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使用x射线衍射(XRD)、x射线光电子谱(XPS)、高分辨透射电子显微镜(HRTEM)和原子力显微镜（AFM）多种观测手段分析了TiN薄膜和Ti1-xSixNy纳米复合薄膜的微观结构.实验分析证明Ti1-xSixNy薄膜是由直径为3—5nm的纳米晶TiN和非晶Si3N4相构成，并且Ti1-xSix
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关键词:
- 纳米复合薄膜 /
- 自由能 /
- 表面粗糙度 /
- TiN /
- Ti1-xSixNy
The microstructure of TiN coatings and Ti1-xSixNy nanocomposite coatings was studied by means of x-ray diffrection, x-ray photoelection spectroscopy, high resolution transmission electron microscopy and atomic force microscopy. The results showed that the Ti1-xSixNy coatings consisted of TiN nanocrystallites with grain size of 3-5nm and amorphous Si3N4 phase. The roughness of Ti1-xSixNy coatings was less than that of TiN coatings prepared under the same conditions. The orientation of TiN crystals in the Ti1-xSixNy coatings was discussed on the basis of interface energy.-
Keywords:
- nanocomposite coating /
- free energy /
- roughness /
- TiN /
- Ti1-xSixNy
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