搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

TMR与GMR传感器1/f噪声的研究进展

吴少兵 陈实 李海 杨晓非

引用本文:
Citation:

TMR与GMR传感器1/f噪声的研究进展

吴少兵, 陈实, 李海, 杨晓非

Researching progress of the 1/f noise in TMR and GMR sensors

Wu Shao-Bing, Chen Shi, Li Hai, Yang Xiao-Fei
PDF
导出引用
  • 隧道结磁阻(TMR) 传感器及巨磁阻(GMR) 传感器的1/f噪声在低频段噪声功率密度较大, 是影响其低频下分辨率和灵敏度的主要噪声形式. 本文详细介绍了近年来TMR传感器及GMR传感器1/f噪声的特点、来源、理论模型、检测方法及降噪措施等方面的研究进展, 并就隧道结磁阻传感器1/f噪声的物理模型进行了详细解释. 通过纳米模拟软件Virtual NanoLab对不同MgO厚度的Fe/MgO/Fe型磁性隧道结(MTJ) 进行了隧穿概率和TMR变化率的模拟计算, 得到保守估计与乐观估计的TMR变化率, 分别为98.1%与10324.55%, 同时通过MTJ的噪声模型分析了MgO厚度对TMR传感器噪声的影响. 制备了磁屏蔽系数大于10000的磁屏蔽筒并搭建了磁阻传感器1/f噪声的测试平台, 通过测试验证了磁屏蔽系统对环境磁场具有较好的屏蔽效果, 为噪声检测提供了稳定的磁场空间. 最后分析了TMR与GMR中各种因素对传感器噪声的影响, 提出了影响MTJ传感器1/f噪声的因素及一些降噪措施.
    The low-frequency noise is the most important influence on the low frequency resolution and sensitivity in tunnel junction magnetoresistance(TMR) sensors and giant magnetoresistance (GMR) sensor for the large noise power density. In this paper, We describe the 1/f noise characteristics, sources, theoretical models, testing methods and noise reduction measures for TMR sensors and GMR sensors, and the detailed physical model of 1/f noise in the tunnel junction magnetoresistive sensor is explained. By nano-simulation software Virtual NanoLab, Fe/MgO/Fe magnetic tunnel junctions (MTJs) with different thicknesses of MgO layer are studied. Their tunneling probabilities and TMR change rates are simulated and calculated, the conservative and the optimistic estimates of the Change rate of TMR are 98.1 % and 10324.55%.While the influence of MgO thickness on noise is studied through the MTJ model. To study the noise dependance on external magnetic field, an magnetic shielding equipment for noise measurement is set up, and the tests show that the noise in the magnetic shielding environment is significantly reduced.
    • 基金项目: 国家自然科学基金(批准号: 60871018)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 60871018).
    [1]

    Scola J, Polovy H, Fermon C, Pannetier M, Feng G, Fahy K, Coey J M 2007 Appl. Phys. Lett. 90 252501

    [2]

    Kurt H, Oguz K, Niizeki T, Coey J M D 2010 J. Appl. Phys. 107 083920

    [3]

    Edelstein A S, Fischer G, Pulskamp J, Pedersen M, Bernard W 2006 J. Appl. Phys. 99 08B317

    [4]

    Stutzke N A, Russek S E, Pappas D P, Tondra M 2005 J. Appl. Phys. 97 10Q107

    [5]

    Peng S Q, Du L, Zhuang Y Q, Bao J L, He L, Chen W H 2008 Acta Phys. Sin. 57 5205 (in Chinese) [彭绍泉, 杜磊, 庄弈琪, 包军林, 何亮, 陈伟华 2008 物理学报 57 5205]

    [6]

    Du L, Zhuang Y Q, Xue L J 2002 Acta Phys. Sin. 51 2836(in Chinese) [杜磊, 庄弈琪, 薛丽君 2002 物理学报 51 2836]

    [7]

    Liang Z P, Dong Z C 2010 Acta Phys. Sin. 59 1288 (in Chinese) [梁志鹏, 董正超 2010 物理学报 59 1288]

    [8]

    Yu G Q, Diao Z, Feng J F, Kurt H, Han X F, Coey J M D 2011 Appl. Phys. Lett. 98 112504

    [9]

    Feng J F, Diao Z, Feng G, Nowak E R, Coey J M D 2010 Appl. Phys.Lett. 96 052504

    [10]

    Herranz D, Bonell F, Gomez-Ibarlucea A 2010 J. Appl. Phys. 96 202501

    [11]

    Guerrero R, Pannetier-Lecoeur M, Fermon C, Cardoso S, Freitas P P 2009 J. Appl. Phys. 105 113922

    [12]

    Egelhoff Jr W F, Pong P W T, Unguris J, McMichael R D, Nowakc E R, Edelsteind A S, Burnetted J E, Fischer G A 2009 Sens. Actuators 155 217

    [13]

    Nowak E R, Weissman M B, Parkin S S P 1999 Appl. Phys. Lett. 74 600

    [14]

    Jiang L, Nowak E R, Scott P E, Johnson J, Slaughter J M, Sun J J 2004 Phys. Rev. B 69 054407

    [15]

    Nowak E R, Merithew R D, Weissman M B, Bloom I, Parkin S S P 1998 J. Appl. Phys. 84 6195

    [16]

    Ingvarsson S, Xiao G, Parkin S S P, Gallagher W J, Grinstein G, Koch R H 2000 Phys. Rev. Lett. 85 3289

    [17]

    Gokce A, Nowak E R, Yang S H, Pankin S S P 2006 J. Appl. Phys. 99 08A906

    [18]

    Stearrett R, Wang W G, Shah L R, Gokce Aisha, Xiao J Q, Nowak E R 2010 J. Appl. Phys. 107 064502

    [19]

    Bhattacharya D K, Vaidyanathan S 1997 J. Magn. Magn. Mater. 166 111

    [20]

    Hooge F N, Kleinpenning T G M, Vandamme L K J 1981 Rep. Prog. Phys. 44 31

    [21]

    Xiao M, Klaassen K B 2000 IEEE Trans. Magn. 36 5

    [22]

    Ren C, Liu X, Schrag B D, Xiao G 2004 Phys. Rev. B 69 104405

    [23]

    Klaassen K B, Van Peppen J C L, Xing X 2005 J. Appl. Phys. 93 8573

    [24]

    Ozbay A, Gokce A, Flanagan T, Stearrett R A, Nowak E R, Nordman C 2009 Appl. Phys. Lett. 94 023502

    [25]

    Smith N, Amett P 2001 Appl. Phys. Lett. 78 1448

    [26]

    Almeida J M, Ferreira R, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08B314

    [27]

    Jander A, Nordman C A, Pohm A V, Anderson J M 2003 J.Appl. Phys. 93 10

    [28]

    Tsang C, Fontana R E, Lin T, Heim D E 1994 IEEE Trans. Magn. 30 3801

    [29]

    Ferreira R, Wisniowski P, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08K706

    [30]

    Wang W G, Ni C, Rumaiz A, Wang Y, Fan X, Moriyama T, Cao R, Wen Q Y, Zhang H W, Xiao J Q 2008 Appl. Phys. Lett. 92 152501

    [31]

    Dutta P, Horn P M 1981 Rev. Mod. Phys. 53 497

    [32]

    Wang W G, Jordan-Sweet J, Miao G X, Ni C, Rumaiz A K, Shah L R, Fan X, Parsons P, Stearrett R, Nowak E R, Moodera J S, Xiao J Q 2009 Appl. Phys. Lett. 95 242501

    [33]

    Liou S H, Zhang R, Russek S E, Yuan L, Halloran S T, Pappas D P 2008 J. Appl. Phys. 103 07E920

    [34]

    Aliev F G, Guerrero R, Herranz D, Villar R 2007 Appl. Phys. Lett. 91 232504

    [35]

    Veloso A, Freitas P P, Wei P, Barradas N P, Soares J C, Almeida B, Sousa J B 2000 Appl. Phys. Lett. 77 1020

    [36]

    Hasegawa N, Koile F, Ikarashi K, Ishizone M, Lawamura M, Nakazawa Y, Takahashi A 2002 J. Appl. Phys. 91 8774

    [37]

    Park W K, Moodera J S, Taylor J, Tondra M, Daughton J M, Thomas A, Bruckl H 2003 J. Appl. Phys. 93 7020

    [38]

    Ferreira R, Wisniowski P, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08K706

    [39]

    Mazumdar D, Liu X, Schrag B D, Shen W, Carter M, Xiao G 2007 J. Appl. Phys. 101 09B502

    [40]

    Mazumdar D, Liu X, Schrag B D, Carter M, Shen W, Xiao G 2007 Appl. Phys. Lett. 91 033507

    [41]

    Schrag B D, Anguelouch A, Invarsson S, Xiao G, Lu Y, Trouilloud P L, Gupta A, Wanner R A, Gallagher W J, Rice P M, Parkin S S P 2000 Appl. Phys. Lett. 77 2373

    [42]

    Chaves R C, Freitas P P, Ocker B, Maass W 2007 Appl. Phys. Lett. 91 102504

    [43]

    Chaves R C, Freitas P P, Ocker B, Maass W 2008 J. Appl. Phys. 103 07E931

    [44]

    Lhermet H, Cuchet R, Rochaz L V, Vaudaine M H 2000 IEEE Trans.Magn. 36 5

    [45]

    Nor A F M, Hill E W 2002 IEEE Trans.Magn. 38 5

    [46]

    Diao Z, Feng J F, Kurt H 2010 Appl. Phys. Lett. 96 202506

    [47]

    Ikeda S, Hayakawa J, Ashizawa Y, Lee Y M, Miura K, Hasegawa H, Tsunoda M, Matsukura F, Ohno H 2008 Appl. Phys. Lett. 93 082508

  • [1]

    Scola J, Polovy H, Fermon C, Pannetier M, Feng G, Fahy K, Coey J M 2007 Appl. Phys. Lett. 90 252501

    [2]

    Kurt H, Oguz K, Niizeki T, Coey J M D 2010 J. Appl. Phys. 107 083920

    [3]

    Edelstein A S, Fischer G, Pulskamp J, Pedersen M, Bernard W 2006 J. Appl. Phys. 99 08B317

    [4]

    Stutzke N A, Russek S E, Pappas D P, Tondra M 2005 J. Appl. Phys. 97 10Q107

    [5]

    Peng S Q, Du L, Zhuang Y Q, Bao J L, He L, Chen W H 2008 Acta Phys. Sin. 57 5205 (in Chinese) [彭绍泉, 杜磊, 庄弈琪, 包军林, 何亮, 陈伟华 2008 物理学报 57 5205]

    [6]

    Du L, Zhuang Y Q, Xue L J 2002 Acta Phys. Sin. 51 2836(in Chinese) [杜磊, 庄弈琪, 薛丽君 2002 物理学报 51 2836]

    [7]

    Liang Z P, Dong Z C 2010 Acta Phys. Sin. 59 1288 (in Chinese) [梁志鹏, 董正超 2010 物理学报 59 1288]

    [8]

    Yu G Q, Diao Z, Feng J F, Kurt H, Han X F, Coey J M D 2011 Appl. Phys. Lett. 98 112504

    [9]

    Feng J F, Diao Z, Feng G, Nowak E R, Coey J M D 2010 Appl. Phys.Lett. 96 052504

    [10]

    Herranz D, Bonell F, Gomez-Ibarlucea A 2010 J. Appl. Phys. 96 202501

    [11]

    Guerrero R, Pannetier-Lecoeur M, Fermon C, Cardoso S, Freitas P P 2009 J. Appl. Phys. 105 113922

    [12]

    Egelhoff Jr W F, Pong P W T, Unguris J, McMichael R D, Nowakc E R, Edelsteind A S, Burnetted J E, Fischer G A 2009 Sens. Actuators 155 217

    [13]

    Nowak E R, Weissman M B, Parkin S S P 1999 Appl. Phys. Lett. 74 600

    [14]

    Jiang L, Nowak E R, Scott P E, Johnson J, Slaughter J M, Sun J J 2004 Phys. Rev. B 69 054407

    [15]

    Nowak E R, Merithew R D, Weissman M B, Bloom I, Parkin S S P 1998 J. Appl. Phys. 84 6195

    [16]

    Ingvarsson S, Xiao G, Parkin S S P, Gallagher W J, Grinstein G, Koch R H 2000 Phys. Rev. Lett. 85 3289

    [17]

    Gokce A, Nowak E R, Yang S H, Pankin S S P 2006 J. Appl. Phys. 99 08A906

    [18]

    Stearrett R, Wang W G, Shah L R, Gokce Aisha, Xiao J Q, Nowak E R 2010 J. Appl. Phys. 107 064502

    [19]

    Bhattacharya D K, Vaidyanathan S 1997 J. Magn. Magn. Mater. 166 111

    [20]

    Hooge F N, Kleinpenning T G M, Vandamme L K J 1981 Rep. Prog. Phys. 44 31

    [21]

    Xiao M, Klaassen K B 2000 IEEE Trans. Magn. 36 5

    [22]

    Ren C, Liu X, Schrag B D, Xiao G 2004 Phys. Rev. B 69 104405

    [23]

    Klaassen K B, Van Peppen J C L, Xing X 2005 J. Appl. Phys. 93 8573

    [24]

    Ozbay A, Gokce A, Flanagan T, Stearrett R A, Nowak E R, Nordman C 2009 Appl. Phys. Lett. 94 023502

    [25]

    Smith N, Amett P 2001 Appl. Phys. Lett. 78 1448

    [26]

    Almeida J M, Ferreira R, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08B314

    [27]

    Jander A, Nordman C A, Pohm A V, Anderson J M 2003 J.Appl. Phys. 93 10

    [28]

    Tsang C, Fontana R E, Lin T, Heim D E 1994 IEEE Trans. Magn. 30 3801

    [29]

    Ferreira R, Wisniowski P, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08K706

    [30]

    Wang W G, Ni C, Rumaiz A, Wang Y, Fan X, Moriyama T, Cao R, Wen Q Y, Zhang H W, Xiao J Q 2008 Appl. Phys. Lett. 92 152501

    [31]

    Dutta P, Horn P M 1981 Rev. Mod. Phys. 53 497

    [32]

    Wang W G, Jordan-Sweet J, Miao G X, Ni C, Rumaiz A K, Shah L R, Fan X, Parsons P, Stearrett R, Nowak E R, Moodera J S, Xiao J Q 2009 Appl. Phys. Lett. 95 242501

    [33]

    Liou S H, Zhang R, Russek S E, Yuan L, Halloran S T, Pappas D P 2008 J. Appl. Phys. 103 07E920

    [34]

    Aliev F G, Guerrero R, Herranz D, Villar R 2007 Appl. Phys. Lett. 91 232504

    [35]

    Veloso A, Freitas P P, Wei P, Barradas N P, Soares J C, Almeida B, Sousa J B 2000 Appl. Phys. Lett. 77 1020

    [36]

    Hasegawa N, Koile F, Ikarashi K, Ishizone M, Lawamura M, Nakazawa Y, Takahashi A 2002 J. Appl. Phys. 91 8774

    [37]

    Park W K, Moodera J S, Taylor J, Tondra M, Daughton J M, Thomas A, Bruckl H 2003 J. Appl. Phys. 93 7020

    [38]

    Ferreira R, Wisniowski P, Freitas P P, Langer J, Ocker B, Maass W 2006 J. Appl. Phys. 99 08K706

    [39]

    Mazumdar D, Liu X, Schrag B D, Shen W, Carter M, Xiao G 2007 J. Appl. Phys. 101 09B502

    [40]

    Mazumdar D, Liu X, Schrag B D, Carter M, Shen W, Xiao G 2007 Appl. Phys. Lett. 91 033507

    [41]

    Schrag B D, Anguelouch A, Invarsson S, Xiao G, Lu Y, Trouilloud P L, Gupta A, Wanner R A, Gallagher W J, Rice P M, Parkin S S P 2000 Appl. Phys. Lett. 77 2373

    [42]

    Chaves R C, Freitas P P, Ocker B, Maass W 2007 Appl. Phys. Lett. 91 102504

    [43]

    Chaves R C, Freitas P P, Ocker B, Maass W 2008 J. Appl. Phys. 103 07E931

    [44]

    Lhermet H, Cuchet R, Rochaz L V, Vaudaine M H 2000 IEEE Trans.Magn. 36 5

    [45]

    Nor A F M, Hill E W 2002 IEEE Trans.Magn. 38 5

    [46]

    Diao Z, Feng J F, Kurt H 2010 Appl. Phys. Lett. 96 202506

    [47]

    Ikeda S, Hayakawa J, Ashizawa Y, Lee Y M, Miura K, Hasegawa H, Tsunoda M, Matsukura F, Ohno H 2008 Appl. Phys. Lett. 93 082508

  • [1] 刘瑛, 郭斯琳, 张勇, 杨鹏, 吕克洪, 邱静, 刘冠军. 1/f噪声及其在二维材料石墨烯中的研究进展. 物理学报, 2023, 72(1): 017302. doi: 10.7498/aps.72.20221253
    [2] 宋志军, 吕昭征, 董全, 冯军雅, 姬忠庆, 金勇, 吕力. 极低温散粒噪声测试系统及隧道结噪声测量. 物理学报, 2019, 68(7): 070702. doi: 10.7498/aps.68.20190114
    [3] 赵启凤, 庄奕琪, 包军林, 胡为. 基于1/f噪声的NPN晶体管辐照感生电荷的定量分离. 物理学报, 2015, 64(13): 136104. doi: 10.7498/aps.64.136104
    [4] 刘宇安, 庄奕琪, 杜磊, 苏亚慧. 氮化镓基蓝光发光二极管伽马辐照的1/f噪声表征. 物理学报, 2013, 62(14): 140703. doi: 10.7498/aps.62.140703
    [5] 陈海鹏, 曹军胜, 郭树旭. 高功率半导体激光器结温与1/f噪声的关系研究. 物理学报, 2013, 62(10): 104209. doi: 10.7498/aps.62.104209
    [6] 孙鹏, 杜磊, 陈文豪, 何亮. 基于辐照前1/f噪声的金属-氧化物-半导体场效应晶体管潜在缺陷退化模型. 物理学报, 2012, 61(6): 067801. doi: 10.7498/aps.61.067801
    [7] 李扬, 郭树旭. 基于稀疏分解的大功率半导体激光器1/f噪声参数估计的新方法. 物理学报, 2012, 61(3): 034208. doi: 10.7498/aps.61.034208
    [8] 代煜, 张建勋. 基于小波变换和维纳滤波的半导体器件1/f噪声滤波. 物理学报, 2011, 60(11): 110516. doi: 10.7498/aps.60.110516
    [9] 陈文豪, 杜磊, 殷雪松, 康莉, 王芳, 陈松. PbS红外探测器低频噪声物理模型及缺陷表征研究. 物理学报, 2011, 60(10): 107202. doi: 10.7498/aps.60.107202
    [10] 林丽艳, 杜磊, 包军林, 何亮. 光电耦合器电离辐射损伤电流传输比1/f噪声表征. 物理学报, 2011, 60(4): 047202. doi: 10.7498/aps.60.047202
    [11] 张振国, 郜峰利, 郭树旭, 李雪妍, 于思瑶. 一种估计半导体激光器1/f噪声参数的新方法. 物理学报, 2009, 58(4): 2772-2775. doi: 10.7498/aps.58.2772
    [12] 彭绍泉, 杜 磊, 庄奕琪, 包军林, 何 亮, 陈伟华. 基于辐照前1/f噪声的金属-氧化物-半导体场效应晶体管辐照退化模型. 物理学报, 2008, 57(8): 5205-5211. doi: 10.7498/aps.57.5205
    [13] 杨丽侠, 杜 磊, 包军林, 庄奕琪, 陈晓东, 李群伟, 张 莹, 赵志刚, 何 亮. 60Co γ-射线辐照对肖特基二极管1/f噪声的影响. 物理学报, 2008, 57(9): 5869-5874. doi: 10.7498/aps.57.5869
    [14] 李瑞珉, 杜 磊, 庄奕琪, 包军林. MOSFET 辐照诱生界面陷阱形成过程的1/f噪声研究. 物理学报, 2007, 56(6): 3400-3406. doi: 10.7498/aps.56.3400
    [15] 胡 瑾, 杜 磊, 庄奕琪, 包军林, 周 江. 发光二极管可靠性的噪声表征. 物理学报, 2006, 55(3): 1384-1389. doi: 10.7498/aps.55.1384
    [16] 匡登峰, 刘庆纲, 胡小唐, 胡留长, 郭维廉. 纳米隧道结的制备和特性研究. 物理学报, 2006, 55(1): 80-83. doi: 10.7498/aps.55.80
    [17] 于敦波, 丰家峰, 杜永胜, 韩秀峰, 严 辉, 应启明, 张国成. 成分调制的La1-xSrxMnO3复合隧道结. 物理学报, 2005, 54(10): 4903-4908. doi: 10.7498/aps.54.4903
    [18] 包军林, 庄奕琪, 杜 磊, 李伟华, 万长兴, 张 萍. N/P沟道MOSFET1/f噪声的统一模型. 物理学报, 2005, 54(5): 2118-2122. doi: 10.7498/aps.54.2118
    [19] 孙 涛, 陈兴国, 胡晓宁, 李言谨. HgCdTe长波光伏探测器的表面漏电流及1/f噪声研究. 物理学报, 2005, 54(7): 3357-3362. doi: 10.7498/aps.54.3357
    [20] 董正超, 邢定钰, 董锦明. 铁磁-超导隧道结中的散粒噪声. 物理学报, 2001, 50(3): 556-560. doi: 10.7498/aps.50.556
计量
  • 文章访问数:  9616
  • PDF下载量:  1341
  • 被引次数: 0
出版历程
  • 收稿日期:  2011-07-11
  • 修回日期:  2012-05-10
  • 刊出日期:  2012-05-05

/

返回文章
返回