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低温氩等离子体中的单探针和发射光谱诊断技术

牛田野 曹金祥 刘 磊 刘金英 王 艳 王 亮 吕 铀 王 舸 朱 颖

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低温氩等离子体中的单探针和发射光谱诊断技术

牛田野, 曹金祥, 刘 磊, 刘金英, 王 艳, 王 亮, 吕 铀, 王 舸, 朱 颖

The techniques of single probe and emission spectroscopy diagnostics in low temperature argon plasmas

Niu Tian-Ye, Cao Jin-Xiang, Liu Lei, Liu Jin-Ying, Wang Yan, Wang Liang, Lü You, Wang Ge, Zhu Ying
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  • 使用静电探针和发射光谱分析方法,测量了实验室圆柱形辉光等离子体轴向I-V曲线和发射光谱.通过电子能量概率函数方法、Fermi-Dirac模型、低气压放电的Schottky扩散理论,分别计算了等离子体的电子温度、电子激发温度和电子密度.研究了利用等离子体发射光谱计算电子激发温度、低气压放电理论估算电子密度的方法与静电探针诊断方法的内在联系,讨论了不同方法的使用特点.所研究的方法在某些特殊环境的等离子体参数诊断中具有较好的参考和应用价值.
    Electric probe and analytical emission spectroscopy were used to acquire I-V curve and spectra of cylindrical plasmas produced by dc high-voltage discharge in the laboratory. The electron excitation temperature, electron temperature and electron density were obtained using respectively the electron energy probability function, Fermi-Dirac model and Schottky diffusion theory of low pressure discharge. The inherent relationships between the method of emission spectroscopy for determination of electron excitation temperatures, method of low-pressure discharge theory for estimation of electron density, and method of electric probe for calculation of electron temperature and density were explored. Further more, the spcial features of different diagnostic techniques were discussed. It was pointed out that the methods described in the article have preferential applications in plasma diagnostics under special environments.
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出版历程
  • 收稿日期:  2006-08-01
  • 修回日期:  2006-12-15
  • 刊出日期:  2007-02-05

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