasmon energy hωp and the atomic density of our samples with various alloy composition x are presented. The results are discussed preliminarily.
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