The properties of boron-doped diamond films prepared by hot filament CVD were studied with Raman spectra and X-ray microanalysis. It was found that the content of the graphitic type （Ｓｐ2)bonding in the CVD diamond was reduced at low boron concentrations, and the widening and shift of the characteristic diamond Ｓｐ3 Raman peak appeared in the diamond with increasing boron concentrations. This can be interpreted in terms of the lattice strain and Fano interaction caused by boron doping.